JPS60135833A - Pyroelectric element and infrared ray sensor using same - Google Patents
Pyroelectric element and infrared ray sensor using sameInfo
- Publication number
- JPS60135833A JPS60135833A JP58244066A JP24406683A JPS60135833A JP S60135833 A JPS60135833 A JP S60135833A JP 58244066 A JP58244066 A JP 58244066A JP 24406683 A JP24406683 A JP 24406683A JP S60135833 A JPS60135833 A JP S60135833A
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- Prior art keywords
- pyroelectric
- pyroelectric element
- film
- electrodes
- electrode
- Prior art date
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Links
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- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 abstract description 4
- 230000010287 polarization Effects 0.000 abstract description 3
- 230000002269 spontaneous effect Effects 0.000 abstract description 3
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- 230000002093 peripheral effect Effects 0.000 description 2
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- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、性能が安定であって且つ効率的に製−造可能
な電極構造を有する焦電素子ならびにこれを用いる赤外
線センサに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pyroelectric element having an electrode structure that has stable performance and can be manufactured efficiently, and an infrared sensor using the same.
赤外線センサその他において感熱素子として焦電素子が
広く用いられはじめている。この焦電素子は、一般に自
発分極を有するフ・ン化ビニリデン系樹脂等の高分子焦
電体あるいはセラミンク無電体等からなる焦電体の膜な
いしは薄層体、すなわち分極フィルムの両面に電極膜を
形成した構造を有し、温度変化により両面に電極に電位
差を発生する作用を有する。また、一般に赤外線センサ
においては、このような焦電素子を感熱素子として用い
、入射する赤外線の発生する熱量に応じた電圧を焦電素
子の両面に発生させ、これを適宜増幅して検出するとい
う基本的構成を有する。Pyroelectric elements are beginning to be widely used as heat-sensitive elements in infrared sensors and other applications. This pyroelectric element is generally made of a film or thin layer of a pyroelectric material made of a polymer pyroelectric material such as a vinylidene fluoride resin or a non-electric ceramic material that has spontaneous polarization, that is, an electrode film on both sides of a polarized film. It has a structure in which a temperature change generates a potential difference between the electrodes on both sides. In addition, in general, infrared sensors use such a pyroelectric element as a heat-sensitive element, and generate a voltage on both sides of the pyroelectric element according to the amount of heat generated by the incident infrared rays, and amplify this as appropriate for detection. It has a basic configuration.
このような赤外線センサの一例として、本発明基らは、
第１図に断面図を示すような赤外線センサを既に提案し
ている（実願昭５８−１５０５７２号）。すなわち、こ
のセンサにおいては、まず赤外線透過窓１ａを頂部に開
口させた金属ケース（キャップ）１内には、その窓部１
ａに内接してエチレン系樹脂膜等からなる赤外線透過窓
材２が配置される。また、この赤外線透過窓材２の下に
は、上側導電体リング３およびフッ化ビニリデン系樹脂
等からなる焦電体膜４ａ（第２図）の両面にＩＴＯ（イ
ンジウム・すず複合酸化物）等からなる透明表面電極４
ｂ（第２図）および裏面電極４ｃ（第２図）を有してな
る焦電素子４．および。As an example of such an infrared sensor, the present invention group
An infrared sensor whose sectional view is shown in FIG. 1 has already been proposed (Utility Application No. 150572/1982). That is, in this sensor, first, inside a metal case (cap) 1 with an infrared transmitting window 1a opened at the top, there is a window 1a.
An infrared transmitting window material 2 made of an ethylene resin film or the like is arranged inscribed in a. Further, under this infrared transmitting window material 2, an upper conductor ring 3 and a pyroelectric film 4a (Fig. 2) made of vinylidene fluoride resin, etc. are coated with ITO (indium-tin composite oxide), etc. A transparent surface electrode 4 consisting of
4.b (FIG. 2) and a back electrode 4c (FIG. 2). and.
下側導電体リング５が順次積層されている。更に無電素
子４および導電体リング５の下部空間には、増幅素子の
一例としてのＦＥＴ （電界効果型トランジスタ）６が
配置され、そのゲートからのリード線６ａを下側導体リ
ング５の下面に圧接する形態で一体の絶縁部材７が金属
ケースｌの下部から挿入配置される。絶縁部材７は、焦
電素子４ならびに導体リング５を包囲する上部側壁７ａ
と、該上部側壁に連なり導体リング５を支承する上部棚
段７ｂと、ＦＥＴ６を収容する空間を包囲する中間側壁
７ｃと、底板７ｄとからなり、ＡＢＳ等の合成樹脂の射
出成形、プレス成形等により一体に成形されている。ま
たその底板７ｄには、ＦＥＴ６のソース、ドレインおよ
びアースのリード線８（８ａ、８′ｌｏ、８ｃ）が挿通
されている。また底板７ｄの外面には蒸着、メッキ等に
よるシールド用金属膜（５！Ｊ示せず）が形成され、こ
れをアースリード線８Ｃと導通させ、金属ケース１およ
び上側導体リング３を通じて焦電素子４の表面電極４が
接地されている。更に金属ケースｌの内容物は、ケース
下端１ｂをかしめることにより、密接に積層した一体構
造とされている。Lower conductor rings 5 are sequentially stacked. Further, in the space below the electroless element 4 and the conductor ring 5, an FET (field effect transistor) 6 as an example of an amplification element is arranged, and a lead wire 6a from the gate thereof is pressure-connected to the lower surface of the lower conductor ring 5. An integral insulating member 7 is inserted and arranged from the lower part of the metal case l. The insulating member 7 includes an upper side wall 7a surrounding the pyroelectric element 4 and the conductor ring 5.
It consists of an upper shelf 7b that extends to the upper side wall and supports the conductor ring 5, an intermediate side wall 7c that surrounds a space that accommodates the FET 6, and a bottom plate 7d, and is made of synthetic resin such as ABS by injection molding, press molding, etc. It is integrally molded. Furthermore, lead wires 8 (8a, 8'lo, 8c) for the source, drain, and ground of the FET 6 are inserted through the bottom plate 7d. In addition, a shielding metal film (5!J not shown) is formed on the outer surface of the bottom plate 7d by vapor deposition, plating, etc., and this is electrically connected to the ground lead wire 8C, and the pyroelectric element 4 is connected through the metal case 1 and the upper conductor ring 3. The surface electrode 4 of is grounded. Further, the contents of the metal case 1 are tightly laminated into an integral structure by caulking the lower end 1b of the case.
上記した第１図および第２図に示した赤外線センサは、
シールド構造も含めて底板ならびに側壁構造が簡略化さ
れ、部品数が少なく、ワイヤーポンディング等の複雑な
工程を含まずに容易且つ安価に製造できるという特徴を
有するが、一つの問題点が見出された。それは、実際に
製造された赤外線センサの出力がバラツキ、一定となら
ないということである。本発明者らの研究によれば、そ
の主要な原因は、焦電素子、特にその電極構造にあるこ
とが見出された。The infrared sensor shown in FIGS. 1 and 2 above is
Although the bottom plate and side wall structure including the shield structure are simplified, the number of parts is small, and it can be manufactured easily and inexpensively without complicated processes such as wire bonding, one problem was found. It was done. This means that the output of actually manufactured infrared sensors varies and is not constant. According to research conducted by the present inventors, it has been found that the main cause of this is the pyroelectric element, particularly its electrode structure.
したがって、本発明の主要な目的は、製造が容易で且つ
安定な特性を有する焦電素子を与え、もって特性の改善
された赤外線センサを安価に提供することにある。Therefore, the main object of the present invention is to provide a pyroelectric element that is easy to manufacture and has stable characteristics, thereby providing an infrared sensor with improved characteristics at a low cost.
本発明者らの研究によれば、上記第１図および第２図の
ようにして構成された赤外線センサの出力がバラツクご
との主要な原因の一つは、焦電体１１免４ａの両面に蒸
着等により表、裏面電極４ｂ、４Ｃを形成した後、無電
素子４の形状に打抜く段階で表裏面型ｉ４ｂ、４０間で
の短絡が生ずることであることが見出された。According to the research conducted by the present inventors, one of the main causes of variations in the output of the infrared sensor configured as shown in FIGS. 1 and 2 is that It has been found that after forming the front and back electrodes 4b, 4C by vapor deposition or the like, a short circuit occurs between the front and back molds i4b, 40 at the stage of punching into the shape of the electroless element 4.
そして、この問題を解決するには、焦電体膜の両面に電
極を形成した後、素子形状に打抜く際に両面電極間での
短絡が木質的に起らない電極構造とすればよい。In order to solve this problem, after forming electrodes on both sides of the pyroelectric film, it is sufficient to create an electrode structure in which short circuits between the electrodes on both sides do not occur during punching into an element shape.
本発明の第一の焦電素子は、このような観点で開発され
たものであり、より詳しくは、焦電体膜の表裏面に、そ
れぞれ互いに交差するストライブ状電極膜を設けてなる
ことを特徴とするものである。The first pyroelectric element of the present invention was developed from this point of view, and more specifically, the first pyroelectric element of the present invention is formed by providing strip-shaped electrode films that intersect with each other on the front and back surfaces of the pyroelectric film. It is characterized by:
また第１図のような赤外線センサに無電素子を組み込む
ためには、金属ケースｌの下方から、上側導電体リング
３、焦電素子４、および下側導電体リング５を順次挿入
し、積層すればよいわけであるが、この組み込み工程を
簡略化し、焦電素子の取扱いを容易とするためには、上
記した一対の導電体リングの少なくとも一方を焦電素子
の表裏面のいずれか少なくとも一方に接着しておくこと
が好ましい。また、このような一体化構造は焦電素子な
らびに赤外線センサの特性を安定化する上でも好ましい
。Furthermore, in order to incorporate an electroless element into an infrared sensor as shown in FIG. However, in order to simplify this assembly process and make handling of the pyroelectric element easier, it is necessary to attach at least one of the pair of conductive rings described above to at least one of the front and back surfaces of the pyroelectric element. It is preferable to adhere it. Moreover, such an integrated structure is also preferable in terms of stabilizing the characteristics of the pyroelectric element and the infrared sensor.
本発明の第二の焦電素子は、このような観点で開発され
たものであり、より詳しくは、焦電体膜の表裏面にそれ
ぞれ元いに交差するストライブ状電極膜を設け、更に焦
電体膜表裏面のストライブ状電極膜の交差点を囲み且つ
焦電体膜表裏面の少なくとも一面のほぼ周縁部にそって
導電体リングをストライプ状電極と導通するように接着
してなることを特徴とするものである。この際、電極の
ストライプ形状を利用して、焦電体膜に接着剤を電極と
ほぼ平行に塗布して導電体リングを接着すれば接着剤膜
の介在による焦電素子電極と導電体リングの導通不良が
起らず、一層特性の安定した焦電素子が得られる。後述
するように、この構造は特に焦電素子の効率的な製造を
も可能にするものである。The second pyroelectric element of the present invention was developed from this point of view, and more specifically, stripe-shaped electrode films that originally intersect are provided on the front and back surfaces of the pyroelectric film, and A conductor ring is bonded so as to surround the intersections of the striped electrode films on the front and back surfaces of the pyroelectric film and to be electrically conductive with the striped electrodes along substantially the periphery of at least one side of the front and back surfaces of the pyroelectric film. It is characterized by: At this time, by utilizing the striped shape of the electrode and applying adhesive to the pyroelectric film almost parallel to the electrode and adhering the conductor ring, the pyroelectric element electrode and the conductor ring can be separated by the adhesive film. A pyroelectric element with more stable characteristics without conduction failure can be obtained. As will be explained later, this structure also allows particularly efficient production of pyroelectric elements.
また、本発明の赤外線センサは、上記本発明の焦電素子
を検出素子として組込−んでなることを特徴とするもの
である。Further, the infrared sensor of the present invention is characterized by incorporating the pyroelectric element of the present invention as a detection element.
以下、本発明を、実施例について図面を参照しつつ更に
詳しく説明する。前記第１図および第２図を含めて、図
面中、同一符号を付した要素は、同様な機能を有するこ
とを示す。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail below with reference to embodiments and drawings. In the drawings, including the above-mentioned FIGS. 1 and 2, elements given the same reference numerals indicate that they have similar functions.
第３図（ａ）および（ｂ）は、それぞれ本発明の第一の
焦電素子の実施例の側断面図および平面図である。すな
わち、焦電素子１４は、自発分極を有するフッ化ビニリ
デン系樹脂等からなる焦電体膜１４ａの表面にＩＴＯ等
からなる透明ストライプ状電極１４ｂを、また裏面には
同じくストライプ状電極１４ｃを設けてなり、これらス
トライプ状電極ｉ４ｂ、１４ｃは互いに焦電体膜１４ａ
のほぼ中央で直交している。すなわち、焦電素子１４の
周縁部においては表裏面にともに電極が形成されること
がなく、したがって、連続な焦電体膜の表裏面に電極を
蒸着等により形成した後に、素子形状に打抜く際に表裏
の電極が短絡することかない。FIGS. 3(a) and 3(b) are a side sectional view and a plan view, respectively, of an embodiment of the first pyroelectric element of the present invention. That is, the pyroelectric element 14 has a transparent striped electrode 14b made of ITO or the like on the front surface of a pyroelectric film 14a made of vinylidene fluoride resin or the like having spontaneous polarization, and a striped electrode 14c similarly provided on the back surface. These striped electrodes i4b and 14c are connected to each other by the pyroelectric film 14a.
are orthogonal at approximately the center. In other words, electrodes are not formed on both the front and back surfaces of the pyroelectric element 14 at the peripheral edge, and therefore, electrodes are formed on the front and back surfaces of the continuous pyroelectric film by vapor deposition or the like, and then punched into the shape of the element. There will be no short circuit between the front and back electrodes.
第４図（ａ）、（ｂ）は、それぞれ、本発明の第二の無
電素子の実施例の厚さ方向断面図および平面図である。FIGS. 4(a) and 4(b) are a sectional view in the thickness direction and a plan view, respectively, of an embodiment of the second electroless element of the present invention.
すなわち、この焦電素子２４は、第３図（ａ）、（ｂ）
に示した焦電素子１４と実質的に同じ、焦電体膜１４ａ
、ストライプ状表面電極１４ｂ、ストライプ状裏面電極
１４ｃの積層体の裏面、すなわち焦電体膜１４ａの裏面
に、ストライプ状裏面電極１４ｃとほぼ平行に塗布した
一対のストライプ状接着剤ｉ２０を介して、焦電体膜１
４ａの周縁部に沿って、下側導電体リング１５を接着し
てなる。前述したように、このように予め焦電素子の上
下の導電体リングの少なくとも一方を無電素子に予め接
着して一体化しておくことにより、焦電素子の取扱いが
容易になり、またリングと焦電素子との導電状態が安定
化し、全体として焦電素子特性も安定化する。第４図（
ｂ）を見れば明らかな通り、リング１５と焦電体膜１４
ａとの接着が電極１４ｃとは別の位置で行なわれるため
、接着剤の介在によりリングと焦電素子との電気的接続
が阻害されることもない。なお、特に図示しないが、上
側導電体リングをも接着して一体化した焦電素子構造と
することもできることは容易に理解できよう。この場合
には、接着剤はストライブ状表面電極とほぼ平行に塗布
されることは云うまでもない。That is, this pyroelectric element 24 is as shown in FIGS. 3(a) and (b).
A pyroelectric film 14a that is substantially the same as the pyroelectric element 14 shown in FIG.
, via a pair of striped adhesives i20 applied almost parallel to the striped back electrodes 14c on the back surface of the laminate of the striped front electrodes 14b and the striped back electrodes 14c, that is, on the back surface of the pyroelectric film 14a. Pyroelectric film 1
A lower conductor ring 15 is bonded along the peripheral edge of the ring 4a. As mentioned above, by adhering and integrating at least one of the upper and lower conductor rings of the pyroelectric element to the non-electroelectric element in advance, handling of the pyroelectric element becomes easier, and the rings and the conductor rings are easily integrated. The conductive state with the electric element is stabilized, and the characteristics of the pyroelectric element as a whole are also stabilized. Figure 4 (
As is clear from b), the ring 15 and the pyroelectric film 14
Since the bonding with the ring a is performed at a position different from the electrode 14c, the electrical connection between the ring and the pyroelectric element is not inhibited by the interposition of the adhesive. Although not particularly shown in the drawings, it is easy to understand that the upper conductor ring can also be bonded to form an integrated pyroelectric element structure. In this case, it goes without saying that the adhesive is applied approximately parallel to the striped surface electrodes.
本発明の第二の焦電素子は、従来の単に表裏面に全面電
極を有する焦電素子の製造に比べてもそれ程複雑ではな
い、比較的簡単な方法により連続的に製造可能である。The second pyroelectric element of the present invention can be manufactured continuously by a relatively simple method that is not so complicated compared to the manufacturing of a conventional pyroelectric element that simply has electrodes on the front and back surfaces.
すなわち、第５図に、第４図に例示した焦電素子２４の
製造工程の概要を焦電素子裏面から見た平面図として示
すように、別途、蒸着装置により、表面電極１４ｂに相
当する電極ストライプ１１４ｂおよび裏面電極１４ｃに
相当する電極ストライプ１１４Ｃを両面に形成した長尺
焦電体膜１１４ａを用意する。このようなストライプ状
電極１１４ｂおよび１１４ｃのうち、長子方向（すなわ
ち図の矢印Ａの方向）に沿う電極１１４ｃについては、
帯状マスクを用い、長尺焦電体膜１１４ａを矢印Ａの方
向へと巻き戻しつつ、完全に連続的に蒸着を行うことが
でき、また巾方向に延長する電極１ｉ４ｂについては、
長尺焦電体膜１１４ａを間欠的に巻き戻しつつ蒸着を行
うことにより、これも効率的に製造できる。これは、第
３図ないし第４図に例示の焦電素子における電極が直線
的ストライブ形状を示していることが有効に利用されて
いる（但し本発明全体としてストライプ電極が完全な直
線状ストライプであることは必要としない）。That is, as shown in FIG. 5 as a plan view of the outline of the manufacturing process of the pyroelectric element 24 illustrated in FIG. A long pyroelectric film 114a having electrode stripes 114C corresponding to the stripes 114b and the back electrode 14c formed on both sides is prepared. Among such striped electrodes 114b and 114c, the electrode 114c along the longitudinal direction (that is, the direction of arrow A in the figure) is as follows.
Vapor deposition can be performed completely continuously while unwinding the elongated pyroelectric film 114a in the direction of arrow A using a band-shaped mask, and for the electrode 1i4b extending in the width direction,
This can also be efficiently manufactured by performing vapor deposition while intermittently unwinding the elongated pyroelectric film 114a. This is effectively utilized that the electrodes in the pyroelectric elements illustrated in FIGS. ).
このような表裏面電極ストライプ１１４ｂおよび１１４
Ｃを形成した長尺焦電体膜１１４ａの長手方向に延長す
る電極１１４ｃとほぼ平行に、ストライプ状に、エポキ
シ系、ニトリルゴム系等の接着剤１２０を塗布した後、
前記ストライプ状電極１１４ｂと１１４ｃの各交差点を
包囲し１両側の接着剤ストライプ１２０を覆う位置に、
導電体リング１５を配設し、接着剤１２０により接着す
るとともに、電極１１４ｃと接触導通させる。この状態
のＶｌ−Ｖｌ線に沿って取った断面図を第６図に示す。Such front and back electrode stripes 114b and 114
After applying an adhesive 120 such as epoxy or nitrile rubber in a stripe pattern approximately parallel to the electrode 114c extending in the longitudinal direction of the elongated pyroelectric film 114a formed with C,
At a position surrounding each intersection of the striped electrodes 114b and 114c and covering the adhesive stripes 120 on both sides,
A conductor ring 15 is disposed and adhered with an adhesive 120, and is brought into contact with and electrically connected to the electrode 114c. A sectional view taken along the line Vl--Vl in this state is shown in FIG.
次いで、この接合体を導電体リング１５の外径にそって
打抜けば、第４図（ａ）、（ｂ）に示すような焦電素子
が得られる。Next, by punching this bonded body along the outer diameter of the conductive ring 15, a pyroelectric element as shown in FIGS. 4(a) and 4(b) is obtained.
本発明の赤外線センサは、前記第１図の赤外線センサと
木質的に同じ構造を取ることができ、但し、その焦電素
子４の代わりに第３図で示す無電素子１４あるいは第４
図で示す無電素子２４のような本発明の焦電素子を用い
ることにより得られる。また必要に応じて、実開昭５６
−５９６３６号公報に示されるように上側導電体リング
３を、キャップ１の側壁の代わりに、あるいは側壁に加
えて、頂壁に内接させる構造としてもよい。The infrared sensor of the present invention can have the same wooden structure as the infrared sensor shown in FIG.
This is obtained by using a pyroelectric element of the present invention, such as the electroless element 24 shown in the figure. In addition, if necessary,
As shown in Japanese Patent No. 59636, the upper conductor ring 3 may be inscribed in the top wall of the cap 1 instead of or in addition to the side wall.
上述したように、本発明によれば、電極構造を工夫する
ことにより、製造が容易で且つ安定な特性を有する無電
素子が与えられ、これを組み込むことにより安価で安定
な特性を有する赤外線センサが構成される。As described above, according to the present invention, by devising the electrode structure, an electroless element that is easy to manufacture and has stable characteristics can be provided, and by incorporating this, an infrared sensor that is inexpensive and has stable characteristics can be obtained. configured.
第１図は本発明の赤外線センサも取り得る赤外線センサ
の正断面構造を示す断面図、第２図は従来の焦電素子の
厚さ方向断面図、第図（ａ）およびＣｂ）はそ和ぞれ本
発明の第１の焦電素子の実施例の断面図および平面図、
第４図（ａ）および（ｂ）はそれぞれ本発明の第２の゛
焦電素子の実施例の断面図および平面図、第５図は第４
図に示す無電素子の製造工程の概要を示す平面図、第６
図は第５図の■−■線に沿う断面図である。
１・・・金属ケース（ｌａ・・赤外線透過窓、ｌｂ・・
下端かしめ部）、
２・・・赤外線透過窓材、
３・・・上側導電体リング、
４．１４．２４・・・焦電素子、
４ａ、１４ａ・・會焦電体膜、
４ｂ、１４ｂ、１１４ｂ・・・表面電極、４ｃ、１４ｃ
、１１４ｃ＊ｓ−裏面電極、５．１５・・・下側導電体
リング、
６−＊＊ＦＥＴ（６ａ＊＊ゲートリード線）、７・・・
絶縁部材、８拳φ・リード線。
第 ｌ 図
−
／〜
１４′
手続補正書（方式）
昭和５８年４月１０日
杵庁長官 若杉和夫 殿
、事件の表示
昭和５８年特許願第２４４０６６号
、発明の名称
焦電素子およびこれを用いる赤外線センサ、補正をする
者
事件との関係 特許出願人
（１１０）呉羽化学工業株式会社
、代理人
住 所 〒１０５東京都港区東新橋２−７−７新橋国際
ビル６階
（発送日：昭和５９年３月２７日）
、補正の対象
明細書の「図面の簡単な説明」の欄
、補正の内容
本願明細書第１２頁第１０行の「第図（ａ）」を「第３
図（ａ）」と補正します。Fig. 1 is a sectional view showing the normal cross-sectional structure of an infrared sensor which can also be used as the infrared sensor of the present invention, Fig. 2 is a sectional view in the thickness direction of a conventional pyroelectric element, and Figs. A cross-sectional view and a plan view of an embodiment of the first pyroelectric element of the present invention, respectively,
4(a) and 4(b) are respectively a sectional view and a plan view of a second embodiment of the pyroelectric element of the present invention, and FIG.
A plan view showing an outline of the manufacturing process of the electroless element shown in FIG.
The figure is a sectional view taken along the line ■-■ in FIG. 5. 1... Metal case (la... infrared transmitting window, lb...
lower end caulking part), 2... Infrared transmitting window material, 3... Upper conductor ring, 4.14.24... Pyroelectric element, 4a, 14a... Pyroelectric film, 4b, 14b, 114b...Surface electrode, 4c, 14c
, 114c*s-back electrode, 5.15...lower conductor ring, 6-**FET (6a** gate lead wire), 7...
Insulating material, 8 fist diameter, lead wire. Figure l - / ~ 14' Procedural amendment (method) April 10, 1980 Mr. Kazuo Wakasugi, Director General of the Agency, Indication of the case 1982 Patent Application No. 244066, Title of invention Pyroelectric element and its use Infrared sensor, relationship to the amendment person case Patent applicant (110) Kureha Chemical Industry Co., Ltd., agent address 6th floor, Shinbashi Kokusai Building, 2-7-7 Higashi-Shinbashi, Minato-ku, Tokyo 105 (Shipping date: Showa (March 27, 1959), in the column "Brief explanation of drawings" of the specification to be amended, the contents of the amendment changed "Figure (a)" in page 12, line 10 of the specification of the present application to "Figure 3.
Figure (a)” is corrected.
Claims (1)
ライプ状電極Ｉりを設けてなることを特徴とする焦電素
子。 ２、焦電体膜の表裏面にそれぞれ互いに交差するストラ
イブ状電極膜を設け、更に焦電体膜表裏面のストライブ
状電極膜の交差点を囲み且つ焦電体膜表裏面の少なくと
も一面のほぼ周縁部にそって導電体リングをストライプ
状電極と導通するように接着してなることを特徴とする
焦電素子。 ３、導電体リングが、それが接着される焦電体膜面に設
けたストライプ状電極とほぼ平行にストライブ状に塗布
した接着剤により焦電体膜に接着されてなる特許請求の
範囲第２項に記載の焦電素子。 ４、焦電体膜の表裏面に、それぞれ互いに交差するスト
ライブ状電極膜を設けてなる焦電素子を検出素子として
有することを特徴とする赤外線センサ。[Claims] 1. A pyroelectric element characterized in that striped electrodes are provided on the front and back surfaces of a pyroelectric film, each intersecting with each other. 2. Stripe-shaped electrode films are provided on the front and back surfaces of the pyroelectric film, respectively, and intersect with each other. A pyroelectric element characterized in that a conductive ring is bonded to a striped electrode so as to be electrically conductive along the periphery thereof. 3. A conductive ring is bonded to a pyroelectric film using an adhesive applied in stripes substantially parallel to striped electrodes provided on the surface of the pyroelectric film to which the conductive ring is bonded. The pyroelectric element according to item 2. 4. An infrared sensor characterized by having a pyroelectric element as a detection element, which is formed by providing striped electrode films that intersect with each other on the front and back surfaces of a pyroelectric film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244066A JPS60135833A (en) | 1983-12-26 | 1983-12-26 | Pyroelectric element and infrared ray sensor using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244066A JPS60135833A (en) | 1983-12-26 | 1983-12-26 | Pyroelectric element and infrared ray sensor using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60135833A true JPS60135833A (en) | 1985-07-19 |
| JPH0432977B2 JPH0432977B2 (en) | 1992-06-01 |
Family
ID=17113221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58244066A Granted JPS60135833A (en) | 1983-12-26 | 1983-12-26 | Pyroelectric element and infrared ray sensor using same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60135833A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3829459B2 (en) * | 1998-02-19 | 2006-10-04 | 松下電工株式会社 | Pyroelectric infrared detector |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54154384A (en) * | 1978-05-25 | 1979-12-05 | Matsushita Electric Ind Co Ltd | Infrared ray detector |
| JPS56153221A (en) * | 1980-10-31 | 1981-11-27 | Matsushita Electric Ind Co Ltd | Infraredray detecting element |
-
1983
- 1983-12-26 JP JP58244066A patent/JPS60135833A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54154384A (en) * | 1978-05-25 | 1979-12-05 | Matsushita Electric Ind Co Ltd | Infrared ray detector |
| JPS56153221A (en) * | 1980-10-31 | 1981-11-27 | Matsushita Electric Ind Co Ltd | Infraredray detecting element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0432977B2 (en) | 1992-06-01 |
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