JPS60139392A - 超純水の製法と製造装置 - Google Patents

超純水の製法と製造装置

Info

Publication number
JPS60139392A
JPS60139392A JP24743683A JP24743683A JPS60139392A JP S60139392 A JPS60139392 A JP S60139392A JP 24743683 A JP24743683 A JP 24743683A JP 24743683 A JP24743683 A JP 24743683A JP S60139392 A JPS60139392 A JP S60139392A
Authority
JP
Japan
Prior art keywords
gas
water
supply section
oxidation reaction
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24743683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6215275B2 (enrdf_load_stackoverflow
Inventor
Yozo Morita
洋造 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP24743683A priority Critical patent/JPS60139392A/ja
Publication of JPS60139392A publication Critical patent/JPS60139392A/ja
Publication of JPS6215275B2 publication Critical patent/JPS6215275B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP24743683A 1983-12-27 1983-12-27 超純水の製法と製造装置 Granted JPS60139392A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24743683A JPS60139392A (ja) 1983-12-27 1983-12-27 超純水の製法と製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24743683A JPS60139392A (ja) 1983-12-27 1983-12-27 超純水の製法と製造装置

Publications (2)

Publication Number Publication Date
JPS60139392A true JPS60139392A (ja) 1985-07-24
JPS6215275B2 JPS6215275B2 (enrdf_load_stackoverflow) 1987-04-07

Family

ID=17163407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24743683A Granted JPS60139392A (ja) 1983-12-27 1983-12-27 超純水の製法と製造装置

Country Status (1)

Country Link
JP (1) JPS60139392A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0315417A (ja) * 1989-06-14 1991-01-23 Rofutee Kk ソフト枕

Also Published As

Publication number Publication date
JPS6215275B2 (enrdf_load_stackoverflow) 1987-04-07

Similar Documents

Publication Publication Date Title
US2700648A (en) Ozone stabilization
JPH09507613A (ja) ウエハ洗浄物質の再循環
JPS5929521B2 (ja) 精製塩酸の製造法
CA1077914A (en) Process for the removal of so2 from a stack gas absorptive medium for use in process and process for preparing the absorptive medium
JPH05505556A (ja) 主に硝酸およびフッ化水素酸を含有する水溶液の処理方法
JPS60139392A (ja) 超純水の製法と製造装置
JP4019272B2 (ja) 低沸点有機物含有排水の処理方法及び装置
JPS6314672B2 (enrdf_load_stackoverflow)
JPS60246336A (ja) グリコ−ル含有水からエチレングリコ−ルを高濃度で回収する方法
CN117699744A (zh) 一种简单、安全的分析纯硫酸制备方法
JP4565124B2 (ja) オゾン水を用いた放射性核種の分離回収方法
JPS5884103A (ja) 過酸化水素の製造方法
JP4074379B2 (ja) リサイクル装置及びリサイクル方法
JP3415273B2 (ja) 珪素又は珪素酸化物の溶蝕方法及び溶蝕装置ならびに不純物分析用試料の調製方法及び装置
JPWO2005044725A1 (ja) 高純度液体塩素の製造方法
JPS62265105A (ja) カルコゲナイド原料の精製方法及びその装置
US4178353A (en) Preparation and purification of phosphoryl chloride
Mason Spectrophotometric determination of oxidation states of selenium in glass
JP3775891B2 (ja) 水銀汚染土壌から水銀を回収する方法
CN85102099A (zh) 改良氧化催化剂
JPS60101401A (ja) ホルムアルデヒド生成ガスの廃熱回収法
JPS60222439A (ja) 粗製無水酢酸の精製法
JPS63287590A (ja) 有機物フリ−純水製造装置
CN118439567A (zh) 一种硫酸提纯方法及提纯装置
RU2701834C2 (ru) Способ получения высокообогащенного изотопа 13C