JPS60160300A - Manufacture of array-type ultrasonic wave probe - Google Patents
Manufacture of array-type ultrasonic wave probeInfo
- Publication number
- JPS60160300A JPS60160300A JP59014928A JP1492884A JPS60160300A JP S60160300 A JPS60160300 A JP S60160300A JP 59014928 A JP59014928 A JP 59014928A JP 1492884 A JP1492884 A JP 1492884A JP S60160300 A JPS60160300 A JP S60160300A
- Authority
- JP
- Japan
- Prior art keywords
- lead
- cut
- piezoelectric transducer
- electrode
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000011888 foil Substances 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims description 34
- 239000010409 thin film Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 abstract description 3
- 238000005476 soldering Methods 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- GNLJOAHHAPACCT-UHFFFAOYSA-N 4-diethoxyphosphorylmorpholine Chemical compound CCOP(=O)(OCC)N1CCOCC1 GNLJOAHHAPACCT-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、複数の分離された圧電振動子エレメントを並
設されるアレー型超音波探触子の製造方法に関し、時に
音場の偏向を減少しかつリードの引出しの容易なアレー
型超音波探触子を容易に製造できるアレー型超音波探触
子の製造方法に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for manufacturing an array-type ultrasonic probe in which a plurality of separated piezoelectric transducer elements are arranged in parallel. The present invention relates to a method for manufacturing an array-type ultrasonic probe that can easily manufacture an array-type ultrasonic probe with a reduced number of leads and easy lead extraction.
（従来技術）
圧電振動子を用いた超音波探触子は、ＰＺＴ等の圧電振
動子の両面に電極を貼着して構成する。(Prior Art) An ultrasonic probe using a piezoelectric vibrator is constructed by pasting electrodes on both sides of a piezoelectric vibrator such as PZT.
そしてこれら電極間に電圧を印加して超音波を発生させ
、この超音波を被測定物に放射し、又放射した超音波に
対する被測定物からの反射波を受けてこれを電気信号に
変換するものである。ところで、前述の如き超音波探触
子は、一方の電極面をダンパー材からなる振動子保持体
上に貼着する関係から、第１図（ａ）に示す構成を採っ
て１７＼る。Then, a voltage is applied between these electrodes to generate ultrasonic waves, which are emitted to the object to be measured, and the reflected waves of the emitted ultrasonic waves from the object to be measured are received and converted into electrical signals. It is something. By the way, the above-mentioned ultrasonic probe 17 has the configuration shown in FIG. 1(a) because one electrode surface is attached onto a vibrator holder made of a damper material.
即ち、ＰＺＴ等の圧電振動子ｌの第１の面に第１の電極
２を設け、支持体に貼着する第２の面に第２の電極３を
設け、第２の電極（裏面電極）３の一部を導電部３２を
介して表面に導出し、第１の面の一部に折返し電極３１
を設ける、いわゆる「折返し電極構造」を採っている。That is, a first electrode 2 is provided on the first surface of a piezoelectric vibrator l made of PZT, etc., a second electrode 3 is provided on the second surface to be attached to the support, and a second electrode (back electrode) is provided. A part of the electrode 31 is led out to the surface through the conductive part 32, and a folded electrode 31 is formed on a part of the first surface.
A so-called "folded electrode structure" is adopted.
（従来技術の問題点）
このため、第１図（ｂ）に示すように超音波探触子の音
場中心ａ２が機械的中心線ａｌから偏り、このため本来
あるべき音場特性曲線ｂ１がｂ２のこと〈移動して音場
の対称性を失い、偏向か避けられない。しかも折返し電
極を設けたことにより表面電極の振動実効面積が減り、
それだけ超音波音場が歪められることになる。(Problems with the prior art) For this reason, as shown in FIG. 1(b), the sound field center a2 of the ultrasonic probe deviates from the mechanical center line al, which causes the sound field characteristic curve b1 that should be Regarding b2, the symmetry of the sound field is lost due to movement, and deflection is unavoidable. Moreover, by providing the folded electrode, the effective vibration area of the surface electrode is reduced.
The ultrasonic sound field will be distorted accordingly.
また、第１図（Ｌ）に示す如き構造の探触子を細かく輪
切りにした圧電振動子エレメントを振動子保持台上に多
数個並列に設けたアレー型超音波探触子にあっては、各
探触子アレーの間隔が非常に小さく、リート線の各電極
への取付けが非常に困難であるなどの不都合が生じる。Furthermore, in the case of an array type ultrasonic probe in which a large number of piezoelectric transducer elements obtained by cutting a probe having a structure as shown in FIG. Disadvantages arise, such as the spacing between the probe arrays being very small, making it extremely difficult to attach the Riet wire to each electrode.
（発明の目的）
本発明の目的は、音場の対称性を保ち且つ音場の歪を防
止しうるアレー型超音波探触子を容易に製造できるアレ
ー型超音波探触子の製造方法を提供することにある。(Object of the Invention) The object of the present invention is to provide a method for manufacturing an array-type ultrasonic probe that can easily manufacture an array-type ultrasonic probe that can maintain sound field symmetry and prevent sound field distortion. It is about providing.
（発明の概要）
本発明は、平面上に形成された圧電振動子板の表面と裏
面に第１と第２の金属薄膜を貼着せしめるｉｌの工程と
、振動子保持台と、前記第１の工程で金属薄膜を形成し
た圧電振動子板との間に、リード部用でかつ振動子保持
台の側方に張り出した金属箔を挾持せしめて、振動子保
持台と圧゛喝振動子板とを一体的に接合せしめる第２の
工程と、前記第２の工程終了後、リード部用の金属箔が
張り出している方向に第１の金属薄膜と圧電振動子板と
第２の金属薄膜とを切断した後、リード部用の金属箔を
切断する第３の工程とを含むアレー型超音波探触子の製
造方法を提供するものである。(Summary of the Invention) The present invention provides an il process for attaching first and second metal thin films to the front and back surfaces of a piezoelectric vibrator plate formed on a plane, a vibrator holding stand, and the first and second metal thin films. The piezoelectric vibrator plate on which a metal thin film was formed in the process of step 1 is sandwiched between the metal foil for the lead portion and protruding from the side of the vibrator holder, and the vibrator holder and the pressure vibrator plate are separated. a second step of integrally bonding the first metal thin film, the piezoelectric vibrator plate, and the second metal thin film in the direction in which the metal foil for the lead portion protrudes after the second step; The present invention provides a method for manufacturing an array type ultrasonic probe, which includes a third step of cutting the metal foil for the lead portion after cutting the metal foil.
（実施例） 以下、本発明について詳細に説明する。(Example) The present invention will be explained in detail below.
第２図（ａ）は、本発明に係るアレー型超音波探触子を
振動子保持台上に形成する前の段階の構造を示す斜視図
である。FIG. 2(a) is a perspective view showing the structure of the array-type ultrasonic probe according to the present invention at a stage before it is formed on the transducer holder.
第２図（Ｌ）において、１′は板状に形成されたＰＺＴ
等の圧電振動子板であり、圧電振動子板１′の第１の面
全面には、第１の電極となるＡｇ等の金属薄膜４′が設
けられ、第２の面全面には第２の電極となるＡｇ等の金
属薄膜５′が設けられる。金属薄膜５′の下面には、リ
ード部用の金属箔６及び７が積層接着されており、且つ
横方向に導出されている。８はダンパー材による振動子
保持台である。In Fig. 2 (L), 1' is PZT formed into a plate shape.
The piezoelectric vibrator plate 1' is provided with a metal thin film 4' made of Ag or the like which becomes a first electrode on the entire first surface, and a second metal thin film 4' is provided on the entire second surface of the piezoelectric vibrator plate 1'. A thin metal film 5' made of Ag or the like is provided to serve as an electrode. Metal foils 6 and 7 for lead portions are laminated and bonded to the lower surface of the metal thin film 5', and are led out laterally. 8 is a vibrator holding stand made of damper material.
アレー型の超音波探触子を製造する場合、まず第２図（
ａ）に示す圧電振動子板１′を、切断器を用いて金属薄
ｌＩ！４′及び５′ごと輪切りにし、第３図（ａ）に示
す如く横巾数ｍｍ程度の圧電振動子エレメント１１，１
２，１３・・＠ｉｎを形成する。これら圧電振動子エレ
メントは、金属薄膜４′及び５′が切断されて上面４こ
電極４を持ち、下面に電極５を持つ。そして電極５は金
属箔６及び７と電気的・機械的に接続されている。When manufacturing an array type ultrasonic probe, first see Figure 2 (
Cut the piezoelectric vibrator plate 1' shown in a) into a thin metal layer using a cutter. Piezoelectric vibrator elements 11, 1 each having a width of several mm are cut into rings by 4' and 5', as shown in FIG. 3(a).
2, 13... forms @in. These piezoelectric vibrator elements have metal thin films 4' and 5' cut to have four electrodes 4 on the upper surface and electrodes 5 on the lower surface. The electrode 5 is electrically and mechanically connected to the metal foils 6 and 7.
次に、第３図（ｂ）に示す如く、各圧電振動子エレメン
ト各１個に対して１個のリード部を有する如く金属箔７
を切断してリード部７１乃至７ｎを形成し、第３図（ｂ
）には明示していないが、金属箔６も同様に切断してリ
ード部６１乃至６ｎを形成する。この切断によりたとえ
ば圧電振動子エレメント１１の両端には、電極５と接続
したリード部６１と７１が設けられたことになる。Next, as shown in FIG. 3(b), a metal foil 7 is attached so as to have one lead portion for each piezoelectric vibrator element.
The lead portions 71 to 7n are formed by cutting the lead portions 71 to 7n.
), the metal foil 6 is also cut in the same way to form lead portions 61 to 6n. By this cutting, lead portions 61 and 71 connected to the electrodes 5 are provided at both ends of the piezoelectric vibrator element 11, for example.
次に、リード部６１乃至６ｎのうち、奇数番目のリード
部を根部から切断するとともに、リードエレメント７１
乃至７ｎのうち、偶数番目のリード部を根部から切断す
る。この行程で、奇数番目の圧電振動子ニレメン） ｌ
ｌ 、 １３ 、 ｌ ５− ＠−はリード部７１，
７３，７５・・・を持ち、偶数番目の圧電振動子エレメ
ント１２，１４，１６・嗜会はリード部６２，６４．６
６＠・・を持つことになる。Next, among the lead parts 61 to 6n, the odd numbered lead parts are cut from the root part, and the lead element 71
Even-numbered lead portions from 7n to 7n are cut from the root portion. In this process, the odd-numbered piezoelectric vibrator) l
l, 13, l5-@- are lead portions 71,
73, 75..., and the even-numbered piezoelectric vibrator elements 12, 14, 16 have lead portions 62, 64, 6.
We will have 6@...
その後、左右に導出された各リード部を端子部としてこ
れらに引出し用の導線を接続する。Thereafter, the lead portions led out on the left and right sides are used as terminal portions, and a lead wire is connected to these lead portions.
一方、圧電振動子ニレメン）１１．１２−・・１ｎの第
１の電極４上の端部には、第３図（ｂ）に示すようにＡ
ｇ等の細い金属線材からなるリード線９が半田付けによ
り取り付けられ、第１の電極４は共通接続される。On the other hand, the ends of the piezoelectric vibrators 11, 12 - . . .
A lead wire 9 made of a thin metal wire, such as a wire such as a wire, is attached by soldering, and the first electrodes 4 are commonly connected.
そして、このリード線−９にアース電位を与え、各リー
ド部から導出された導線を順次切換えて各圧電振動子エ
レメントを端部から順次走査する如く動作せしめる。Then, a ground potential is applied to this lead wire -9, and the conductive wires led out from each lead portion are sequentially switched to operate so as to sequentially scan each piezoelectric vibrator element from the end.
なお、上述の如き構成を有するアレー型超音波探触子の
第１の電極４が被測定体と接面する超音波放射側であり
、通常電極４上に使用超音波の４分の１波長の厚みを有
する音響マツチング層が設けられる。Note that the first electrode 4 of the array-type ultrasonic probe having the above-mentioned configuration is on the ultrasonic emission side that comes into contact with the object to be measured, and the electrode 4 normally has a 1/4 wavelength wavelength of the ultrasonic wave used. An acoustic matching layer is provided having a thickness of .
この実施例のように、被測定体と接面する側に折返し電
極を設けていない構造とすれば、第２図（’ｂ ）に示
すように、超音波探触子の機械的中心線と超音波音場の
中心線Ａ１とを一致させることができるとともに、左右
対称な超音波分布Ｂ１をうることができる。しかも圧電
振動子エレメントの全面を振動実効面積とすることがで
きる。また、側方に導出したリード部に引出し用の導線
を接続出来るので、引出し用導線の形成がきわめて容易
になる。As in this example, if the structure is such that no folded electrode is provided on the side in contact with the object to be measured, the mechanical center line of the ultrasonic probe and The center line A1 of the ultrasonic sound field can be made to coincide with the center line A1, and a symmetrical ultrasonic wave distribution B1 can be obtained. Moreover, the entire surface of the piezoelectric vibrator element can be used as the effective vibration area. Furthermore, since the lead wire can be connected to the lead portion led out to the side, the lead wire can be formed very easily.
なお、上記実施例において、圧電振動子エレメントの間
隔が広い場合は、リード部に導線を接続するのにさほど
困離はないので金属箔６と７のいずれか一方を切断除去
し、残る金属箔に切溝を設けて一方側にのみリード部を
設けてもよい。In the above example, if the spacing between the piezoelectric vibrator elements is wide, it is not difficult to connect the conductor to the lead part, so either one of the metal foils 6 and 7 is cut and removed, and the remaining metal foil is removed. It is also possible to provide a cut groove in the lead portion and provide a lead portion only on one side.
第３図（Ｃ）は、圧電振動子エレメントを３つまとめて
群とし、群単位にリード部７１′乃至７ｎ′を付与した
実施例を示す斜視図である。FIG. 3(C) is a perspective view showing an embodiment in which three piezoelectric vibrator elements are grouped together and lead portions 71' to 7n' are provided for each group.
即ち、第３図（ｂ）に示す実施例におけるリード部７１
と７２と７３を１つのリード部７１′としたものである
。そして、−側より引出し用の導線を設ける場合には、
前記実施例と同様、一方の金属箔を切り落しても良く、
また交互に引出し用の導線を設ける場合は、奇数番目の
群に対しリード部７１′、７３′・・・を設け、偶数番
目の群に対してリード部６２′、６４′・ｅ・を与える
ようにし、これらに引出し用の導線を取り付けてもよい
。このようにアレー型超音波探触子を製造すれば各圧電
振動子エレメント間の幅が狭くとも容易に引出し用の導
線を設けることが出来る。That is, the lead portion 71 in the embodiment shown in FIG. 3(b)
, 72 and 73 are made into one lead portion 71'. When installing a lead wire from the negative side,
As in the above embodiment, one metal foil may be cut off,
In addition, when providing lead wires alternately, lead portions 71', 73', etc. are provided for odd-numbered groups, and lead portions 62', 64', e., are provided for even-numbered groups. You may also attach lead wires to these. If an array type ultrasonic probe is manufactured in this way, even if the width between each piezoelectric transducer element is narrow, lead wires can be easily provided.
なお、群を構成する圧電振動子エレメントは３つに限ら
ず、２個、４個あるいは他の所定数とすることもできる
。Note that the number of piezoelectric vibrator elements constituting a group is not limited to three, but may be two, four, or another predetermined number.
また、本発明の変形として、金属箔６及び７を２枚とす
ることなく、第２の電極５の下面全面に金属箔を設けて
一枚とすることもできる。Further, as a modification of the present invention, instead of using two metal foils 6 and 7, one metal foil can be provided on the entire lower surface of the second electrode 5.
（発明の効果）
以上詳細に説明したよ、うに、本発明によれば、振動有
効面積が従来のものに比べて増大し、超音波音場強度を
強めることができるとともに、対称性のある超音波音場
が得られ、音場パターンの偏向を防止することができる
アレー型超音波探触子を容易に製造することが出来る。(Effects of the Invention) As explained in detail above, according to the present invention, the effective area of vibration is increased compared to the conventional one, the strength of the ultrasonic sound field can be strengthened, and the symmetrical ultrasonic It is possible to easily manufacture an array type ultrasonic probe that can obtain a sound field and prevent deflection of the sound field pattern.
第一１図（ａ）及び（ｂ）は従来の超音波探触子の説明
図、第２図（ａ）は、本発明に係るアレー型超音波探触
子の製造方法の一部を示す図であり、アレー型超音波探
触子を振動子保持台上に形成する前段階を示す斜視図、
第２図（ｂ）は、本発明によって製造されるアレー型超
音波探触子の音場特性図、第３図（ａ）乃至（Ｃ）は、
アレー型超音波探触子の製造方法の一部を示す図であり
、アレー型超音波探触子を振動子保持台上に形成する方
法を示す斜視図である。
図中、１′は圧電振動子板、ｌは圧電振動子、２及び３
は電極、３１は折返し電極、３２は導電部、４′及び５
′は金属薄膜、４及び５は電極、６及び７は金属箔、８
は振動子保持台、９はリード線、１１，１２．・・争１
ｎは圧電振動子エレメント、６Ｌ、８２．ｓ＊＊６ｎ及
び７１１７２、・・串シｎはリード部である。
特許出願人 日本電波工業株式会社
代 理 人 弁理士 辻 ゛ＩＩＩ′
第１闇
（ｂ）
第 ２ 図
（θ）
（ｂ）11(a) and (b) are explanatory diagrams of a conventional ultrasonic probe, and FIG. 2(a) shows a part of the method for manufacturing an array type ultrasonic probe according to the present invention. FIG. 3 is a perspective view showing a preliminary stage of forming an array type ultrasonic probe on a transducer holding table;
FIG. 2(b) is a sound field characteristic diagram of the array type ultrasonic probe manufactured according to the present invention, and FIG. 3(a) to (C) are
FIG. 3 is a diagram showing a part of the method for manufacturing an array-type ultrasonic probe, and is a perspective view showing a method for forming the array-type ultrasonic probe on a transducer holding table. In the figure, 1' is a piezoelectric vibrator plate, l is a piezoelectric vibrator, 2 and 3
is an electrode, 31 is a folded electrode, 32 is a conductive part, 4' and 5
' is a metal thin film, 4 and 5 are electrodes, 6 and 7 are metal foils, 8
9 is a vibrator holding stand, 9 is a lead wire, 11, 12.・Contest 1
n is a piezoelectric vibrator element, 6L, 82. s**6n and 71172... Skewer line n is a lead part. Patent applicant Nippon Dempa Kogyo Co., Ltd. Agent Patent attorney Tsuji ゛III' 1st darkness (b) 2nd figure (θ) (b)
Claims (1)
第２の金属薄膜を貼着せしめる第１の工程と、振動子保
持台と、前記第１の工程で金属薄膜を形成した圧電振動
子板との間に、リード部用でかつ振動子保持台の側方に
張り出した金属箔を挾持せしめて、振動子保持台と圧電
振動子板とを一体的に接合せしめる第２の工程と、前記
第２の工程終了後、リード部用の金属箔が張り出してい
る方向に第１の金属薄膜と圧電振動子板と第２の金属薄
膜とを切断した後、リード部用の金属箔を切断する第３
の工程とを含むことを特徴とするアレー型超音波探触子
の製造方法。A first step of attaching first and second metal thin films to the front and back surfaces of a piezoelectric vibrator plate formed on a flat surface, a vibrator holding stand, and a metal thin film formed in the first step. A second metal foil for the lead portion and protruding from the side of the vibrator holder is sandwiched between the piezoelectric vibrator plate and the vibrator holder and the piezoelectric vibrator plate are integrally joined. After the second step, the first metal thin film, the piezoelectric vibrator plate, and the second metal thin film are cut in the direction in which the metal foil for the lead portion protrudes, and then the metal foil for the lead portion is cut. Third to cut the foil
A method for manufacturing an array-type ultrasonic probe, comprising the steps of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59014928A JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59014928A JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60160300A true JPS60160300A (en) | 1985-08-21 |
| JPH0125279B2 JPH0125279B2 (en) | 1989-05-17 |
Family
ID=11874624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59014928A Granted JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60160300A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02195946A (en) * | 1989-01-25 | 1990-08-02 | Aloka Co Ltd | Manufacture of ultrasonic vibrator |
| EP0425697A1 (en) * | 1989-05-15 | 1991-05-08 | Hitachi Construction Machinery Co., Ltd. | Ultrasonic probe and method of producing the same |
| JPH11309143A (en) * | 1998-04-28 | 1999-11-09 | Nippon Dempa Kogyo Co Ltd | Manufacture of ultrasonic probe and ultrasonic probe |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512467A (en) * | 1978-07-12 | 1980-01-29 | Matsushita Electric Ind Co Ltd | Production of ultrasonic locator |
-
1984
- 1984-01-30 JP JP59014928A patent/JPS60160300A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512467A (en) * | 1978-07-12 | 1980-01-29 | Matsushita Electric Ind Co Ltd | Production of ultrasonic locator |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02195946A (en) * | 1989-01-25 | 1990-08-02 | Aloka Co Ltd | Manufacture of ultrasonic vibrator |
| EP0425697A1 (en) * | 1989-05-15 | 1991-05-08 | Hitachi Construction Machinery Co., Ltd. | Ultrasonic probe and method of producing the same |
| JPH11309143A (en) * | 1998-04-28 | 1999-11-09 | Nippon Dempa Kogyo Co Ltd | Manufacture of ultrasonic probe and ultrasonic probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0125279B2 (en) | 1989-05-17 |
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