JPS6179535U - - Google Patents

Info

Publication number
JPS6179535U
JPS6179535U JP16430384U JP16430384U JPS6179535U JP S6179535 U JPS6179535 U JP S6179535U JP 16430384 U JP16430384 U JP 16430384U JP 16430384 U JP16430384 U JP 16430384U JP S6179535 U JPS6179535 U JP S6179535U
Authority
JP
Japan
Prior art keywords
cradle
carrier
semiconductor material
wall portion
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16430384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452993Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984164303U priority Critical patent/JPH0452993Y2/ja
Publication of JPS6179535U publication Critical patent/JPS6179535U/ja
Application granted granted Critical
Publication of JPH0452993Y2 publication Critical patent/JPH0452993Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Drying Of Solid Materials (AREA)
JP1984164303U 1984-10-30 1984-10-30 Expired JPH0452993Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984164303U JPH0452993Y2 (cs) 1984-10-30 1984-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984164303U JPH0452993Y2 (cs) 1984-10-30 1984-10-30

Publications (2)

Publication Number Publication Date
JPS6179535U true JPS6179535U (cs) 1986-05-27
JPH0452993Y2 JPH0452993Y2 (cs) 1992-12-14

Family

ID=30722166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984164303U Expired JPH0452993Y2 (cs) 1984-10-30 1984-10-30

Country Status (1)

Country Link
JP (1) JPH0452993Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013135127A (ja) * 2011-12-27 2013-07-08 Shindengen Electric Mfg Co Ltd クレイドル、半導体ウェーハの水切り方法及び半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660596A (en) * 1979-10-23 1981-05-25 Mitsubishi Electric Corp Centrifugal hydroextractor
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5660596A (en) * 1979-10-23 1981-05-25 Mitsubishi Electric Corp Centrifugal hydroextractor
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013135127A (ja) * 2011-12-27 2013-07-08 Shindengen Electric Mfg Co Ltd クレイドル、半導体ウェーハの水切り方法及び半導体装置

Also Published As

Publication number Publication date
JPH0452993Y2 (cs) 1992-12-14

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