JPS60131951U - 電子線装置等におけるシャフト移動機構 - Google Patents

電子線装置等におけるシャフト移動機構

Info

Publication number
JPS60131951U
JPS60131951U JP1905684U JP1905684U JPS60131951U JP S60131951 U JPS60131951 U JP S60131951U JP 1905684 U JP1905684 U JP 1905684U JP 1905684 U JP1905684 U JP 1905684U JP S60131951 U JPS60131951 U JP S60131951U
Authority
JP
Japan
Prior art keywords
shaft
electron beam
movement mechanism
shaft movement
beam equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1905684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH054194Y2 (enrdf_load_stackoverflow
Inventor
洋一 渋木
仲野　裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1905684U priority Critical patent/JPS60131951U/ja
Publication of JPS60131951U publication Critical patent/JPS60131951U/ja
Application granted granted Critical
Publication of JPH054194Y2 publication Critical patent/JPH054194Y2/ja
Granted legal-status Critical Current

Links

JP1905684U 1984-02-13 1984-02-13 電子線装置等におけるシャフト移動機構 Granted JPS60131951U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1905684U JPS60131951U (ja) 1984-02-13 1984-02-13 電子線装置等におけるシャフト移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1905684U JPS60131951U (ja) 1984-02-13 1984-02-13 電子線装置等におけるシャフト移動機構

Publications (2)

Publication Number Publication Date
JPS60131951U true JPS60131951U (ja) 1985-09-03
JPH054194Y2 JPH054194Y2 (enrdf_load_stackoverflow) 1993-02-02

Family

ID=30508272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1905684U Granted JPS60131951U (ja) 1984-02-13 1984-02-13 電子線装置等におけるシャフト移動機構

Country Status (1)

Country Link
JP (1) JPS60131951U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018060614A (ja) * 2016-10-03 2018-04-12 株式会社メルビル 試料ホルダー

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590046A (en) * 1978-12-28 1980-07-08 Internatl Precision Inc Electronic microscope equipped with optical microscope provided with x-ray shielding device
JPS56131064U (enrdf_load_stackoverflow) * 1980-03-07 1981-10-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590046A (en) * 1978-12-28 1980-07-08 Internatl Precision Inc Electronic microscope equipped with optical microscope provided with x-ray shielding device
JPS56131064U (enrdf_load_stackoverflow) * 1980-03-07 1981-10-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018060614A (ja) * 2016-10-03 2018-04-12 株式会社メルビル 試料ホルダー

Also Published As

Publication number Publication date
JPH054194Y2 (enrdf_load_stackoverflow) 1993-02-02

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