JPS60143192U - タ−ボ分子ポンプの翼形状 - Google Patents

タ−ボ分子ポンプの翼形状

Info

Publication number
JPS60143192U
JPS60143192U JP3113384U JP3113384U JPS60143192U JP S60143192 U JPS60143192 U JP S60143192U JP 3113384 U JP3113384 U JP 3113384U JP 3113384 U JP3113384 U JP 3113384U JP S60143192 U JPS60143192 U JP S60143192U
Authority
JP
Japan
Prior art keywords
molecular pump
disk
turbo molecular
blade shape
pump blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3113384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0110472Y2 (enrdf_load_stackoverflow
Inventor
浦野　智秋
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP3113384U priority Critical patent/JPS60143192U/ja
Publication of JPS60143192U publication Critical patent/JPS60143192U/ja
Application granted granted Critical
Publication of JPH0110472Y2 publication Critical patent/JPH0110472Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP3113384U 1984-03-02 1984-03-02 タ−ボ分子ポンプの翼形状 Granted JPS60143192U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3113384U JPS60143192U (ja) 1984-03-02 1984-03-02 タ−ボ分子ポンプの翼形状

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3113384U JPS60143192U (ja) 1984-03-02 1984-03-02 タ−ボ分子ポンプの翼形状

Publications (2)

Publication Number Publication Date
JPS60143192U true JPS60143192U (ja) 1985-09-21
JPH0110472Y2 JPH0110472Y2 (enrdf_load_stackoverflow) 1989-03-24

Family

ID=30531460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3113384U Granted JPS60143192U (ja) 1984-03-02 1984-03-02 タ−ボ分子ポンプの翼形状

Country Status (1)

Country Link
JP (1) JPS60143192U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743384U (enrdf_load_stackoverflow) * 1980-08-26 1982-03-09
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743384U (enrdf_load_stackoverflow) * 1980-08-26 1982-03-09
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Also Published As

Publication number Publication date
JPH0110472Y2 (enrdf_load_stackoverflow) 1989-03-24

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