JPS60125727U - 半導体材料のキヤリヤ用クレイドル - Google Patents

半導体材料のキヤリヤ用クレイドル

Info

Publication number
JPS60125727U
JPS60125727U JP1427784U JP1427784U JPS60125727U JP S60125727 U JPS60125727 U JP S60125727U JP 1427784 U JP1427784 U JP 1427784U JP 1427784 U JP1427784 U JP 1427784U JP S60125727 U JPS60125727 U JP S60125727U
Authority
JP
Japan
Prior art keywords
cradle
carrier
utility
semiconductor material
carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1427784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525231Y2 (cs
Inventor
相合　征一郎
Original Assignee
黒谷　巌
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　巌 filed Critical 黒谷　巌
Priority to JP1427784U priority Critical patent/JPS60125727U/ja
Publication of JPS60125727U publication Critical patent/JPS60125727U/ja
Application granted granted Critical
Publication of JPH0525231Y2 publication Critical patent/JPH0525231Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Weting (AREA)
JP1427784U 1984-02-02 1984-02-02 半導体材料のキヤリヤ用クレイドル Granted JPS60125727U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1427784U JPS60125727U (ja) 1984-02-02 1984-02-02 半導体材料のキヤリヤ用クレイドル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1427784U JPS60125727U (ja) 1984-02-02 1984-02-02 半導体材料のキヤリヤ用クレイドル

Publications (2)

Publication Number Publication Date
JPS60125727U true JPS60125727U (ja) 1985-08-24
JPH0525231Y2 JPH0525231Y2 (cs) 1993-06-25

Family

ID=30499047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1427784U Granted JPS60125727U (ja) 1984-02-02 1984-02-02 半導体材料のキヤリヤ用クレイドル

Country Status (1)

Country Link
JP (1) JPS60125727U (cs)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249504U (cs) * 1975-10-07 1977-04-08
JPS56150819A (en) * 1980-04-24 1981-11-21 Nec Kyushu Ltd Accomodating case of semicouductor substrate
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249504U (cs) * 1975-10-07 1977-04-08
JPS56150819A (en) * 1980-04-24 1981-11-21 Nec Kyushu Ltd Accomodating case of semicouductor substrate
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Also Published As

Publication number Publication date
JPH0525231Y2 (cs) 1993-06-25

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