JPS60119904A - Cleaning brush - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a cleaning brush used for cleaning the surfaces of glass, various ceramics, gold scraps, etc.

[Prior art]

Generally, this type of cleaning brush has a brush made of animal hair or a large number of thin resin fibers, and the brush is rotated while coming into contact with the above-mentioned glass, ceramic, or metal surface. The surface of these various materials can be cleaned by moving it forward, backward, left and right.

By the way, many people skilled in the art recognize that when such a cleaning brush is considered from the viewpoint of cleaning efficiency, it cannot be said that the cleaning brush has excellent cleaning efficiency.

In other words, since such a cleaning brush simply scatters dirt and dust (collectively referred to as dust) attached to the various harmful substances mentioned above,
There is a high possibility that this scattered dust will adhere to the surface of the material again. In reality, such a phenomenon occurs that the scattered dust re-adheres to the material and reduces the efficiency of the cleaning operation.

Another major reason why the cleaning efficiency of such a cleaning brush cannot be improved is thought to be due to the so-called Coulomb force coupling between the above-mentioned interest and dust particles. In other words, if the above materials are specialized glasses or ceramics, they are often electrically charged (
In addition, the dust itself is often charged, and these materials and the dust are often unexpectedly strongly bonded by the Coulomb force. Therefore, with the above-mentioned cleaning method using this cleaning brush, it is difficult to completely remove the stains. Furthermore, the above-mentioned dust re-adhesion phenomenon is largely due to this Coulomb force.

As described above, it has been nearly impossible to completely remove dust adhering to the surfaces of the various materials mentioned above using the conventional cleaning brushes mentioned above, and this problem is especially common in cleaning brushes used in semiconductor mask cleaning machines. This is a serious problem, and some kind of countermeasure has been desired for its structure or cleaning method.

IObject of the Invention The object of the present invention is to solve the above-mentioned problems and provide a cleaning brush that can efficiently and completely remove any dust.

1 Configuration of the Invention 1 In order to achieve the above object, in this invention, the brush portion is constructed of a large number of thin fibrous conductors, which are appropriately grounded, and the brush is connected to the material surface i.
When brought into contact with this material, the electric charge existing on the surface of this material and the dust attached to it is automatically removed,
Furthermore, one or more holes are provided in a brush support (which is a conductor and the brush is actually grounded through this brush support) that supports the brush, and an appropriate enclosure is provided to surround the brush support from behind. A blowing device is provided via means to forcefully blow away the dust neutralized and removed by the brush to a distance through holes provided in the surrounding means and the brush support.

[Effects of the Invention] Therefore, according to the cleaning brush of the present invention, no matter what kind of material is to be cleaned or what kind of dust is stuck to it, this dust can be removed from the above-mentioned material. It can be removed effectively and efficiently without reprinting.

□ 1 example) An embodiment of the cleaning brush according to the present invention is not shown in the figure.

Firstly, the structure of the cleaning brush of this embodiment will be explained.

In the figure, ■ is a brush made of a large number of thin fibrous conductors, and 2 is a conductive brush support that maintains electrical continuity with the brush 1 and supports it. 2 is electrically grounded by a suitable grounding device VT3. In addition, the brush 1 is also integrally grounded via the support 2. Furthermore, the brush support 2 has a plurality of holes H as shown in the figure.
It has a structure that allows compressed air sent during the cleaning operation of the same embodiment brush, which will be described later, to pass therethrough. In the figure, reference numeral 4 denotes a housing that surrounds the brush support 2 from behind, and the other end of the housing 4 is mechanically connected to a compressed air device 6, which is a blower device, through a suitable pipe 5. There is. In addition, 7 in the figure is a filter, and as shown in the figure, it functions to remove dust contained in the compressed air sent during the cleaning operation of the brush of the same embodiment by intervening in the pipe 5. Note that Cb) in the same figure shows the above brush 1.
The structure shown in FIG. This corresponds to the part of

Next, a cleaning operation using the cleaning brush of this embodiment will be explained.

First, as an operation when using this cleaning brush, the compressed air device 6 is driven. Air blowing starts from this point, and the air around the brush 1 and the air in the housing 4 and tube 5 rapidly flow in the manner shown by the broken line arrows in FIG. Subsequently, in operation r, the brush 1 is brought into contact with the surface of the material to be cleaned (not shown), and the brush 1 is moved appropriately to remove dust attached to the surface.

As a result, even if the material or dust is electrically charged, as soon as the brush 1 comes into contact with the surface of the material, this electrical charge is automatically grounded and the brush 1
This makes it easier for the dust to be transported by the brush 1.
Due to the above-mentioned movement and the above-mentioned air blowing by the compressed air unit fFt6, the static-eliminated dust is easily removed from the surface of the material and blown away.

Of course, once the dust has been collected, there is a very small possibility that it will re-adhere to the surface of the workpiece.

In this embodiment, the compressed air device 6 is used as the blowing device, but any other device having the same blowing function may be used.

Further, the number and size of the holes H provided in the brush support 2 may be arbitrarily determined, and the present invention can be realized even with at least one hole.

Further, in this embodiment, the filter 7 is used to clean the compressed air itself, but the present invention can also be realized with a configuration in which the filter 7 is omitted.

Furthermore, the manner in which the housing 4 and the compressed air device 6 are connected is arbitrary, and is not limited to the configuration shown in the drawings.

[Brief explanation of drawings]

The figure is a schematic diagram showing the structure of an embodiment of the cleaning brush according to the present invention. L...Brush, 2...Brush support, 3...Grounding device, 4...Housing, 5...Pipe, 6...Compressed air device, 7...Filter, H...Hole rudder乍Ne 111 Main gate (method) Director General of the Patent Office 1, Indication of the case 1981 Special Revision Application No. 226436 2, Name of the invention) Dispute brush 3, Person making the amendment A'1 Which relationship Patent r1 application Person Fuji Xerox Co., Ltd. 4, Agency Law (6th floor, Ginza Daisaku Building, 2-11-2 Ginza, Chuo-ku, Tokyo 104) Telephone: 03-545-3508 (Representative) February 8, 1980 (Shipping date: 1982) (February 28, 2016) 6. Detailed explanation column of the defense of specification subject to amendment No. 1 and brief explanation column J-3 and drawing 7, Contents of amendment (1) Page 5 of the specification In the 6th line, ``In the figure,'' should be corrected to ``In Figure 1.'' (2) "In the figure," in line 10 of 5-('-ji)
Correct the statement to "In Figure 1." (3) In the 7th line of the 6th page of the same page, [In addition, in the same figure (b), "
The statement should be corrected to ``In addition, Figure (b) is''. (4) In the 9th line of the 6th page of the same page, the words "in this figure (b)" are corrected to "in this figure 1 (b)". (5) In the 17th line of the 6th page of the same page, the words ``Each figure (-)'' should be corrected to ``Each figure 1 (-)''. (6) In the 8th line of the 8th page of the same page, the phrase “Figure is” was replaced with “1st
The figure has been corrected to ``.

Claims (1)

[Claims] A brush made of a large number of thin fibrous conductors, a conductive brush support that maintains electrical continuity with the brush and supports it, and has one or more holes in the gap, and the brush means for grounding the support; a surrounding means for surrounding the brush support from behind; and a means for preventing dust that has been neutralized or removed by the brush from being blown away through the surrounding means and the holes in the brush support. A cleaning brush equipped with an air blower.