JPS6130814U - Surface shape measuring device - Google Patents
Surface shape measuring deviceInfo
- Publication number
- JPS6130814U JPS6130814U JP11436584U JP11436584U JPS6130814U JP S6130814 U JPS6130814 U JP S6130814U JP 11436584 U JP11436584 U JP 11436584U JP 11436584 U JP11436584 U JP 11436584U JP S6130814 U JPS6130814 U JP S6130814U
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- pickup
- measuring device
- type pickup
- guide shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第５図は本考案の一実施例に係る表面形状測
定装置を説明するための図であり、第１図は同表面形状
測定装置の全体構成を示す図、第２図は測定器本体の一
部切欠した側面図、第３図は第２図における矢印Ａの方
向から見た図、第４図は同Ｂ−Ｂ線に沿って切断し矢印
方向に見た図、第５図ａ， ｂはそれぞれ測定子ホルダ
のＸ方向およびＹ方向の変位に対する４象限光検知器の
出力特性を示す図、第６図は従来の表面形状測定装置の
構成を示す斜視図である。
１，２１・・・測定器本体、２・・・増幅器、３・・・
ペン記録計、６・・・ロータジャーナル部、７・・・被
測定面、２２〜２４・・・ガイドシャフト、２５．２７
・・・シャフトホルダ、３１．３３・・・アームホルダ
、３４〈３７・・・アーム、５２・・・測定器ホルダ、
５４・・・ボールねじ、５７・・・モータ、５９・・・
ピックアップ、７２・・・レーザ管、７３・・・４象限
光検知器。1 to 5 are diagrams for explaining a surface shape measuring device according to an embodiment of the present invention, FIG. 1 is a diagram showing the overall configuration of the same surface shape measuring device, and FIG. 3 is a partially cutaway side view of the main body of the container; FIG. 3 is a view taken from the direction of arrow A in FIG. 2; FIG. Figures a and b are diagrams showing the output characteristics of a four-quadrant photodetector with respect to the displacement of the probe holder in the X and Y directions, respectively, and Figure 6 is a perspective view showing the configuration of a conventional surface profile measuring device. 1, 21...Measuring instrument body, 2...Amplifier, 3...
Pen recorder, 6... Rotor journal section, 7... Surface to be measured, 22-24... Guide shaft, 25.27
... Shaft holder, 31.33... Arm holder, 34<37... Arm, 52... Measuring instrument holder,
54...Ball screw, 57...Motor, 59...
Pickup, 72...Laser tube, 73...4-quadrant photodetector.
Claims (1)
じた信号を出力する触針式ピックアップと、この触針式
ピックアップを前記被測定面に沿って移動自在に支持す
るガイドシャフトと、このガイドシャフトに支持された
前記触針式ピックアップを駆動するピックアップ駆動手
段と、前記触針式ピックアップの移動方向と直交する面
における前記触針式ピックアップの位置を光学的に検出
するピンクアツケ位置検出手段と、このビックアップ位
置検出手段の検出値を用いて前記触針式ピックアップの
測定値からガイドシャフトの歪み分を補正する手段とを
具備してなることを特徴とする表面形状測定装置。A stylus-type pickup that slides on the surface to be measured and outputs a signal according to the surface shape of the 5lI constant surface, and a guide shaft that supports the stylus-type pickup so as to be movable along the surface to be measured. a pickup driving means for driving the stylus-type pickup supported by the guide shaft; and a pin-punch position for optically detecting the position of the stylus-type pickup in a plane orthogonal to the moving direction of the stylus-type pickup. A surface profile measuring device comprising: a detection means; and a means for correcting the distortion of the guide shaft from the measured value of the stylus pickup using the detected value of the start-up position detecting means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11436584U JPS6130814U (en) | 1984-07-27 | 1984-07-27 | Surface shape measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11436584U JPS6130814U (en) | 1984-07-27 | 1984-07-27 | Surface shape measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6130814U true JPS6130814U (en) | 1986-02-24 |
Family
ID=30673387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11436584U Pending JPS6130814U (en) | 1984-07-27 | 1984-07-27 | Surface shape measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130814U (en) |
-
1984
- 1984-07-27 JP JP11436584U patent/JPS6130814U/en active Pending
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