JPS60159178A - ドライエツチング装置 - Google Patents

ドライエツチング装置

Info

Publication number
JPS60159178A
JPS60159178A JP1294384A JP1294384A JPS60159178A JP S60159178 A JPS60159178 A JP S60159178A JP 1294384 A JP1294384 A JP 1294384A JP 1294384 A JP1294384 A JP 1294384A JP S60159178 A JPS60159178 A JP S60159178A
Authority
JP
Japan
Prior art keywords
gas
valve
strainer
pump
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1294384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332632B2 (enExample
Inventor
Yoshihiko Nio
仁尾　吉彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1294384A priority Critical patent/JPS60159178A/ja
Publication of JPS60159178A publication Critical patent/JPS60159178A/ja
Publication of JPH0332632B2 publication Critical patent/JPH0332632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1294384A 1984-01-27 1984-01-27 ドライエツチング装置 Granted JPS60159178A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294384A JPS60159178A (ja) 1984-01-27 1984-01-27 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294384A JPS60159178A (ja) 1984-01-27 1984-01-27 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS60159178A true JPS60159178A (ja) 1985-08-20
JPH0332632B2 JPH0332632B2 (enExample) 1991-05-14

Family

ID=11819361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294384A Granted JPS60159178A (ja) 1984-01-27 1984-01-27 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS60159178A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433654U (enExample) * 1990-07-09 1992-03-19
CN104480468A (zh) * 2014-12-31 2015-04-01 深圳市华星光电技术有限公司 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433654U (enExample) * 1990-07-09 1992-03-19
CN104480468A (zh) * 2014-12-31 2015-04-01 深圳市华星光电技术有限公司 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置

Also Published As

Publication number Publication date
JPH0332632B2 (enExample) 1991-05-14

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