JPS60154688A - Laser device - Google Patents

Abstract

PURPOSE:To stabilize the energy density of an output by oppositely disposing a pair of reflecting mirrors formed with sawtooth-shaped obliqud surfaces of the prescribed direction on the reflecting surface, and disposing to perpendicularly cross one oblique surface and the other oblique surface, thereby equalizing the laser light between the mirrors. CONSTITUTION:The incident light 9A of a laser light 9 is introduced to the vertical oblique surface 23, again becomes reflected light 9B by a reflecting surface 21, and introduced as an incident light to the horizontal oblique surface 22. At this time the angle formed by the lights 9A, 9B is called a reflecting angle (n). Thus, the light 9b from one surface 23 is advanced substantially in parallel to the other surface 22, accumulated in the angle (n) in the mount of the following oblique angle 0 deg. to become n1n2n3.... The light 9 is excited and amplified while resonating laterally from the upper right to the lower left. Accordingly, the light 9 is uniformly mixed in the surfaces 20, 21, and the energy density characteristics of the laser light output is stabilized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a laser device with an improved combination of reflecting mirrors.

[Background of the invention]

Generally, a laser generator generates laser light by exciting a gas medium such as carbon dioxide gas, helium gas, nitrogen gas, etc. by generating a glow discharge within a resonator having a mirror. The laser beam resonates between a plurality of reflecting mirrors within the resonator, is amplified, and is irradiated to the outside from one semi-transmissive mirror, for example, an output mirror made of Zn5e. By irradiating the workpiece with laser light, the workpiece can be processed such as cutting, welding, and surface treatment. The higher the energy density of the laser beam, the faster the workpiece can be processed.

In order to increase the energy density of the laser beam, the resonance distance is lengthened to increase the excitation space between the reflecting mirrors.
This means amplifying the laser beam or improving the reflectance of the reflecting mirror.

Conventionally, reflective mirrors are manufactured by lapping a polished member made of oxygen-free copper, beryllium copper, aluminum, or the like. In the lapping method, a polisher is brought into contact with a part to be polished fixed on a rotary table.

While rotating the rotary table, one side of the member to be polished is oscillated by a polisher, and a liquid containing an abrasive is appropriately dropped during this period to form a reflective mirror on one side of the member to be polished. Before forming the reflective mirror, the polishing plate and liquid are replaced depending on the rough lap, medium lap, and finishing lap. Therefore, it requires a lot of time and skill.

Therefore, if a reflecting mirror is formed by processing a workpiece using a diamond cutting method using ultra-precision processing, the working time can be significantly shortened and it can be done without requiring much skill.

However, when the reflective surface of a cut reflective mirror is microscopically observed, it has a sawtooth cross section, and the sawtooth waveform forms an inclined surface. Therefore, if you simply combine reflecting mirrors, the angle of incidence of the laser beam on each inclined surface between the incident light and the reflected light will be very large, and the laser beam will often be scattered outside of the areas between the reflecting mirrors. Or, the laser beam irradiates between each reflecting mirror in a specific direction, the resonance distance is not uniform, and the energy density characteristic of the laser beam output becomes unstable.

When machining a workpiece using an unstable laser beam, for example, forming a depression, it cannot be done neatly.

[Purpose of the invention]

An object of the present invention is to provide a laser device in which the energy density of laser light output is stabilized by equalizing the laser light between reflecting mirrors.

[Summary of the invention]

In order to achieve this object, the laser device of the present invention has a pair of reflecting mirrors each having a sawtooth wave-shaped inclined surface in a fixed direction arranged in a corresponding manner, and one inclined surface and the other inclined surface are arranged in correspondence with each other. If they are arranged so as to be orthogonal to each other, the laser beam can be uniformly emitted by the reflecting mirror C, so that the energy density of the laser beam output can be stabilized.

[Embodiments of the invention]

Embodiments of the present invention will be described below using an orthogonal gas laser generator shown in FIG.

The mixed gas 1 flows between the anode 2 and the cathode 3, and when a voltage is applied to both electrodes and a glow discharge is generated, an excitation space 4 is formed. A mirror 6 and first and second folding mirrors 7.8, which are plane mirrors, are arranged, and a laser beam 9 resonates between these mirrors. There are five optical axes 9A to 9E of the laser beam 9 in the excitation space. Each mirror is constructed as shown in FIG.

End plates 13 and 14 are attached to the resonator body 10 via bellows 12 in a direction perpendicular to the gas flow port 11 shown on the side surface. An output mirror 5 and a total reflection mirror 6 are attached to the outer surface of each end plate 13, 14 via a bellows 15. First and second folding mirrors 7.8 are attached to the inner surface of each end plate 13.degree. 14, adjacent to the output mirror 5 and total reflection mirror 6, via mounting bases 1G. 1st
The folding mirror 7 and the M2 folding mirror 8 each have a reflective surface 2.
0.21 is attached to the pick-up stand 16 so as to correspond to the inclined state.

As shown in Figure 3, (C), the reflecting surfaces 20 and 21 have a single-surface nob-shaped wave shape.One reflecting surface 20tfzk has a plurality of inclined surfaces 22 in the dry direction. The other reflecting surface 21 has a plurality of inclined surfaces 23 in the vertical direction orthogonal to the one reflecting surface 2o.The height dimension H of the inclined surface 22.23 has a convex portion 24 to a depressed portion. 25
The height dimension is gradually decreased as the height increases. The method of orthogonally intersecting the horizontal inclined surface 22 and the vertical inclined surface 23 is to irradiate the reflective surface with laser light from the l-1e-N e laser, and with this configuration, the incident light of the laser light 9 9A
enters the vertical inclined surface 23, becomes reflected light 9B from the reflective surface 21 again, and enters the horizontal inclined surface 22 as A (- incident light. At this time, the incident light 9A and the reflected light 9B
The angle formed by this is called the reflection angle n. Therefore, the reflected light 9B from one inclined surface 23 is parallel to the other inclined surface 23.
2, the reflection angle n is accumulated by the tilt angle θ and n1
n2n3..., and the laser beam 9 resonates from the top right to the bottom left in the figure, and is excited and amplified, so the laser beam 9 is evenly mixed within the reflecting surface 20, 21, and the laser beam output increases. Energy density characteristics AVi Figure 4 (9), (
It is stable as shown in 1-3).

Fig. 4 (A) U (41il + + energy density (
In E), the diameter t of the laser beam 9 is plotted on the horizontal axis, and the circumferential end 1/2t to the right of i-E from the center O of the diameter f- is shown.

Energy density ++'3 property A is the present invention, whereas energy density 7111 cases J3 is shown in Figure 3 ■, (IJ
), the inclined surfaces 22° and 23 are arranged in the same direction at 7° C. In this case, the inclined surfaces 22 and 23 are arranged horizontally or vertically. this! As is clear from the characteristic diagram, energy density q and characteristic A have a stable waveform with a constant shape compared to energy density characteristic ■.
When the microscopic value is -4゜, the energy density holo 41. ．． The amplitude 8A of A is smaller than the amplitude 813 of the f-th 3 having a Niolegi density l.

energy', lv'f degree 11'' As shown in FIG.
′, an uneven portion is produced as shown by the chain line. For this purpose, the laser 'J-Wt' of the present invention is used to process, for example, human lungs.

If you do some cutting, etc., it will come out beautifully.

The reflective surfaces 20 and 21 of the reflective mirror are shown in FIG. 5 (e).

As shown in (G)), the sloped surfaces 22 and 23 are formed (in 7,
One inclined surface 22 and the inclined surface 23 indicated by the chain line may be perpendicular to each other by τN. Instead of the inclined surface, an uneven portion 1-7 may be formed.

Although the above-mentioned embodiment has been explained using a heavy-duty type laser generator, it may also be used in an axial flow type laser generator shown in FIG. The same effect as described above can be achieved even if these laser generators t and L are arranged in eight reflecting mirrors in the order of folding and at a certain angle in the direction of inclination of the mirrors as shown in FIG. . In this case, a non-cutting type reflective mirror may be used as at least one of the reflective mirrors.

It goes without saying that, in addition to the two embodiments, the present invention can also be used in a laser processing apparatus in which the laser beam is resonated between at least a pair of reflecting mirrors.

〔Effect of the invention〕

As described above, according to the laser device of the present invention, the energy density of laser light output can be stabilized.

[Brief explanation of the drawing]

Fig. 1 is a schematic explanatory diagram of an orthogonal gas laser generator shown as an embodiment of the present invention, Fig. 2 is an explanatory diagram of the vicinity of the resonator in Fig. 1, and Fig. 3 shows a folding mirror. (to)
, CF4 is a perspective view, the same figure (Q is a schematic side sectional view, FIG. 4 (A) is an energy density characteristic diagram of laser light output, the same figure (
Figure (5) shows the amplitude characteristics; Figure (C) shows the burn pattern of the acrylic plate; 6 and 7 are schematic illustrations of laser generators shown as other embodiments. 7.8... Reflection mirror, 9... Laser light, 20.2
1 sword 3 mouths (/l) (B) Continued from page 1 0 Inventor Isao Mori Inside Kokubu-cho, Hitachi City

Claims (1)

[Claims] 1. In a device in which laser light is transmitted between a plurality of reflecting mirrors, the reflecting surface of at least one pair of the plurality of reflecting mirrors is cut to form uneven portions in a certain direction. A laser device characterized in that a reflective surface is formed and the concave and convex portions of one reflective surface are arranged so that the concave and convex portions of the other reflective surface are orthogonal (6). 2. The reflective surface is composed of an inclined surface. A laser device 6゜3 according to claim 1, characterized in that the cross section is formed into a sawtooth wave shape, and claim 1, characterized in that a mark in the cutting direction is provided on a part of the reflecting mirror. The laser device according to item 1 or 2.