JPS60138758A - Magnetic tape sliding member and its manufacture - Google Patents

Abstract

PURPOSE:To prevent exfoliation of ceramic coating film by constituting the film so as to change continuously whose content rate of a metallic element of the boundary layer provided between the coating film and the ceramic coating film. CONSTITUTION:A sample fitting base 53 fitted with a sample 52 in a tendem form in a bell jar 51 is revoluted in a direction of arrow 53b while being rotated in the direction of arrow 53a with the turning mechanism activated with the torque of a motor 54, a negative voltage is applied to the fitting base 53 by a power supply 55 and the sample 52 is charged negatively. An ionizing electrode 59 applied with a positive voltage by a power supply 58 is provided to the upper part of an evaporation source 56 from which Ti is evaporated by applying a beam shown in the arrow from the beam device 57, the space between the source 56 and the electrode 59 is brought into plasma state, the evaporated Ti is ionized and collides with the sample 52 to form a Ti layer. In introducing a reaction N2 gas from a gas system 60, the gas is brought into the plasma state, accelerated toward the fitting base 53 and the TiN layer is formed to the sample 52.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a magnetic tape sliding contact member for a magnetic recording/reproducing device used in a video tape recorder (hereinafter abbreviated as VTR) or the like.

(Prior art) When using a vapor-deposited tape as the magnetic tape in a magnetic recording and reproducing device having a magnetic tape running system such as a VTR, ceramics such as titanium nitride are coated on the sliding contact surface of the magnetic tape sliding member. The present inventors have revealed that coating provides good tape running properties.

Methods for obtaining such ceramic coating layers include physical vapor deposition methods such as electron beam evaporation, reactive sputtering, and laser beam evaporation, as well as chemical vapor deposition methods such as photoCVD. CVD method was not used. The reason is that the above four methods (electron beam evaporation method, reactive sputtering method, laser beam evaporation method,
In the coating process using photo-CVD method,
While it is possible to coat even if the substrate temperature during coating is maintained at 200'C or lower, normal C
This is because in the coating process using the VD method, the substrate temperature during coating must be 700'C or higher. In other words, in order to reduce the weight of the device, aluminum alloy is used for the magnetic tape sliding member of the magnetic recording and reproducing device.
Light metals such as magnesium alloys and titanium alloys are used as base materials, and it is undesirable from the viewpoint of product accuracy to hold these base materials at temperatures exceeding 200° C. for long periods of time.

On the other hand, if a ceramic coating is applied to the sliding contact surface of a magnetic tape sliding member, good tape running properties can be obtained, but the linear expansion coefficient of the light alloy base material is considerably larger than that of the ceramic coating film. Even if a ceramic coating film was formed on the surface of a light alloy base material by each of the above-mentioned methods, cracks often occurred in the film and the film peeled off from the base material. Therefore, a film made of the main metal elements that make up the ceramic is formed between the light alloy base material and the ceramic coating film to prevent the ceramic film from peeling off. However, in experiments conducted by the present inventors, the degree of peeling was Although it decreased, it was not enough to completely prevent it.

〔the purpose〕

An object of the present invention is to provide a magnetic tape sliding contact member having a ceramic coating layer on the sliding contact surface with a magnetic tape of a magnetic recording/reproducing device, in which the ceramic coating film is difficult to peel off. Another object of the present invention is to provide a method of manufacturing the sliding contact member as described above easily and at low cost.

〔overview〕

In order to achieve the above object, the present invention is characterized by the following configuration. That is, a first coating layer made of a metal element is formed on the sliding contact surface of a magnetic tape sliding contact member of a magnetic recording and reproducing device having a magnetic tape running system,
A second coating layer made of ceramic containing the metal element of the first layer is formed on the first layer, and a boundary layer formed between the first layer and the second layer is formed. ,
It is characterized in that the content of the metal element changes continuously.

The present invention also provides a ceramic coating layer formed on the sliding contact surface of the base material of the sliding contact member, and a boundary layer between the base material and the ceramic coating layer containing a main metal element among the elements constituting the ceramic. The feature is that the rate changes continuously.

Furthermore, the present invention is characterized in that in the manufacturing process of forming the ceramic coating layer by reactive ion plating, the amount of reactive gas introduced into the vacuum chamber at the initial stage of coating is continuously changed.

〔Example〕

FIG. 1 is a system diagram showing a tape running system in an embodiment of the present invention. In FIG. 1, the tape 10 emerges from the supply reel 12 in the cassette 11 and takes the following path.

Cassette inner post 13 → Cassette inner post 14 → Tension post 15 → Rotating roller 16 → Inclined post 17 → Rotating roller 18 → Table reader 19 → Full width erasing head 20
→ Tape guide 21 → Drum 22 → Inclined post 23 → Audio erase head 24 → Audio control head 25 → Post 26 → Capstan 27 and pinch hole 28 → Inner cassette post 29 → Inner cassette post 3
00 The tape 10 reaches the take-up reel 31 via the above-described route.

FIGS. 2(a) and 2(b) are a plan view and a side view of the drum 22. The drum 22 is composed of an upper drum (a rotating drum in this embodiment) 41 and a lower drum 42 (a fixed drum in this embodiment). The upper drum 4
1 has a fixed shaft 43, and the upper drum 41 rotates together with the shaft 43. Further, on the upper drum 41, a pair of magnetic heads 44.45 are mounted at 180 mm.
゜They are provided at different positions as shown. Further, a tape guide 46 is provided on the lower drum 42, and a magnetic tape (not shown) runs along this tape guide 46.

3 and 4 are enlarged views of section F in FIG. 2(a). In FIGS. 3 and 4, 47 is a titanium (T1) layer, 48 is a boundary layer, and 49 is a titanium nitride (TiN) layer. In FIG. The film thickness of 48 is o, 1 μm, and the film thickness of TaN layer 49 is 0.5 μm.
m, and the thickness of the boundary layer 48 in FIG. 4 is 0.1μ.
m, and the film thickness of the TiN layer 49 is 0.4 μm. In this way, a ceramic film is applied to the surface of the drum 22 (the upper drum 41 and the lower drum 42, or either the upper drum 41 or the lower drum 42) by reactive ion blasting.

FIG. 5 is a schematic diagram showing the configuration of an ion blating device that performs the above-mentioned reactive ion blating. In the figure, reference numeral 51 indicates a bell jar, and within this bell jar 51, a sample mount 53 on which a sample 52 is mounted in a skewer shape is connected to a motor 54.
The rotating mechanism operated by the power of 1 rotates in the direction of arrow 53a in the figure and revolves in the direction of arrow 53b in the figure. In addition, the sample mounting table 53 has a base voltage power supply 55.
A negative voltage is applied to the sample 52.
is negatively charged. In the figure, reference numeral 56 denotes an evaporation source containing Ti, and Ti is evaporated by applying a beam from a beam device 57 as shown by the arrow.

Further, an ionization electrode 59 to which a positive voltage is applied by an ionization power source 58 is provided above the evaporation source 56, and this electrode 59 connects the evaporation source 56 and the ionization electrode 58.
The space between the two becomes a plasma state, and the evaporated Ti is ionized. The ionized Ti is accelerated toward the sample mount 53 and is attached to the sample 5 with high kinetic energy.
2 to form a Ti layer. Further, when N2 gas is introduced as a reaction gas into the gas system 60, the N2 gas becomes a plasma state, is accelerated toward the sample mount 53, and a TiN layer is formed on the sample 52. The conditions for forming the TiN layer after forming the Ti layer are: for the T1 layer, the ionization power source is 40V and the substrate voltage is 300V; for the TiN layer, the ionization power source is 40V and the substrate voltage is 100V.

The inventors formed a Ti layer and a TiN layer on the drum 22 under various conditions using the ion blating apparatus described above, and examined the adhesion of the films by a heat cycle test. This heat cycle test is a test method in which a basket containing a sample is moved back and forth between a tank kept at a high temperature and a tank kept at a low temperature to examine changes in the sample. A test was carried out by repeating 500 cycles at 70'C with each cycle lasting 20 minutes.

FIG. 6 is a condition graph of the surface state in the first example.

In this example, a T (layer) is formed on the surface of the drum 22, and a TiN layer is formed immediately above the Ti layer. In other words, this is the case where the boundary layer 48 in FIG. 4 is not eliminated. There are 0.4 m of 11 layers 47, and Ti
An N layer 49 is formed to a thickness of 0.5 μm. When a film in such a state was formed, cracks were generated on the drum surface and the film was partially peeled off. The above-mentioned scratches damage the tape, resulting in deterioration of image quality. Therefore, optimal discipline cannot be obtained under the conditions shown in Figure 6.

FIG. 7 is a diagram showing a condition graph of the surface state of the second example. In this case, the surface condition will be as shown in FIG. That is, 11 layers 47 are formed on the surface of the drum 22 to a thickness of 0.4 .mu.m, 8 layers, ie, a boundary layer 48 are coated thereon to a thickness of 0.1 .mu.m, and a TiN layer 49 is further formed to a thickness of 0.5 .mu.m thereon.

Further, the amount of Ti in the boundary layer 48 changes continuously. When a film in such a state is formed, no cracks occur on the surface and problems such as peeling do not occur.

FIG. 8 is a condition graph of the surface state of the third example.

In this case, the surface state shown in FIG. 4 is obtained as in the second example, but the eight layers, that is, the boundary layer 48, change in stages. Even when a film is formed in this state, no cracks occur and a high-quality surface is obtained.

FIG. 9 is 1 showing a condition graph of the surface state of the fourth example. The surface condition in this case is as shown in FIG. In other words, almost no Ti layer is formed, and T is continuously formed as it is.
The TiN layer 49 is formed by changing the ratio of No. 1. Even when a film in such a state is formed, no cranking occurs, a high quality film is obtained, and the surface condition is good.

FIG. 10 is a condition graph of the surface state of the fifth example. In this case as well, the surface condition is as shown in FIG. That is, N2 gas is introduced from the beginning, and Ti is gradually added to the TiN layer 49.
The content rate is changed.

Even in such a film, no cracks occur and the surface condition is good.

Fig. 11 and Fig. N12 are condition graphs when changing the Ti content. In FIG. 11, first, the degree of vacuum is set to 1XIO Torr and N2 gas is introduced.

Then, the amount of N2 gas introduced was gradually increased over about 10 minutes, and the degree of vacuum was continuously changed to 4×10-'Torr.

In Fig. 12, the amount of N2 gas introduced is increased stepwise, and the degree of vacuum is 0.5 x 10-' Torr for 2 minutes.
Xl0 Torr for 2 minutes, 2 x 10 → Torr for 2 minutes, 3
By changing the content continuously or discontinuously, a sliding contact member having a high-quality film that does not allow cranks to enter the surface can be obtained at low cost.

Note that the present invention is not limited to the above embodiments. For example, in this example, the film was formed by reactive ion blasting, but reactive sputtering may also be used. Also, using nitrogen gas as the reaction gas,
Although a titanium nitride layer is formed, titanium oxide may be formed by introducing acetylene gas and introducing titanium carbide or oxygen gas. Furthermore, as metal elements other than titanium, there are also
Group Ia elements can be used.

〔Effect of the invention〕

In a sliding contact member having a defective coating on the sliding contact surface with a magnetic tape of a magnetic recording/reproducing device, there is a gap between the light metal base material and the ceramic coating film of the sliding contact member, or a main component constituting the ceramic. Since a boundary layer is provided between the coating made of a metal element and the ceramic coating film so that the content of the metal element gradually changes, the ceramic film is less likely to peel off compared to conventional methods. A contact member can be provided. Further, according to the present invention, it is possible to provide a method by which such a sliding contact member can be easily and inexpensively manufactured.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a tape running system according to an embodiment of the present invention, FIGS. 2(a) and 2(b) are a plan view and a side view of a drum, and FIG.
4 and 4 are partially enlarged views of the drum, FIG. 5 is a schematic diagram showing the configuration of the ion blating device, and FIGS.
FIG. 10 is a diagram showing changes in the titanium content, and FIGS. 11 and 12 are diagrams showing changes in the degree of vacuum. 10...magnetic tape, 13.14.29.30...
Post in cassette, 15...Tension post, 17
．． 23... Inclined post, 22... Drum, 26...
・Post, 47... Ti layer, 48... Boundary layer, 49
... TiN layer, 51 ... Chamber, 52 ... Sample, 53 ... Sample mounting stand, 54 ... Rotating ta structure, 55
... base voltage power supply, 56 ... evaporation source, 57 ... beam device, 58 ... ionization power supply, 59 ... ionization electrode, 60 ... gas system. Applicant's representative Patent attorney Jun Tsuboi Figure 1 Figure 2 Figure 3 Figure 5 et al. 1 Figure 6 Figure 8 Figure 9 Figure 10

Claims (21)

[Claims] (1) In two members in sliding contact with the magnetic tape of a magnetic recording and reproducing device having a magnetic tape running system, a first coating layer made of a metal element formed on the sliding contact surface of the above member, and a a second coating layer formed on the outside and made of ceramics containing the metal element of the first layer; and a boundary layer formed between the first layer and the second layer; A magnetic tape sliding contact member characterized by a boundary layer in which the content of metal elements changes continuously. (2) The metal element of the first layer contains as a main component at least one of the elements of group ①, group ②, group IVa, group va, group ①a of the periodic table. ) The magnetic tape sliding contact member described in item ). (3) The magnetic tape sliding contact material 5 according to claim (1), wherein the metal element of the first layer is titanium. (4) The magnetic tape slider according to claim M(1), wherein the second layer of ceramics contains as a main component at least one of nitride, carbide, and oxide of the metal element of the first layer. Contact member. (5) The second layer of ceramic is titanium nitride,
The magnetic tape sliding contact member according to claim 1, which contains at least one of carbide and oxide as a main component. (6) the metal element of the first layer is titanium;
The magnetic tape sliding contact member according to claim (1), wherein the ceramic layer is titanium nitride. (7) The content of the metal element in the boundary layer between the first layer and the second layer is monotonically increasing.
) The magnetic tape sliding contact member described in item ). (8) The content of the metal element in the boundary layer between the first layer and the second layer decreases linearly.
1) The magnetic tape sliding contact member described in item 1). (9) The content of the metal element in the boundary layer between the first layer and the second layer decreases stepwise, and the step is at least 3.
A magnetic tape sliding contact member according to claim (1), which is a step. (10) The magnetic tape sliding contact member according to claim (1), wherein the first layer is formed by ion blasting, and the second layer is formed by reactive ion blasting. (11) A member that comes into sliding contact with the magnetic tape of a magnetic recording and reproducing device having a magnetic tape running system, which has a ceramic coating layer on the sliding surface of the base material of the member, and a boundary layer between the base material and the ceramic coating layer. A magnetic tape sliding contact member characterized in that the content of major metal elements among the elements constituting the ceramic changes continuously. (12) Among the elements constituting the ceramic coating layer, the main metal elements are group Ⅰ, group Ⅰ, and IV of the periodic table.
The magnetic tape sliding contact member according to claim (11), which is at least one of the elements of Group A, Group Va, and Group VIa. (13) The magnetic tape sliding contact member according to claim (11), wherein the ceramic coating layer contains at least one of nitride, carbide, and oxide as a main component. (14) The magnetic tape sliding contact member according to claim (11), wherein the ceramic coating layer is a titanium nitride. (15) The magnetic tape according to claim (11), wherein the content of major metal elements among the elements constituting the ceramic in the boundary layer between the base material and the ceramic coating layer monotonically decreases. Sliding contact member. (16) The magnetic field according to claim (11), wherein the content of main metal elements among the elements constituting the ceramic in the boundary layer between the base material and the ceramic coating layer decreases linearly. Tape sliding contact member. (17) The content of main metal elements among the elements constituting the ceramic in the boundary layer between the base material and the ceramic coating layer decreases in stages, and the number of stages is at least three. The magnetic tape sliding contact member according to item (11). (18) The lamic coating layer is formed by reactive ion blating.
1) The magnetic tape sliding contact member described in item 1). (19) In a manufacturing process for forming a ceramic coating layer of a sliding contact member having a ceramic coating layer on the sliding contact surface, which is in sliding contact with a magnetic tape of a magnetic recording and reproducing device having a magnetic tape running system, by reactive ion blasting, A method for manufacturing a magnetic tape sliding contact member, characterized by continuously changing the amount of reactive gas introduced into a vacuum chamber at the initial stage of coating. (20) The amount of reaction gas introduced into the vacuum chamber at the initial stage of coating is increased monotonically, linearly, or stepwise, and the number of steps is at least three. 19) A method for manufacturing a magnetic tape sliding contact member according to item 19). (21) The method for manufacturing a magnetic tape sliding contact member according to claim (19), wherein the reactive gas introduced into the vacuum chamber is at least one of nitrogen gas, acetylene gas, and oxygen gas.