JPS60145517A - Production of magnetic head - Google Patents

Production of magnetic head

Info

Publication number
JPS60145517A
JPS60145517A JP45384A JP45384A JPS60145517A JP S60145517 A JPS60145517 A JP S60145517A JP 45384 A JP45384 A JP 45384A JP 45384 A JP45384 A JP 45384A JP S60145517 A JPS60145517 A JP S60145517A
Authority
JP
Japan
Prior art keywords
substrate
glass layer
magnetic
adhesive
magnetic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45384A
Other languages
Japanese (ja)
Inventor
Masaru Higashioji
賢 東陰地
Takeshi Hirota
健 廣田
Akio Kuroe
章郎 黒江
Terumasa Sawai
瑛昌 沢井
Mitsuo Satomi
三男 里見
Hiroshi Sakakima
博 榊間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP45384A priority Critical patent/JPS60145517A/en
Publication of JPS60145517A publication Critical patent/JPS60145517A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/147Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent partial wear of a magnetic head by putting an adhesive glass layer, which is formed on a substrate and a magnetic material formed on a substrate consisting of the same materials as said substrate and adhering them in a powder by pressurizing and heating to make a base material. CONSTITUTION:An amorphous magnetic material 2 is formed on a crystallized glass substrate 1 by sputtering, and a lead glass layer 4 for adhesion is formed on a crystallized glass substrate 3 consisting of the same materials as the substrate 1 by sputtering, and the substrate 3 is put on the substrate 1, and they are arranged in alumina powder 5 in a cylinder 8, and they are heated and adhered by an electric furnace in the state where pressures are applied from above and below in directions of arrows 9, thus producing the substrate base material; and this base material is cut to complete a video head chip. The adhesive glass layer 4 obtained in this manner is formed uniformly with less defects such as air bubbles, and partial wear for tape sliding is prevented.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、磁気記録11生装置に用いられるθシ気ヘ
ッドの製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a method of manufacturing a θ-shape head used in a magnetic recording 11 recording device.

従来例の構成とその問題点 磁気ヘッドの製造方法において、従来蒸着やスパッタリ
ング等の手段を用い−C基板十に磁性体層を形成し、そ
れをf〃気:IアとしてhXf成−」るちのかある。
Conventional structure and its problems In the manufacturing method of a magnetic head, a magnetic layer is formed on a C substrate using conventional methods such as vapor deposition or sputtering, and then it is formed into an hXf layer. There is a chika.

しかしながら、この時問題となるのか、磁性体層の保護
層である。ずなわら浮−1形ヘット4J別として、媒体
と接触しj:j動するタイプのへ71’lご、]、′い
て、媒体に対するヘッドの[11(摩耗性かa要である
。例えば磁性体1f1に保護層かない時には、媒体tt
1す1時に磁性体か、!、li Jlジより9、り甜す
る場合があり、また保護層が自る場合においても、基(
υ、磁性体。
However, the problem at this time is the protective layer of the magnetic layer. In addition to the Zunawara Uki-1 type head 4J, there are other types of heads that come into contact with the medium and move. When the magnetic material 1f1 does not have a protective layer, the medium tt
Is there a magnetic material at 1 o'clock? , li Jl di 9, may be added, and even if a protective layer is provided, the base (
υ, magnetic material;

保護層間で偏摩耗が生じ、媒体へノド間のスペーシング
損失を生むこととなり、不都合を牛しる。
Uneven wear occurs between the protective layers, resulting in loss of spacing between the edges of the media, resulting in inconvenience.

そこで保護層を基板と同質のものとし、接着層をできる
限り、薄くして接着しはり合せる手段が検討されている
。ところが接着層を薄くするためには、接着層の厚みを
薄くする他に接着前の機械的精度(平面度2面あらさ)
およびすき間なく密着させる構造(治具)などが必要と
なり、基板の平面全体を数ミクロン以下の厚さで気泡な
どの欠陥がなく接着することは困難であった。
Therefore, methods are being considered in which the protective layer is made of the same quality as the substrate, and the adhesive layer is made as thin as possible for bonding. However, in order to make the adhesive layer thinner, in addition to reducing the thickness of the adhesive layer, it is also necessary to improve the mechanical accuracy (flatness 2 surface roughness) before bonding.
This also requires a structure (jig) that allows for close contact without gaps, making it difficult to bond the entire plane of the substrate to a thickness of several microns or less without defects such as air bubbles.

そのため、薄膜を用いた磁気ヘットは第6図に示すよう
に、磁性基板21の」二にギャップスペーサ22を設け
、その上に磁性B’A23でピックアップコイル24を
含みリング状の磁気ヘットを構成し、その上に保護層と
してガラスJW25を充てんした構成としたものが主流
である。多くは磁性基1反21はフェライトであり、保
護1mは鉛ガラスであり、気泡などの欠陥はない。しか
しながら、テープ摺動時にフェライトとガラス部で偏摩
耗を生し不都合を生じていた。
Therefore, as shown in FIG. 6, a magnetic head using a thin film is constructed by providing a gap spacer 22 on the second side of a magnetic substrate 21, and including a pickup coil 24 with a magnetic B'A 23 thereon to form a ring-shaped magnetic head. However, the mainstream is a structure in which glass JW25 is filled thereon as a protective layer. In most cases, the magnetic group 1 and 21 are made of ferrite, and the protection 1 m is made of lead glass, and there are no defects such as bubbles. However, when the tape slides, uneven wear occurs between the ferrite and glass parts, causing problems.

発明のL1的 この発明は、偏摩耗を防+I=−3ることができる磁気
ヘッドの製造方法を提供することを目的とする。
L1 aspect of the invention An object of the invention is to provide a method of manufacturing a magnetic head that can prevent uneven wear by +I=-3.

発明の構成 この発明は、耐摩耗性基板上に茄着、スパッタリング等
により磁性体を形成する磁性体形成工程と、前記基板と
同種の基板上に接着ガラン、層を形成する接着ガラス形
成上程と、前記磁性体と前記接着ガラス層とを重ね合セ
粉体中に配置し、粉体を加圧しながら加熱することによ
り接清し母材を作る接着工程と、前記母材より磁気ヘッ
ドを作る加工工程とを含むことを特徴としている。磁性
体と接着ガラス層との接着を粉体中でこの粉体を加圧し
なから行なうため、接着ガラスに均一な圧力が加わり、
それによって接着カラス層を均一に形成することかでき
気泡等の欠陥の少ない接着カラス層を薄く形成すること
かでき、偏PX、二耗の発生を防止することができる。
Structure of the Invention The present invention comprises a magnetic material forming step in which a magnetic material is formed by deposition, sputtering, etc. on a wear-resistant substrate, and an adhesive glass forming step in which an adhesive glass layer is formed on a substrate of the same type as the substrate. , an adhesion step in which the magnetic material and the bonding glass layer are placed in a superimposed powder body, and the powder is contacted with the powder by heating while pressurizing it to form a base material; and a magnetic head is made from the base material. It is characterized by including a processing process. Since the magnetic material and adhesive glass layer are bonded in powder without applying pressure to the powder, uniform pressure is applied to the adhesive glass.
Thereby, the adhesive glass layer can be formed uniformly, the adhesive glass layer can be formed thinly with few defects such as bubbles, and uneven PX and wear can be prevented.

実施例の説明 この発明の一実施例を第1図ないし7第5図により説明
する。ずなわら、これはビデオテープレコーダに用いら
れるビデオヘット用である。第1ハ1に示すように、平
面に研摩された結晶化ガラス基板lの」二にアモルファ
ス磁性体(Co Nb 4r ;重IJ比は並び順に8
2:12:6)2をスパッタリングにて30μm厚に形
成させる。一方同種の結晶化ガラス基板3に接着用鉛ガ
ラス層(PbO−B203Si02;重量比は並び順に
80:10:10)4を5000人の厚さにスパッタリ
ングにて形成させた。この2種の基板1,3を第2図に
示すように重ね合せ、アルミナ製のシリンダ8と上パン
チ7および下パン千6を用い、アルミナ粉(60番ノソ
ンユ)5のり弓こ配置し、上下より (矢印9)50k
gr/cJでもって加圧した。この加圧した状態のまま
、電気炉にて加熱し、450 ’C30分を経過させ、
冷却過程を終えた。この時アモルファス磁性体2の酸化
を防くべく窒素雰囲気中で行なった。接着用鉛ガラス層
4の軟化点は360 ’Cであり、作業点は1o ボイ
ズで550 ’cであるが、加圧9ノ果により450 
’Cで十分lイーして接着ができた。しかも圧力が均一
に加わるため気泡がきわめて少なく、しかも気泡は小さ
い。このようにして作成された基板母材Aを第3図に示
すように、通常の家庭用VTRヘノ]・に必要なアジマ
ス角1゜を設けて切断し、その切W1面を平面にω「摩
した。
DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. 1 to 7. Of course, this is for video heads used in video tape recorders. As shown in Fig. 1, amorphous magnetic material (CoNb 4r; heavy IJ ratio is 8 in the order of arrangement)
2:12:6) 2 was formed to a thickness of 30 μm by sputtering. On the other hand, an adhesive lead glass layer (PbO-B203Si02; weight ratio 80:10:10 in order of arrangement) 4 was formed on the same type of crystallized glass substrate 3 to a thickness of 5000 mm by sputtering. These two types of substrates 1 and 3 are superimposed as shown in FIG. 2, and using an alumina cylinder 8, an upper punch 7 and a lower punch 6, alumina powder (No. 60 Nosonyu) 5 is glued and arranged, From above and below (arrow 9) 50k
Pressure was applied with gr/cJ. In this pressurized state, heat it in an electric furnace at 450'C for 30 minutes,
The cooling process has been completed. At this time, the test was carried out in a nitrogen atmosphere to prevent the amorphous magnetic material 2 from being oxidized. The softening point of the lead glass layer 4 for adhesion is 360'C, and the working point is 550'C at 1 o void, but the softening point is 450'C by 9 pressures.
I was able to glue it with enough heat at 'C'. Moreover, since the pressure is applied evenly, there are very few air bubbles, and the air bubbles are small. As shown in Fig. 3, the substrate base material A prepared in this way is cut at an azimuth angle of 1°, which is necessary for a normal home VTR. I wore it.

その後第4図に示すように巻線溝11を構成し、ギャッ
プスペーサ12を介し再接合してキャップ形成を行なっ
た。さらにそれを個別に切断しヘノ]・チップ幅■3で
切断して第5図に示すビデオヘッドチップを完成させた
Thereafter, a winding groove 11 was formed as shown in FIG. 4, and a cap was formed by rejoining via a gap spacer 12. Furthermore, it was cut into individual chips with a chip width of 3 to complete the video head chip shown in FIG.

このように磁性体形成基板1と、接着カラス層形成基板
3を粉体中で加圧加熱接着することにより、後工程での
機械加1時の衝撃にも十分銅え、しかも基板3と磁性体
2の接着ガラス層4が5000人であった。この時の基
板母材への・」法は25 X 25鮪で接着後の厚さは
2.51111である。、二の接看面債か25X25龍
ては、通常のばねで押える6式の治具では全接着面全域
を均一・に押ずことができず第3図に示す短冊状に切り
出す工程において接11不良による接着はがれの不良か
多く発生し7、歩留りは悪かった。
By pressurizing and heating bonding the magnetic material forming substrate 1 and the adhesive glass layer forming substrate 3 in powder in this way, the copper is strong enough to withstand the impact of mechanical application in the subsequent process, and the substrate 3 and the magnetic layer are bonded together. The adhesive glass layer 4 of the body 2 was 5000. At this time, the thickness of the substrate base material was 25 x 25 mm, and the thickness after adhesion was 2.51111 mm. , No. 2, 25x25 dragonfly, cannot be pressed evenly over the entire adhesive surface with the standard 6-type jig that presses with a spring, so the contact was made in the process of cutting out the strips shown in Figure 3. There were many defects such as adhesive peeling due to defects 11 and 7, and the yield was poor.

また接着ガラス層4の厚みを、1ooo人、 5000
人。
In addition, the thickness of the adhesive glass layer 4 is 100 mm, 5000 mm.
Man.

1.5.10μmと検δ・1したが、いずれの厚みにお
いても十分な接着強度を得ることができた。しかし、テ
ープ摺動時の接着ガラス層4の偏摩耗量は、通常のビデ
オテープ走行時、接着ガラス層4の厚さ1μmの場合で
100Å以下、5μm厚で200人、10μm厚で50
0Å以上の偏摩耗を呈し、この場合に周端な出力劣化を
生じた。これよりガラス層4ば5μIn以下である必要
があることが分った。
Although the test δ·1 was 1, 5, and 10 μm, sufficient adhesive strength could be obtained at any thickness. However, the amount of uneven wear of the adhesive glass layer 4 during tape sliding is less than 100 Å when the adhesive glass layer 4 is 1 μm thick, 200 Å when the adhesive glass layer 4 is 5 μm thick, and 50 Å when the adhesive glass layer 4 is 1 μm thick during normal video tape running.
Uneven wear of 0 Å or more was exhibited, and in this case peripheral output deterioration occurred. From this, it was found that the glass layer 4 needs to have a thickness of 5 μIn or less.

なお実施例では、磁性体形成基板1と接着ガラス形成基
板3を一対用いて説明を加えたが、これは一対に限らず
、数層にわたって接着することも可能である。また粉体
中の圧力は5 kg / cIa以下では十分に接着で
きずに気泡を発生し、80kgr/−以上では結晶化ガ
ラス基板1.3に永久変形を与え不都合であった。
In the embodiment, a pair of the magnetic material forming substrate 1 and the bonding glass forming substrate 3 are used in the explanation, but this is not limited to one pair, and it is also possible to bond several layers. Moreover, if the pressure in the powder was less than 5 kg/cIa, sufficient adhesion could not be achieved and bubbles were generated, and if it was more than 80 kgr/-, the crystallized glass substrate 1.3 would be permanently deformed, which was disadvantageous.

発明のジノ果 以上のように、この発明によれば、偏摩耗を防止するこ
とができ、しかも比較的大きな寸法の接着面でも均一に
しかも気泡などの欠陥の少ない接着ガラス層で構成する
ことができるという効果がなる。
Effects of the Invention As described above, according to the present invention, it is possible to prevent uneven wear, and even on a relatively large adhesive surface, the adhesive glass layer can be formed uniformly and with few defects such as bubbles. It has the effect of being able to do it.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例で用いた基板母料の接着前
の斜視図、第2図はゎ)体を介し加圧接着する装置の一
部破断斜視図、第3図は基板母料をアジマス角で切断す
る工程の説明図、第4図はキャップ形成工程の説明図、
第5図は完成したビデオへソトチノプの斜視図、第6図
は従来のθり性薄膜を用いた磁気ヘットの説明図である
。 ■、3・・・基板、2・・・磁性体、4・・・接着カラ
ス層、5・・・粉体、A・・・母祠
Fig. 1 is a perspective view of the substrate base material used in an embodiment of the present invention before bonding, Fig. 2 is a partially cutaway perspective view of an apparatus for pressurizing bonding through bodies, and Fig. 3 is a perspective view of the substrate base material before bonding. An explanatory diagram of the process of cutting the material at an azimuth angle, FIG. 4 is an explanatory diagram of the cap forming process,
FIG. 5 is a perspective view of a completed video recording head, and FIG. 6 is an explanatory diagram of a conventional magnetic head using a θ-curable thin film. ■, 3...Substrate, 2...Magnetic material, 4...Adhesive glass layer, 5...Powder, A...Mother

Claims (1)

【特許請求の範囲】 (1)基板上に蒸着、スパッタリングにより磁性体を形
成する磁性体形成工程と、前記基板と同種の基板上に接
着ガラス1mを形成する接着ガラス形成工程と、前記磁
性体と前記接着ガラス層とを重ね合上粉体中に配置し、
前記粉体を加圧しながら加熱することにより接着し母材
を作る接着]二程と、前記7.U二相より磁気ヘットを
作る加」二工程とを含む磁気ヘッドの製造方法。 (211iij記基板は結晶化ガラスであり、前記磁性
体は非晶質合金であり、1);1記接着ガラス層は≦H
H,i糸カラスである特許請求の範囲第(1)項記載の
磁気へ一ソ「の製造方法。 (3)前記接着ガラス層は厚さが5μITI以下である
特許請求の範囲第(2)1.i′1記載の磁気ヘットの
製造方法。 (4)前記加圧時の圧力は5〜80 kg / cIi
である特許請求の範囲第(1)項、第(2)項または第
(3)項記載の磁気ヘッドの製造方法。
[Scope of Claims] (1) A magnetic material forming step in which a magnetic material is formed on a substrate by vapor deposition or sputtering, an adhesive glass forming step in which 1 m of adhesive glass is formed on a substrate of the same type as the substrate, and the magnetic material and the adhesive glass layer are superimposed and placed in the powder,
Adhesion of bonding the powder by heating it while pressurizing it to form a base material] Step 2 and step 7 above. A method for manufacturing a magnetic head, which includes the following two steps: manufacturing a magnetic head from two-phase U. (211iij the substrate is crystallized glass, the magnetic material is an amorphous alloy, 1); 1 the adhesive glass layer is ≦H
A method for manufacturing a magnetic heel according to claim (1), which is H, I thread crow. (3) Claim (2), wherein the adhesive glass layer has a thickness of 5 μITI or less. 1. The method for manufacturing the magnetic head according to i'1. (4) The pressure during the pressurization is 5 to 80 kg/cIi.
A method of manufacturing a magnetic head according to claim (1), (2), or (3).
JP45384A 1984-01-05 1984-01-05 Production of magnetic head Pending JPS60145517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP45384A JPS60145517A (en) 1984-01-05 1984-01-05 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45384A JPS60145517A (en) 1984-01-05 1984-01-05 Production of magnetic head

Publications (1)

Publication Number Publication Date
JPS60145517A true JPS60145517A (en) 1985-08-01

Family

ID=11474209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45384A Pending JPS60145517A (en) 1984-01-05 1984-01-05 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPS60145517A (en)

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