JPS60116960A - Motion introducing device - Google Patents

Abstract

PURPOSE:To maintain the vacuum in a vacuum instrument at extremely high vacuum by covering a magnet exposed to the vacuum atmosphere in the vacuum instrument with a covering material. CONSTITUTION:An inner magnet 18 is fixed outside the inner yoke 17 is vacuum instrument, side plates 19, 20 are fitted to both ends of the inner yoke 17 and the inner magnet 18, a cylinder 21 is inserted outside the inner magnet 18, and the inner magnet 18 is cut off from the vacuum. Accordingly, the material adsorbed in holes of the inner magnet 18 is prevented from being discharged into the vacuum as gas, thus the extremely high vacuum can be maintained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a motion introduction device for vacuum equipment, and particularly to a motion introduction device suitable for vacuum equipment that handles ultra-high vacuum.

[Background of the invention].

2. Description of the Related Art Some vacuum devices in which a vacuum atmosphere is created are equipped with a motion introduction device in order to supply motion to a moving body inside the device. In order to maintain the degree of vacuum, this motion introducing device supplies power to the above-mentioned moving body through the magnetic action of a magnet placed in a vacuum atmosphere and a magnet in the atmosphere.

In this type of motion introduction device, a porous magnet is placed exposed in a vacuum. For this reason, there is a drawback that the substance absorbed on the surface of the pores of the magnet is released into the vacuum as gas, resulting in a decrease in the degree of vacuum.

[Purpose of the invention]

An object of the present invention is to provide a motion introduction device that emits less gas and is suitable for maintaining the vacuum in vacuum equipment at an ultra-high vacuum.

[Summary of the invention]

In order to achieve the above object, the present invention provides a power transmission member connected to a movable body in a vacuum device and a magnet in its housing, and drives the power transmission member by the attraction action of these magnets to drive the movable body. In the motion introduction device that supplies motion to the vacuum device, the magnet exposed to the vacuum atmosphere in the vacuum device is covered with a covering, and the substance adsorbed on the surface of the hole of the magnet is released into the vacuum as a gas. This is to prevent this and increase the degree of vacuum inside the vacuum equipment.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the motion introduction device of the present invention, in which a sealing cylinder l is attached by a flange 2 to a vacuum device at a port 1-.

The inside of the sealing cylinder l is exposed to vacuum. An outer yoke 4 is fixed to the inner periphery of the outer cylinder 3 with an adhesive or the like. An outer magnet 5 is fixed to the inside thereof with an adhesive or the like. Bearings 6 and 7 are mounted on both sides of the outer magnet 5 between the inner periphery of the outer cylinder 3 and the outer periphery of the seal cylinder 1. As a result, the outer cylindrical body 3 is rotatably attached to the seal cylinder 1.

The restraints 8 and 9 restrain the movement of the outer cylinder 3 in the axial direction. Bearings 11 and 12 are attached to the outer periphery of a shaft 10 that supplies motion to a moving body within the vacuum equipment and to the inner periphery of the seal cylinder 3. The bearing 12 is mounted inside the seal cylinder 1 via a collar 13.

Thereby, the shaft 10 is rotatably attached to the seal cylinder 1. The stoppers 14, 15 and the spacer 16 restrict the movement of the shaft 10 in the axial direction.

An inner yoke 17 is provided on the outer periphery of the shaft 10 between the bearings 11 and 12.
is provided. An inner magnet 18 is fixed to the outside thereof with an adhesive or the like. Side plates 19.20 attached to both ends of the inner yoke 17 and the inner magnet 18 are welded to the shaft 10, and a cylinder 21 is fitted on the outside of the inner magnet 18.
Its ends are welded to side plates 19,20. The inner magnet 18 is therefore attached to the shaft 10. Side plates 19, 20, cylinder 21
The inner magnet 18 is sealed and isolated from the vacuum, and the substance adsorbed on the surface of the hole in the inner magnet 18 is not released as gas into the vacuum. A drive shaft 22 is attached to one end of the outer cylindrical body 3 with a bolt or the like.

When this drive shaft 22 is driven by a motor or the like, the shaft lO rotates due to the attractive force between the outer magnet 5 and the inner magnet 18. At this time, gas release from the inner magnet 18 is prevented, so that the degree of vacuum within the vacuum equipment does not decrease.

In FIG. 1, the shaft 10, the side plates 1"9, 20, the cylinder 21
It is best to make it from a non-magnetic material such as 5US30.L or aluminum alloy, which releases less gas.

FIG. 2 shows another example of the coating of the inner magnet 18, in which the inner ring yoke shown in FIG. 1 is integrated with the shaft 23. In this case, village 123 is made of magnetic material,
The inner magnet 24 will be partially covered with a non-magnetic material. With this configuration, the same effect as in FIG. 1 is achieved.

FIG. 3 shows another embodiment of the apparatus of the present invention, and the inside is an embodiment in which linear motion is centered on a sliding body in a vacuum. The sealing cylinder 25 is bolted to the vacuum equipment by means of a flange 26. Seal circle 1rii 2
The inside of 5 is exposed to vacuum.

An outer yoke 28 is fixed to the inner periphery of the outer cylindrical body 27 with an adhesive or the like. An outer magnet 29 is fixed inside thereof with an adhesive or the like. An outer cylindrical body 27 is provided on both sides of the outer magnet 29.
Bearings 30 and 31 are provided between the inner circumference of the seal cylinder 25 and the outer circumference of the seal cylinder 25.
is attached, and the outer cylinder body 27 is attached to the seal cylinder 25 so as to be reciprocatable. The shaft 32 is attached to the seal cylinder 25 by bearings 33 and 34 provided between its outer periphery and the inner periphery of the seal cylinder 25 so that it can reciprocate. Stops 35, 36, 37, and 38 restrain the movement of the bearings 33, 34 that are carved into the sealing cylinder 25. bearing 33,
An inner yoke 39 is provided on the outer periphery of the shaft 32 between the inner yoke 34 and the inner yoke 39 . An inner magnet 40 is fixed to the outside thereof with an adhesive or the like. Side plates 41 and 42 located at both ends of the inner yoke 39 and the inner magnet 4o are welded to the 4III32. A cylinder 43 is fitted into the outside of the inner magnet 40 tb
, both ends of which are welded to the side plates 41,42. Therefore, the inner magnet 40 includes the shaft 32, the side plates 41 and 42, and the circle i.
Since the inner magnet 43 is sealed and isolated from the vacuum, the substance adsorbed to the pores of the inner magnet 40 will not become a gas and be released into the vacuum.

In the above-mentioned embodiment, the inner magnet was covered with a non-magnetic material, but as shown in FIG. The inner magnet 44 may be coated or sealed with a non-metallic coating film 45 such as Teflon. Furthermore, as shown in FIG.
may be adhered to the inner yoke 47 and sealed by providing a membrane 48 thereon in the same manner as shown in FIG. In the case of Koshira, the membrane that seals the inner magnet 44 can be made thinner, so
The distance to the outer magnet 29 can be shortened, and the force transmission capability can be increased.

〔Effect of the invention〕

As described above, according to the present invention, the permanent magnet, which is a porous body, can be isolated from the vacuum, and the substance adsorbed to the pores of the permanent magnet can be turned into gas and released into the vacuum. This has the effect of maintaining an ultra-high vacuum.

[Brief explanation of drawings]

Fig. 1 is a vertical sectional view showing one embodiment of the device of the present invention, Fig.
The figure is a vertical sectional view showing another example of the device of the present invention.
The figure is a longitudinal cross-sectional view showing another embodiment of the device of the present invention, and FIGS. 4 and 5 are longitudinal cross-sectional views showing examples of coating of magnets used in the device of the present invention. DESCRIPTION OF SYMBOLS 1... Seal cylinder, 3... Outer cylindrical body, 4... Outer yoke, 5... Outer magnet, 6, 7... Bearing, 10...
...Shaft, 11゜12...Bearing, 17...Inner yoke, 18...Inner magnet, I10 V2 Ro425 Jie60 Kaya4Nagi $5 Diagram

Claims (1)

[Claims] 1. A power transmission member connected to a movable body in a vacuum device and its housing are each provided with magnets, and the power transmission member is driven by the attraction action of these magnets, and the movable body is connected to the movable body. A motion introduction device for supplying motion, characterized in that a magnet exposed to a vacuum atmosphere within the vacuum device is covered with a covering. 2. The exercise introduction device according to claim 1, wherein the covering is a non-magnetic material. 3. The exercise introduction device according to claim 1, wherein the covering is a non-magnetic thin film.