JPS60158734U - 基板表面処理液供給装置 - Google Patents

基板表面処理液供給装置

Info

Publication number
JPS60158734U
JPS60158734U JP4645584U JP4645584U JPS60158734U JP S60158734 U JPS60158734 U JP S60158734U JP 4645584 U JP4645584 U JP 4645584U JP 4645584 U JP4645584 U JP 4645584U JP S60158734 U JPS60158734 U JP S60158734U
Authority
JP
Japan
Prior art keywords
liquid supply
liquid
surface treatment
substrate surface
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4645584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442909Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
勝 北川
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP4645584U priority Critical patent/JPS60158734U/ja
Publication of JPS60158734U publication Critical patent/JPS60158734U/ja
Application granted granted Critical
Publication of JPH0442909Y2 publication Critical patent/JPH0442909Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photographic Processing Devices Using Wet Methods (AREA)
  • Coating Apparatus (AREA)
JP4645584U 1984-03-29 1984-03-29 基板表面処理液供給装置 Granted JPS60158734U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645584U JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645584U JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Publications (2)

Publication Number Publication Date
JPS60158734U true JPS60158734U (ja) 1985-10-22
JPH0442909Y2 JPH0442909Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-12

Family

ID=30560862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645584U Granted JPS60158734U (ja) 1984-03-29 1984-03-29 基板表面処理液供給装置

Country Status (1)

Country Link
JP (1) JPS60158734U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-01-30 1988-08-05
JPH01227437A (ja) * 1988-03-07 1989-09-11 Tokyo Electron Ltd 現像装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898641U (ja) * 1981-12-25 1983-07-05 凸版印刷株式会社 レジスト供給装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5898641U (ja) * 1981-12-25 1983-07-05 凸版印刷株式会社 レジスト供給装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-01-30 1988-08-05
JPH01227437A (ja) * 1988-03-07 1989-09-11 Tokyo Electron Ltd 現像装置

Also Published As

Publication number Publication date
JPH0442909Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-10-12

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