JPS60134490A - 周期性構造を有する半導体レ−ザの製法 - Google Patents
周期性構造を有する半導体レ−ザの製法Info
- Publication number
- JPS60134490A JPS60134490A JP58242810A JP24281083A JPS60134490A JP S60134490 A JPS60134490 A JP S60134490A JP 58242810 A JP58242810 A JP 58242810A JP 24281083 A JP24281083 A JP 24281083A JP S60134490 A JPS60134490 A JP S60134490A
- Authority
- JP
- Japan
- Prior art keywords
- uneven surface
- semiconductor
- semiconductor substrate
- periodic structure
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 149
- 230000000737 periodic effect Effects 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 28
- 239000007791 liquid phase Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 5
- 230000001681 protective effect Effects 0.000 claims description 21
- 230000001788 irregular Effects 0.000 abstract 4
- 239000010410 layer Substances 0.000 description 51
- 239000000155 melt Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 101000581940 Homo sapiens Napsin-A Proteins 0.000 description 1
- 102100027343 Napsin-A Human genes 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 235000015110 jellies Nutrition 0.000 description 1
- 239000008274 jelly Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242810A JPS60134490A (ja) | 1983-12-22 | 1983-12-22 | 周期性構造を有する半導体レ−ザの製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58242810A JPS60134490A (ja) | 1983-12-22 | 1983-12-22 | 周期性構造を有する半導体レ−ザの製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60134490A true JPS60134490A (ja) | 1985-07-17 |
| JPS6355233B2 JPS6355233B2 (enrdf_load_stackoverflow) | 1988-11-01 |
Family
ID=17094620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58242810A Granted JPS60134490A (ja) | 1983-12-22 | 1983-12-22 | 周期性構造を有する半導体レ−ザの製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60134490A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0652037U (ja) * | 1992-12-11 | 1994-07-15 | 株式会社金星社 | 誤挿入防止装置 |
-
1983
- 1983-12-22 JP JP58242810A patent/JPS60134490A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6355233B2 (enrdf_load_stackoverflow) | 1988-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |