JPS60129064U - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS60129064U
JPS60129064U JP1565384U JP1565384U JPS60129064U JP S60129064 U JPS60129064 U JP S60129064U JP 1565384 U JP1565384 U JP 1565384U JP 1565384 U JP1565384 U JP 1565384U JP S60129064 U JPS60129064 U JP S60129064U
Authority
JP
Japan
Prior art keywords
electron
electronic microscope
electron microscope
electron beam
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1565384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238366Y2 (enrdf_load_stackoverflow
Inventor
平田　義弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1565384U priority Critical patent/JPS60129064U/ja
Publication of JPS60129064U publication Critical patent/JPS60129064U/ja
Application granted granted Critical
Publication of JPH0238366Y2 publication Critical patent/JPH0238366Y2/ja
Granted legal-status Critical Current

Links

JP1565384U 1984-02-07 1984-02-07 電子顕微鏡 Granted JPS60129064U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565384U JPS60129064U (ja) 1984-02-07 1984-02-07 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565384U JPS60129064U (ja) 1984-02-07 1984-02-07 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS60129064U true JPS60129064U (ja) 1985-08-29
JPH0238366Y2 JPH0238366Y2 (enrdf_load_stackoverflow) 1990-10-16

Family

ID=30501691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565384U Granted JPS60129064U (ja) 1984-02-07 1984-02-07 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS60129064U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (ja) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ 荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163670A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron ray device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163670A (en) * 1978-06-15 1979-12-26 Nippon Electron Optics Lab Electron ray device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017179137A1 (ja) * 2016-04-13 2017-10-19 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
JPWO2017179137A1 (ja) * 2016-04-13 2018-10-18 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0238366Y2 (enrdf_load_stackoverflow) 1990-10-16

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