JPS6341566B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning brush used for cleaning the surfaces of glass, various ceramics, metals, and the like.

[Prior art]

Generally, this type of cleaning brush has a brush made of animal hair or a large number of thin resin fibers, and the brush is made of the above-mentioned glass, ceramics, etc.
Or rotate it by contacting the surface of metal etc.
Alternatively, the surface of these various materials can be cleaned by moving it back and forth and left and right.

By the way, many people skilled in the art recognize that when such a cleaning brush is considered from the viewpoint of cleaning efficiency, it cannot be said that the cleaning brush has excellent cleaning efficiency.

In other words, since such a cleaning brush simply scatters dirt and dust (collectively referred to as dust) attached to the above-mentioned various materials, this scattered dust is returned to the above-mentioned materials. There is a high possibility that it will adhere to the material surface. In reality, such a phenomenon occurs that the scattered dust re-adheres to the material and reduces the efficiency of the cleaning operation.

Another major reason why the cleaning efficiency of such a cleaning brush cannot be improved is considered to be the combination of the above-mentioned materials and dust due to so-called Coulomba. In other words, when the above-mentioned materials are particularly glass or ceramics, they are often electrically charged (sometimes charged due to friction with the brushes), and the dust itself is also electrically charged. After all, these materials and dust are often unexpectedly strongly combined by the Coulomba. Therefore, it is difficult to completely remove the same dust by the above-mentioned cleaning method using this cleaning brush. Further, the above-mentioned phenomenon of re-deposition of dust is largely due to this coulomba.

As described above, it is nearly impossible to completely remove dust adhering to the surfaces of the various materials described above using the conventional cleaning brushes described above. In particular, this problem is serious in cleaning brushes used in semiconductor mask cleaning machines, etc., and some kind of countermeasure has been desired for the structure or cleaning method.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a cleaning brush that can efficiently and completely remove any dust.

[Structure of the invention]

In order to achieve the above object, the present invention comprises a portion of the brush made of a large number of thin fibrous conductors, which are appropriately grounded, so that when the brush is brought into contact with the surface of the material, The electric charge present on the material surface and the dust adhering to it is automatically removed, and the brush support (which is a conductor and is actually a conductor and is in fact grounded through which the brush is grounded) supports the brush. One or more holes are provided in the brush support, and a blower is provided behind the brush support so that the dust that has been neutralized by the brush is forcibly blown away through the holes provided in the brush support. Make it.

〔Effect of the invention〕

Therefore, according to the cleaning brush of the present invention, the dust adhering to the material is neutralized and blown away by the blower, so that this dust can be effectively and highly efficiently removed without re-adhering to the material. I can do it.

〔Example〕

FIG. 1 shows an embodiment of a cleaning brush according to the present invention.

First, the structure of the cleaning brush of this embodiment will be explained.

In FIG. 1, 1 is a brush made of a large number of thin fibrous conductors, and 2 is a conductive brush support that maintains electrical continuity with the brush 1 and supports it. The support 2 is electrically grounded by a suitable grounding device 3. That is, the brush 1 is also integrally grounded via the support 2. Furthermore, the brush support body 2 has a plurality of holes H as shown in the same figure, and has a structure through which compressed air is sent during the cleaning operation of the brush of the same embodiment, which will be described later. In the figure, reference numeral 4 denotes a housing that surrounds the brush support 2 from behind, and the other end of the housing 4 is mechanically connected to a compressed air device 6, which is a blower device, through a suitable pipe 5. There is. Further, 7 in the figure is a filter, which is interposed in the tube 5 as shown in the figure, and functions to remove dust contained in the compressed air sent during the cleaning operation of the brush of the same embodiment, which will be described later. In addition, Fig. 1b is
This figure shows the structure of the brush 1 and the brush support 2 viewed from the bottom, and A-A in FIG.
The cross-sectional structure along the line corresponds to the brush 1 and brush support 2 shown in FIG.

Next, a cleaning operation using the cleaning brush of this embodiment will be explained.

First, as an operation when using this cleaning brush, the compressed air device 6 is driven. This starts blowing air, and the air around the brush 1 and the air inside the housing 4 and tube 5 are pumped as shown in Figure 1a.
It flows rapidly in the manner shown by the dashed arrow. As a subsequent operation, the brush 1 is brought into contact with the surface of the material to be cleaned (not shown), and the brush 1 is moved appropriately to remove dust adhering to the surface. As a result, even if the material or dust is electrically charged, as soon as the brush 1 comes into contact with the surface of the material, this electrical charge is automatically grounded, and the dust is removed by the brush 1. It becomes easy to transport, and furthermore, by the above-mentioned movement of the brush 1 and the above-mentioned air blowing by the compressed air device 6, the static-eliminated dust can be easily removed from the surface of the material and blown away. becomes. Of course, once the dust has been collected, the possibility that it will re-deposit on the material surface is extremely small.

In this embodiment, the compressed air device 6 is used as the blowing device, but any other device having the same blowing function may be used.

Further, the number and size of the holes H provided in the brush support 2 may be arbitrarily determined, and the present invention can be realized even with at least one hole.

Further, in this embodiment, the filter 7 is used to clean the compressed air itself, but it is also possible to realize the present invention with a configuration in which the filter 7 is omitted.

Furthermore, the manner in which the housing 4 and the compressed air device 6 are connected is arbitrary, and is not limited to the configuration shown in the drawings.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing the construction of an embodiment of a cleaning brush according to the present invention. DESCRIPTION OF SYMBOLS 1... Brush, 2... Brush support body, 3... Grounding device, 4... Housing, 5... Pipe, 6... Compressed air device, 7... Filter, H... Hole.

Claims (1)

[Scope of Claims] 1. A brush consisting of a large number of thin fibrous conductors, supporting the brush by maintaining electrical continuity with the brush, and having one or more holes in the gaps between the brushes. A cleaning brush comprising: an electrically conductive brush support; means for grounding the brush support; and an air blower for blowing away dust that is neutralized by the brush through holes in the brush support.