JPS60131873A - Cerqmic-metal direct bonded body and manufacture - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The invention relates to a Hiramix-metal direct bonded body and a method for manufacturing the same.

[Technical background of the invention and its problems] Conventionally, the method of joining a ceramic member to a metal member is to apply a molyzodene-mancan paste or the like to the surface of the ceramic member and then sinter it in a non-oxidizing atmosphere. A commonly used method is to perform metallization treatment, then perform nickel plating, and then join it to a metal member by brazing.

This method is effective when joining oxide-based ceramic members such as alumina and metal members, but it is effective for joining non-oxide ceramic members such as nitride-based ceramics, oxynitride-based ceramics, or carbide-based ceramics. There were 111 points in which the strength of the joint was insufficient when joining ceramics and metal members.

By the way, non-oxide ceramics generally have excellent wear resistance and high-temperature properties, and are being considered for application in various fields that require these properties. There is a strong desire to establish a bonding technology for this purpose.

[Purpose of the Invention] The inventors of the present invention have conducted research on the C12 concept to address these points, and have found that when a ceramic member and a metal member are joined through a layer of eutectic structure composed of these component elements, It has been found that a pretreatment such as metallization treatment is not required, and a high bonding strength can be obtained.

The present invention has been made based on such knowledge, and provides a ceramic-metal direct bonded body that does not require pretreatment such as metallization treatment and has high bonding strength, and a method for manufacturing the same. The purpose is to

[Summary of the Invention] In the ceramic-metal direct bonded body of the present invention, a ceramic member and a metal member are bonded by -C through a layer of eutectic structure made of component elements of the metal member such as the ceramic member. It is characterized by

Further, the method for producing a ceramic-metal direct bonded body of the present invention includes bringing a ceramic member and a metal member into contact with each other, and at least the melting point of the eutectic structure containing the component elements of the ceramic member and the metal member, and the ceramic member and the metal member being in contact with each other. It is characterized by being fired at a temperature that does not cause melting, sublimation, or decomposition of any of the above.

Ceramic members used in the present invention include nitride ceramics such as silicon nitride, aluminum nitride, titanium nitride, oxynitride ceramics such as SIA0, and vertical ceramics such as silicon carbide. A non-oxide ceramic sintered body such as a composite of is suitable. It is also applicable to oxide ceramics.

Further, the metal member used in the present invention is a metal that can form a eutectic structure with these ceramics, and a metal member made of nickel or an alloy containing nickel is suitably used.

The ceramic-metal direct contact body in the present invention is manufactured by the following method.

1. In other words, the surfaces to be joined are brought into contact with a ceramic member, for example, a clay-based ceramic, and a metal member containing a metal element that can form a eutectic structure with the constituent elements of the non-oxide ceramic. This is then heated in a non-oxidizing 1:1 atmosphere, such as a homing gas, at a temperature higher than the temperature at which a eutectic is formed by both component elements, and both the ceramic member and the metal member are melted, sublimated or decomposed. This is done by heating for several minutes at a temperature range that does not cause □ Applying pressure so that the contact portions come into close contact with each other during bonding is effective in making the bonded state uniform.

By heating in such a non-oxidizing atmosphere, a thin eutectic silk-like layer is formed on the contact surfaces of the two members, and the two members are firmly joined.

[Embodiments of the invention] Examples of the present invention will be described below.

Example Rectangular parallelepiped (10x10x3 dragons) TiN (C.

A sintered body sample (containing 2%) and a nickel plate with a thickness of 0.3 nm annealed at 650°C for 20 minutes were stacked together, a tungsten plow weighing about 10 g was placed on the nickel plate, and the sintered body sample was heated with a homing gas (N2:H2). The two were bonded by heating at 1280° C. for 5 minutes in a reducing atmosphere of =1:1).

Electron Microscope (X2000) C observation of the interface of the ceramic-nickel direct bonded body obtained in this way revealed that a continuously changing boundary layer was observed, indicating a satisfactory bonding state. Ta.

[Effects of the Invention] As is clear from the above examples, the ceramic-metal direct bonded body of the present invention can bond ceramic members with high bonding strength, even with non-oxide ceramics, which have conventionally been difficult to bond with metal members. Since the bonding process can be carried out with no pretreatment and no pretreatment is required, the number of operations can be significantly reduced.

Representative Patent Attorney Su Yamasa -

Claims (9)

[Claims] (1) A ceramic member characterized in that a ceramic member and a metal member are joined via a layer containing a eutectic structure consisting of each component element of the metal portion H of the ceramic member.
Metal direct joint. (2) The ceramic-metal direct bonded body according to claim 1, wherein the ceramic member is made of a non-oxide ceramic. (3) The ceramic-metal direct bonded body according to claim 1 or 2, wherein the ceramic member is made of a ceramic selected from nitride ceramics, oxynitride ceramics, and carbonitride ceramics. (4) The ceramic-metal direct bonded body according to any one of claims 1 to 3, wherein the ceramic member contains titanium and nitrogen as component elements. (5) The Hiramix-metal direct bonded body according to any one of claims 1 to 4, wherein the metal portion I is made of nickel or an alloy containing nickel. (6) A ceramic member and a metal member are brought into contact at a temperature that is higher than the melting point of the eutectic structure containing the component elements of the ceramic member and the metal member, and that does not melt, sublimate, or decompose either the ceramic member or the metal member. 1. A method for producing a lamic-metal direct bonded body. (7) The method for manufacturing a ceramic-metal direct bonded body according to claim 6, wherein the ceramic member is made of a non-oxide ceramic. (8) Production of a ceramic-metal direct bonded body according to claim 1f11, paragraph 6 or 7, in which the ceramic member is made of a ceramic selected from nitride ceramics, oxynitride ceramics, and carbide ceramics. Method. (9) A method for producing a ceramic-metal direct bonded assembly according to any one of claims 6 to 8, wherein the ceramic member contains titanium and nitrogen as component elements. <10) The method for manufacturing a ceramic-metal direct bonded body according to any one of claims 6 to 9, wherein the metal member is made of nickel or an alloy containing nickel.