JPS60125086U - 半導体ウエハ−の搬送装置 - Google Patents

半導体ウエハ−の搬送装置

Info

Publication number
JPS60125086U
JPS60125086U JP1123184U JP1123184U JPS60125086U JP S60125086 U JPS60125086 U JP S60125086U JP 1123184 U JP1123184 U JP 1123184U JP 1123184 U JP1123184 U JP 1123184U JP S60125086 U JPS60125086 U JP S60125086U
Authority
JP
Japan
Prior art keywords
cylindrical body
transfer arm
semiconductor wafer
rotating shaft
wheel fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1123184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210072Y2 (enrdf_load_stackoverflow
Inventor
健一 小島
Original Assignee
株式会社　プラズマシステム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社　プラズマシステム filed Critical 株式会社　プラズマシステム
Priority to JP1123184U priority Critical patent/JPS60125086U/ja
Publication of JPS60125086U publication Critical patent/JPS60125086U/ja
Application granted granted Critical
Publication of JPS6210072Y2 publication Critical patent/JPS6210072Y2/ja
Granted legal-status Critical Current

Links

JP1123184U 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置 Granted JPS60125086U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1123184U JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1123184U JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Publications (2)

Publication Number Publication Date
JPS60125086U true JPS60125086U (ja) 1985-08-23
JPS6210072Y2 JPS6210072Y2 (enrdf_load_stackoverflow) 1987-03-09

Family

ID=30493158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1123184U Granted JPS60125086U (ja) 1984-01-30 1984-01-30 半導体ウエハ−の搬送装置

Country Status (1)

Country Link
JP (1) JPS60125086U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0283182A (ja) * 1988-09-16 1990-03-23 Tokyo Ohka Kogyo Co Ltd ハンドリングユニット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940502A (enrdf_load_stackoverflow) * 1972-08-18 1974-04-16
JPS58154085U (ja) * 1982-04-07 1983-10-14 横河電機株式会社 密封容器の操作機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940502A (enrdf_load_stackoverflow) * 1972-08-18 1974-04-16
JPS58154085U (ja) * 1982-04-07 1983-10-14 横河電機株式会社 密封容器の操作機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0283182A (ja) * 1988-09-16 1990-03-23 Tokyo Ohka Kogyo Co Ltd ハンドリングユニット

Also Published As

Publication number Publication date
JPS6210072Y2 (enrdf_load_stackoverflow) 1987-03-09

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