JPS60151524U - Silicon dust processing equipment for semiconductors - Google Patents

Silicon dust processing equipment for semiconductors

Info

Publication number
JPS60151524U
JPS60151524U JP2341285U JP2341285U JPS60151524U JP S60151524 U JPS60151524 U JP S60151524U JP 2341285 U JP2341285 U JP 2341285U JP 2341285 U JP2341285 U JP 2341285U JP S60151524 U JPS60151524 U JP S60151524U
Authority
JP
Japan
Prior art keywords
dust
semiconductors
silicon
suction
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2341285U
Other languages
Japanese (ja)
Inventor
井沢　淳二
良一 林
八釼　吉文
Original Assignee
小松電子金属株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松電子金属株式会社 filed Critical 小松電子金属株式会社
Priority to JP2341285U priority Critical patent/JPS60151524U/en
Publication of JPS60151524U publication Critical patent/JPS60151524U/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案による吸引口装置の一断面図、第２図は
本考案の吸引口装置を具備した粉塵処理装置の概略図を
示する。 １・・・ノズル、２・・・バルブ、３・・・吸引部、４
・・・吸引管、５・・・フレキシブルチューブ、６・・
・吸引用フレキシブルチューブ、１１・・・吸引口装置
、１３・・・自動バルブ、１４・・・制御盤、１７・・
・分離装置、１８・・・アブソリ゛ニートフィルター、
１９・・・吸引ブロアー。FIG. 1 is a sectional view of a suction port device according to the present invention, and FIG. 2 is a schematic diagram of a dust processing device equipped with the suction port device of the present invention. 1... Nozzle, 2... Valve, 3... Suction part, 4
...Suction tube, 5...Flexible tube, 6...
・Suction flexible tube, 11... Suction port device, 13... Automatic valve, 14... Control panel, 17...
・Separation device, 18...absolute filter,
19...Suction blower.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）半導体用シリコン製造工程で発生する粉体シリコ
ンの粉塵処理装置において、粉塵吸引部３、吸引管４及
び吸引用フレキシブルチューブ６を順次連結し、前記吸
引管４の粉塵吸引部３との連結部近接部に流量調節用液
体供給バルブ２を有する液体吹出しノズル１を前記吸引
管４内に開口、配設してなる半導体用シリコン粉塵、処
理装置。(1) In a device for processing dust of powdered silicon generated in the manufacturing process of silicon for semiconductors, the dust suction section 3, the suction pipe 4, and the flexible tube for suction 6 are connected in sequence, and the suction tube 4 and the dust suction section 3 are connected in sequence. A device for processing silicon dust for semiconductors, in which a liquid blowing nozzle 1 having a liquid supply valve 2 for adjusting the flow rate near the connecting portion is opened and disposed in the suction pipe 4. （２）前記粉塵吸引部３が可撓性材料からなる実用新案
登録請求の範囲第１項記載の半導体用シリコン粉塵処理
装置。(2) The silicon dust processing device for semiconductors according to claim 1, wherein the dust suction section 3 is made of a flexible material. （３）前記粉塵吸引部３にブラシを付設した実用新案登
録請求の範囲第１項記載の半導体用シリコン粉塵処理装
置。(3) The silicon dust processing device for semiconductors according to claim 1, wherein the dust suction section 3 is provided with a brush.
JP2341285U 1985-02-22 1985-02-22 Silicon dust processing equipment for semiconductors Pending JPS60151524U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2341285U JPS60151524U (en) 1985-02-22 1985-02-22 Silicon dust processing equipment for semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2341285U JPS60151524U (en) 1985-02-22 1985-02-22 Silicon dust processing equipment for semiconductors

Publications (1)

Publication Number Publication Date
JPS60151524U true JPS60151524U (en) 1985-10-08

Family

ID=30516621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2341285U Pending JPS60151524U (en) 1985-02-22 1985-02-22 Silicon dust processing equipment for semiconductors

Country Status (1)

Country Link
JP (1) JPS60151524U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144677A (en) * 1974-05-13 1975-11-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144677A (en) * 1974-05-13 1975-11-20

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