JPS6014737A - 反射電子検出装置 - Google Patents

反射電子検出装置

Info

Publication number
JPS6014737A
JPS6014737A JP58122860A JP12286083A JPS6014737A JP S6014737 A JPS6014737 A JP S6014737A JP 58122860 A JP58122860 A JP 58122860A JP 12286083 A JP12286083 A JP 12286083A JP S6014737 A JPS6014737 A JP S6014737A
Authority
JP
Japan
Prior art keywords
detector
lens barrel
sample
feedthrough
backscattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58122860A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127549B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Setsuo Norioka
節雄 則岡
Seiichi Nakagawa
中川　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58122860A priority Critical patent/JPS6014737A/ja
Publication of JPS6014737A publication Critical patent/JPS6014737A/ja
Publication of JPH0127549B2 publication Critical patent/JPH0127549B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP58122860A 1983-07-06 1983-07-06 反射電子検出装置 Granted JPS6014737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58122860A JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58122860A JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Publications (2)

Publication Number Publication Date
JPS6014737A true JPS6014737A (ja) 1985-01-25
JPH0127549B2 JPH0127549B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-30

Family

ID=14846424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58122860A Granted JPS6014737A (ja) 1983-07-06 1983-07-06 反射電子検出装置

Country Status (1)

Country Link
JP (1) JPS6014737A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011018470A (ja) * 2009-07-07 2011-01-27 Ulvac Japan Ltd 四重極型質量分析計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011018470A (ja) * 2009-07-07 2011-01-27 Ulvac Japan Ltd 四重極型質量分析計

Also Published As

Publication number Publication date
JPH0127549B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-30

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