JPS60117533A - Image display device of scanning type analyzer - Google Patents

Abstract

PURPOSE:To transfer an output data of computer to the CRT in order to display as an image by providing a memory which stores data signal as much as the one scanning line of CRT of a display device with analyzer. CONSTITUTION:A sample 5 is irradiated with electron beam of the scanning type electron microscope and is then scanned by a scanning circuit S. The secondary electron image is displayed on a CRT15 and simultaneously the data processed by a computer 19 is displayed on the CRT21. In this case, a memory 22 which stores data signal as much as one scanning line of CRT15, an output signal of computer 19 for the next scanning line is stored in the memory of one channel during the period of retrace of the one scanning line of CRT15 and content of memory is read during the next scanning and then input to the CRT15. Thereby, an image processed by the computer 19 can be displayed on the CRT and its hard copy can be obtained easily.

Description

Detailed Description of the Invention A. Field of Industrial Application The present invention is applicable to devices such as electron beam microanalyzers, scanning electron microscopes, scanning Auger electron analyzers, ion microanalyzers, etc. that scan a sample surface for analysis. The present invention relates to an image display device for a scanning analyzer that has a function of displaying results as a two-dimensional image of a sample surface.

BACKGROUND OF THE INVENTION Recently, it has become common practice to combine various types of scanning analyzers such as those mentioned above with a computer, and have the computer perform data processing of analysis output and control the operation of the analyzer. I came. By the way, the various analysis devices mentioned above are equipped with high-quality image display devices due to their original functions. On the other hand, the computer combined with the analyzer is also attached with its own display device, so that operational instructions, analysis results, externally input data, etc. can be displayed. However, the display device attached to this computer is for visual viewing only and is not suitable for taking photographs.

Therefore, there was no way to obtain high-quality images of the analytical data obtained through a computer, and if the data was expressed in text or diagrams, a separate printer was used to print it out.

The present invention enables computer output data to be transferred to a display device attached to an analyzer and displayed as a high-quality image, and to display the computer output data alone or as an analysis image of a sample surface obtained by the analyzer. The aim is to obtain a hard copy of the computer's output data by superimposing it on the image and taking a photograph.

2. Since the display device attached to the configuration computer is for visual viewing, CR
T is scanned at a high speed of 1 frame l/30 seconds,
On the other hand, the CRT, which is a display device attached to an analyzer, scans at a low speed of about 1 second per frame in order to obtain high quality images. Therefore, even if the image signal applied to the CRT of the display device attached to the computer is applied to the CRT of the display device attached to the analyzer, the intended image will not be displayed.

Invention d, one or two channels of memory having a capacity capable of storing data signals for one scanning line of the CRT of the display device attached to the analyzer is provided, and the retrace period of one scanning line of the CRT of the display device attached to the analyzer is provided. During the scan, the computer's output data signal for the next scanning line is written into one channel of memory, and during the next scanning, the contents of the same memory are read out and transferred to the CRT (with the help of seven people or while scanning one scanning line). An example of using the memories of the two channels alternately as a buffer memory by reading the data for the next scanning line in the memory of the second channel, and reading the data for the next scanning line into the memory of the second channel while scanning the next scanning line. An image display device for a scanning analyzer is provided.

Example The figure shows a scanning electron microscope according to an embodiment of the present invention.

ko is an electron gun, 2 is an electron beam, 3 is a condenser lens,
Reference numeral 4 denotes an objective lens that focuses an electron beam onto the surface of the sample 5. An electron detector 6 detects secondary electrons emitted from the sample 5. 7 is X that makes the electron beam swing in the X direction
A deflection coil 8 is an X deflection coil that deflects the electron beam in the Y direction, and the direction in which one scanning line is drawn (horizontal scanning) is the X direction. A scanning circuit S supplies a scanning signal to the X deflection coil 7 and the X deflection coil 8. The same scanning signal is sent to the X deflection coil 13 of the CRT 15 attached to the scanning electron microscope.
It is also supplied to the deflection coil 14 to form a raster on the CRT display screen in synchronization with the scanning of the surface of the sample 5 by the electron beam 2, and the detection output of the detector 6 is sent to the CRTI 5 as a brightness signal via the amplifier 12. A secondary electron image of the surface of the sample 5 is formed on the CRT display surface. In this embodiment, the scanning circuit S
uses a digital system, in which the output pulses of the pulse oscillator 18 are counted by the counter 17, and the counted output is sent to the DA.
The converter 16 converts it into an analog signal, which is output as an X-direction scanning signal to the X deflection coil 7.15 via an amplifier 9.10. When the counter 17 reaches a predetermined count value, for example, 1024, it outputs a signal a, and the counter 17 itself is reset by this signal, and the signal is counted by the counter 17', and the output of the count is converted into an analog signal by the DA coverter 16'. It is converted into Y direction scanning signal (J
As X deflection coil 8! 〇]9 sent to ]' is a computer capable of receiving the output signal of the detector 6 through an interface 20, and performs various arithmetic processing on the received signal. 21 is a display CRT bent sideways to the computer 19; Reference numeral 22 denotes a RAM included in the computer 9, in which areas B1 and B2 are reserved for a two-channel buffer memory when output data from the computer is displayed on a CRT (CRT) of a scanning electron microscope. The CRT 15 is made up of about 1000 horizontal scanning lines, and the horizontal scanning lines are made up of ]000 pixels, and the gray level of the image is 1 byte (8 bits). -The memory capacity of the channel only needs to be IK bytes. The output pulse of the oscillator 18 and the signal -%a generated when the counter core reaches a predetermined number of times are sent to the computer 19 as external synchronizing signals. Furthermore, the data signal output from the computer 9 is sent to the DA converter 23-c.
−r is converted into an analog signal, superimposed with the detection signal of the detector 6 of the scanning electron microscope in the adder 24, and transmitted to the CRT.
], 5 as a luminance signal.

The operation when the data signal output from the computer 19 is displayed on the CRTI 5 of the display device on the side of the scanning electronic M microscope with the above configuration will be explained using the time chart shown in FIG. A in the figure is an X scanning signal. The counter 1'7 starts counting the output of the oscillator 18 at time tl, reaches a predetermined count value at time t2, and is reset. The signal issued at this time is the signal a explained in FIG. 1, and although it is not shown in FIG. A scanning signal is created. One flag is provided, and as shown in Figure 2 B and F, when this flag is O, the data of the B] channel is read out and sent to CRTI 5, and the data signal for the next scanning line is stored in the B2 channel. When one X-direction scan is completed and signal a is output, the flag is inverted. When the flag is 1, the data for the next scanning line is stored in the B1 channel, and the data in the B2 channel is read out and sent to the CRT], 5. Clear the counters that specify the addresses of both areas Bl, B2, count the output pulses of the oscillator for one day as counter 7 starts counting, and then specify the addresses of each channel of Bl and B2 to read and write data. do the following. The data read from channel B] or B2 of the RAM 22 in this way is immediately transferred to the CR' via the D/A converter 23.
The output data of the computer] 9 will be supplied to the CRT 1.5 in synchronization with the progress of the X-direction scan.

In the first embodiment, a two-channel memory was used as a buffer memory when transferring the output data signal of the computer 19 to the display device of the scanning electron microscope.
, H, the blanking period t2 of the X scanning signal ~
A one-channel buffer memory may be sufficient if data is written into the buffer during the scanning period tl' and read from the buffer during the scanning period t2. In this case, the data writing clock is not the output pulse of the oscillator 8, but a higher frequency internal clock of the computer 19, and the output pulse of the oscillator 18 is used only for the reading clock.

Effects According to the present invention, images processed by a computer and various other data can be displayed by the high-quality video display device on the analyzer side.・-Tokobee can be obtained in a cylinder at a low cost. In addition, various data related to the analysis obtained by the computer, such as a sample display and a photograph of the separated sample, are automatically obtained in addition to the analysis image produced by the analyzer.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing the configuration of an apparatus according to one embodiment of the present invention, and FIG. 2 is a time chart illustrating the operation of the same embodiment and another embodiment. 2... Electron beam, 5... Sample, 6... Detector,
7...X scanning coil, 8...X scanning coil, S...scanning circuit,] B5... CRT for scanning electron microscope, 19゛° computer, 20... interface, 21...
・・Computer CRT, 22・・RAM, B
],, B2. ,, -Memory channel for storing scanning line data at ~ time, 23...DA converter, 24
...Addition circuit. Agent Patent Attorney Kosuke Agata

Claims (1)

[Claims] One or two channels of memory with a capacity to store data signals for one scanning line of the CRT of the display device attached to the analyzer are provided, and during the retrace period of one scanning line of the CRT attached to the analyzer, the next scanning line can be stored. The computer output signal for -
Write to the memory of a channel and read the contents of the same memory in the next scan and input it to the above CRT, or read the data of one channel of the memory during one scan and input it to the above CR and T, and do the same. An image display device for a scanning analyzer in which a computer output signal for the next scanning line is written to another channel in between, and two channels of memory are used alternately.