JPS60142229U - シリコンウエハ−等の搬送装置 - Google Patents

シリコンウエハ−等の搬送装置

Info

Publication number
JPS60142229U
JPS60142229U JP2712284U JP2712284U JPS60142229U JP S60142229 U JPS60142229 U JP S60142229U JP 2712284 U JP2712284 U JP 2712284U JP 2712284 U JP2712284 U JP 2712284U JP S60142229 U JPS60142229 U JP S60142229U
Authority
JP
Japan
Prior art keywords
silicon wafers
lead screw
transfer equipment
screw shafts
conveyor means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2712284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322181Y2 (enExample
Inventor
蓮尾　洋明
Original Assignee
日本システムサ−ボ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本システムサ−ボ株式会社 filed Critical 日本システムサ−ボ株式会社
Priority to JP2712284U priority Critical patent/JPS60142229U/ja
Publication of JPS60142229U publication Critical patent/JPS60142229U/ja
Application granted granted Critical
Publication of JPH0322181Y2 publication Critical patent/JPH0322181Y2/ja
Granted legal-status Critical Current

Links

JP2712284U 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置 Granted JPS60142229U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2712284U JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2712284U JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Publications (2)

Publication Number Publication Date
JPS60142229U true JPS60142229U (ja) 1985-09-20
JPH0322181Y2 JPH0322181Y2 (enExample) 1991-05-15

Family

ID=30523772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2712284U Granted JPS60142229U (ja) 1984-02-27 1984-02-27 シリコンウエハ−等の搬送装置

Country Status (1)

Country Link
JP (1) JPS60142229U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH039332U (enExample) * 1989-06-17 1991-01-29

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586832A (ja) * 1981-06-30 1983-01-14 Shinkawa Ltd マガジン移送装置
JPS5859128A (ja) * 1981-10-01 1983-04-08 Hitachi Ltd 物品のロ−ダ、アンロ−ダ機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586832A (ja) * 1981-06-30 1983-01-14 Shinkawa Ltd マガジン移送装置
JPS5859128A (ja) * 1981-10-01 1983-04-08 Hitachi Ltd 物品のロ−ダ、アンロ−ダ機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH039332U (enExample) * 1989-06-17 1991-01-29

Also Published As

Publication number Publication date
JPH0322181Y2 (enExample) 1991-05-15

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