JPS50144677A - - Google Patents
Info
- Publication number
- JPS50144677A JPS50144677A JP49053669A JP5366974A JPS50144677A JP S50144677 A JPS50144677 A JP S50144677A JP 49053669 A JP49053669 A JP 49053669A JP 5366974 A JP5366974 A JP 5366974A JP S50144677 A JPS50144677 A JP S50144677A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49053669A JPS50144677A (en) | 1974-05-13 | 1974-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49053669A JPS50144677A (en) | 1974-05-13 | 1974-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50144677A true JPS50144677A (en) | 1975-11-20 |
Family
ID=12949238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49053669A Pending JPS50144677A (en) | 1974-05-13 | 1974-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50144677A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60151524U (en) * | 1985-02-22 | 1985-10-08 | 小松電子金属株式会社 | Silicon dust processing equipment for semiconductors |
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1974
- 1974-05-13 JP JP49053669A patent/JPS50144677A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60151524U (en) * | 1985-02-22 | 1985-10-08 | 小松電子金属株式会社 | Silicon dust processing equipment for semiconductors |