JPS60155881A - シリコン炉からのアルゴン回収装置 - Google Patents

シリコン炉からのアルゴン回収装置

Info

Publication number
JPS60155881A
JPS60155881A JP59010090A JP1009084A JPS60155881A JP S60155881 A JPS60155881 A JP S60155881A JP 59010090 A JP59010090 A JP 59010090A JP 1009084 A JP1009084 A JP 1009084A JP S60155881 A JPS60155881 A JP S60155881A
Authority
JP
Japan
Prior art keywords
argon
decarburization
silicon furnace
hydrocarbons
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59010090A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529834B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
染矢　和夫
喜多　修
友村　政臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59010090A priority Critical patent/JPS60155881A/ja
Publication of JPS60155881A publication Critical patent/JPS60155881A/ja
Publication of JPH0529834B2 publication Critical patent/JPH0529834B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP59010090A 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置 Granted JPS60155881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59010090A JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Publications (2)

Publication Number Publication Date
JPS60155881A true JPS60155881A (ja) 1985-08-15
JPH0529834B2 JPH0529834B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-06

Family

ID=11740629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59010090A Granted JPS60155881A (ja) 1984-01-25 1984-01-25 シリコン炉からのアルゴン回収装置

Country Status (1)

Country Link
JP (1) JPS60155881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116691U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-03-01 1990-09-18
US12185848B2 (en) 2019-05-06 2025-01-07 Schott Ag Swing door system and a freezer device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02116691U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-03-01 1990-09-18
US12185848B2 (en) 2019-05-06 2025-01-07 Schott Ag Swing door system and a freezer device

Also Published As

Publication number Publication date
JPH0529834B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-06

Similar Documents

Publication Publication Date Title
TW453974B (en) Method and apparatus for purification of argon
US3216178A (en) Process for regenerating an adsorbent bed
JPS62136222A (ja) 混合ガスから特定のガスを吸着分離する方法
JPH0639230A (ja) アルゴン−酸素−炭素除去プロセス廃ガスからのアルゴンを回収する方法
JP3020842B2 (ja) アルゴン精製方法及び装置
JPH0459926B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR19990077911A (ko) 청정 건조 공기 생성물 스트림 생성 방법, 공기 분리 방법 및 청정 건조 공기 생성물 스트림 생성 장치
JP2534614B2 (ja) ガス精製装置
CN108557787A (zh) 一种回收粗氩气再提纯方法
JP2001062238A (ja) 空気浄化方法及び装置
JP2782356B2 (ja) アルゴンの回収方法
JPS60155881A (ja) シリコン炉からのアルゴン回収装置
US6240745B1 (en) Process and plant for the purification and cryogenic separation of air without precooling
JPS6129768B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0243684B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH1015331A (ja) 加熱再生式圧力スイング吸着方法
JP3841792B2 (ja) 空気分離装置における前処理方法およびそれに用いる装置
JP3268193B2 (ja) 炉雰囲気排ガスからの溶接用シールドアルゴン製造方法
JP7634762B1 (ja) ネオン精製装置及びネオン精製方法
JP3532466B2 (ja) 空気分離装置
JPH07166B2 (ja) Ｃｏ吸着分離方法
JPS638395B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS60139311A (ja) 吸着塔の再生方法
JP3191113B2 (ja) アルゴンの回収方法
JPH10202115A (ja) 触媒吸着剤床の再生方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term