JPS60161468U - 塗布装置 - Google Patents

塗布装置

Info

Publication number
JPS60161468U
JPS60161468U JP4660984U JP4660984U JPS60161468U JP S60161468 U JPS60161468 U JP S60161468U JP 4660984 U JP4660984 U JP 4660984U JP 4660984 U JP4660984 U JP 4660984U JP S60161468 U JPS60161468 U JP S60161468U
Authority
JP
Japan
Prior art keywords
coating device
exhaust
duct
atmosphere
open
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4660984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0137729Y2 (enrdf_load_stackoverflow
Inventor
健 若原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP4660984U priority Critical patent/JPS60161468U/ja
Publication of JPS60161468U publication Critical patent/JPS60161468U/ja
Application granted granted Critical
Publication of JPH0137729Y2 publication Critical patent/JPH0137729Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4660984U 1984-03-30 1984-03-30 塗布装置 Granted JPS60161468U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4660984U JPS60161468U (ja) 1984-03-30 1984-03-30 塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4660984U JPS60161468U (ja) 1984-03-30 1984-03-30 塗布装置

Publications (2)

Publication Number Publication Date
JPS60161468U true JPS60161468U (ja) 1985-10-26
JPH0137729Y2 JPH0137729Y2 (enrdf_load_stackoverflow) 1989-11-14

Family

ID=30561166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4660984U Granted JPS60161468U (ja) 1984-03-30 1984-03-30 塗布装置

Country Status (1)

Country Link
JP (1) JPS60161468U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469012A (en) * 1987-09-10 1989-03-15 Kyushu Nippon Electric Semiconductor manufacturing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6469012A (en) * 1987-09-10 1989-03-15 Kyushu Nippon Electric Semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JPH0137729Y2 (enrdf_load_stackoverflow) 1989-11-14

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