JPS60133186U - 真空排気制御装置 - Google Patents

真空排気制御装置

Info

Publication number
JPS60133186U
JPS60133186U JP1922084U JP1922084U JPS60133186U JP S60133186 U JPS60133186 U JP S60133186U JP 1922084 U JP1922084 U JP 1922084U JP 1922084 U JP1922084 U JP 1922084U JP S60133186 U JPS60133186 U JP S60133186U
Authority
JP
Japan
Prior art keywords
state
control device
vacuum
exhaust control
vacuum exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1922084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332379Y2 (enrdf_load_stackoverflow
Inventor
師井　達夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1922084U priority Critical patent/JPS60133186U/ja
Publication of JPS60133186U publication Critical patent/JPS60133186U/ja
Application granted granted Critical
Publication of JPS6332379Y2 publication Critical patent/JPS6332379Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1922084U 1984-02-15 1984-02-15 真空排気制御装置 Granted JPS60133186U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1922084U JPS60133186U (ja) 1984-02-15 1984-02-15 真空排気制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1922084U JPS60133186U (ja) 1984-02-15 1984-02-15 真空排気制御装置

Publications (2)

Publication Number Publication Date
JPS60133186U true JPS60133186U (ja) 1985-09-05
JPS6332379Y2 JPS6332379Y2 (enrdf_load_stackoverflow) 1988-08-29

Family

ID=30508594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1922084U Granted JPS60133186U (ja) 1984-02-15 1984-02-15 真空排気制御装置

Country Status (1)

Country Link
JP (1) JPS60133186U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6332379Y2 (enrdf_load_stackoverflow) 1988-08-29

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