JPS62281755A - Power inducer - Google Patents

Abstract

PURPOSE:To enable immediate confirmation of a state where power is not transmitted, by detecting a deviation in relative position of a driver from a follower magnet by means of a change of a line of magnetic force. CONSTITUTION:A guide cylinder 12 communicating with a vacuum chamber 11 is provided in this apparatus,a follower 13 composed of a magnet is slidably equipped in the inner part of this guide cylinder 12 and an interlocking bar 14 secured at one end to said follower 13 faces the vacuum chamber 14. An annular driver 15 composed of a magnet is slidably fitted to the outer periphery of the guide cylinder 12 so as to be opposed to the follower 13. If the follower 13 deviates by a given distance from a position in which it is regularly opposed to the driver 15, magnetic detecting means 21, 22 detect a change in magnetism to output a detection signal.

Description

[Detailed Description of the Invention] 3. Detailed Description of the Invention (Field of Industrial Application) This invention provides, for example,
This invention relates to a power introduction machine that introduces external power.

(Prior Art) A conventionally known power induction machine, as shown in FIG.
A driven magnet 3 is slidably housed inside the driven magnet 3, and an interlocking rod 4 is attached to the driven magnet 3, so that the interlocking rod 4 faces into the vacuum chamber 1. Further, an annular driving body 5 is slidably fitted onto the outer periphery of the guide cylinder 2, and the driving body 5 and the driven magnet body 3 are magnetically coupled.

Therefore, when the driver 5 is moved in the direction of the arrow 6,
The driven magnet body 3 moves following the movement of the driving body 5 due to magnetic force. Since the interlocking rod 4 moves with the movement of the driven magnet 3, the movement of the driver 5 is introduced into the vacuum chamber 1 via the interlocking rod 4.

Such a power introduction device is used, for example, in a vacuum processing apparatus that forms a thin film on a wafer, when transmitting power from outside the vacuum chamber to a transfer mechanism that transfers the wafer.

(Problems to be Solved by the Present Invention) When the power introduction machine is driven as described above, the load acting on the interlocking rod 4 is greater than the magnetic coupling force between the driven magnet 3 and the driving body 5. If this is too large, only the driving body 5 will move while the driven magnet 3 is stopped, as shown in Fig. 4. However, in conventional devices, it is not possible to check from the outside whether the driven magnet 3 is stopped or not. There was no way to judge.

Therefore, even if the driven magnet 3 stops and only the drive body 5 moves, it is often left unnoticed, but in this case, the following problem occurs.

For example, when a wafer is transferred to a predetermined location in the vacuum chamber 1 for sputtering, if only the driver 5 moves and the driven magnet 3 does not move, the transfer mechanism will not drive the wafer. As a result, the wafer may remain in one place or may not be transferred to the desired location. If the wafer remains in one place, the wafer will be sputtered more than necessary, and if the wafer is not transferred to the desired location, the vacuum chamber 1
There was a problem that the wall surface etc. of the wall surface became dirty due to the sputtering.

Also, if the interlock w54 does not work as described above, for example,
When a valve is provided during the transfer of the wafer, there is a problem in that the interlocking rod 4, which does not return to its original position, gets caught in the valve, making it impossible to close the valve.

Furthermore, in this conventional device, when the driving body 5 is composed of a magnet, if the opposing positions of the driving body 5 and the driven magnet 3 are shifted as shown in FIG. Since the same poles of the two face each other and they repel each other, there is a problem in that even if the excessive load that caused the failure is removed, the two do not return to their normal opposing positions.

In recent years, as unmanned operation of vacuum equipment has been put into practical use industrially, there is a tendency for the above-mentioned power induction machines to be incorporated into automatic equipment. In this case, it is common to detect the amount of movement of the driving body outside the vacuum and use this to control the movement inside, and in that case, the above drawbacks become serious drawbacks that affect the performance of the vacuum device. It is expected that.

An object of the present invention is to make it possible to confirm from the outside when the driven magnet body and the driving body have deviated from their normal opposing positions, thereby making it possible to prevent the above-mentioned problems. .

(Means for Solving the Problem) This invention provides a guide cylinder made of a non-magnetic material that communicates with the vacuum chamber at a required location of the vacuum chamber, and a driven member made of a magnetic material inside and outside of this guide cylinder. The driving body is fitted to the outside of the guide cylinder, and the driven body and the driving body are fitted together, at least one of the driven body and the driving body is a magnet, and the two are magnetically coupled by facing each other. In the power introduction machine configured to move the driven body fitted inside the guide tube by moving the drive body, by providing the drive body with a magnetic detection means for magnetically detecting the deviation of the facing position, The above objective has been achieved.

Note that the magnets used for the driven body and the driving body may be either permanent magnets or electromagnets.

(Operation of the present invention) When the relative positions of the driving body and the driven magnet body deviate from their normal opposing positions, the magnetic detection means detects a change in the lines of magnetic force, and this change is detected between the driving body and the driven body. It is understood as a positional deviation signal of the relative position of.

(Effects of the Invention) When the position where the driven body faces the driving body shifts, the position shift can be confirmed from the outside by the output signal of the magnetic detection means. Therefore, when only the driving body is moving and the driven body is stationary, in other words, when the relevant power is not being transmitted, it can be immediately confirmed, and various problems caused by the power not being transmitted can be avoided. Actions can be taken to prevent this.

(Embodiment of the present invention) In the embodiment of the present invention shown in FIG. 1, a guide tube 12 made of a non-magnetic material is provided in a vacuum chamber 11 of a vacuum processing apparatus for forming a thin film on a wafer and communicated therewith. This guide tube 1
A driven body 13 made of a magnet is slidably installed inside the vacuum chamber 2, and an interlocking rod 14 having one end fixed to the driven body 13 faces into the vacuum chamber 11.

On the other hand, an annular driving body 15 also made of a magnet is slidably engaged with the outer periphery of the guide tube 12, and this driving body 15 is opposed to the driven body 13. and,
The driven body 13 and the driving body 15 have magnets with different polarities at both ends so that they attract each other in normal opposing positions.

A support member 17.18 extending in the axial direction of the guide tube 12 is attached to the drive body 15 configured as described above, and a magnetic detection means 21 is attached to the tip of the support member 17.18.
．． 22 is installed.

This magnetic detection means 21, 22, as shown in FIG.
When the driven body 13 faces that position, the magnetism of the driven body 13 made of a magnet is detected and a detection signal is output. This type of magnetic detection means includes, for example, a reed pulse switch (trade name of Izumi Electric Co., Ltd., such as JS
Various types of magnetic sensors such as 12e type) are used.

Now, when the driving body 15 is moved, the driven body 13 is moved following it. Then, the interlocking rod 1 along with the driven body 13
4 moves, the power generated outside the vacuum chamber 11 is
It is guided into the vacuum chamber 11 through this interlocking rod 14.

At this time, when an overload occurs on the interlocking rod 14 and the driven body 13 deviates from the position where it normally faces the driving body 15 by a predetermined distance as shown in FIG. 2, the magnetic detection means 22 detects the magnetic fluctuation. and outputs a detection signal.

Based on this detection signal, it can be determined that the driven body 13 has shifted from the position facing the driving body 15, and necessary measures can be taken.

Therefore, problems such as vacuum processing such as thin film formation being performed without transferring the wafer to a predetermined position, and problems such as the valves pinching the interlocking rod 4, as in the prior art, can be prevented.

In the above embodiment, both the driving body 15 and the driven body 13 are made of permanent magnets, but the permanent magnet can be replaced with an electromagnet, or one of them may be made of a ferromagnetic material. . Furthermore, the direction of magnetization of the magnet may also be radial.

The shape of the driving body and the driven body is not limited to an annular or cylindrical shape, but may be an annular shape or a gear shape having a central part,
It may be one that can transmit rotational power.

Also, the location where the magnetic detection means is installed relative to the drive body is
In the embodiment, the drive body is provided at two locations, one at the front and one at the rear in the axial direction, separated from the driving body, but it may be sufficient to provide only one location at the front and rear sides. It may be provided in the central part of the driving body, for example, in the ring-off part or in the groove of the gear.

Furthermore, the mode of use of this power introducing machine is not limited to a wafer vacuum processing apparatus.

[Brief explanation of drawings]

Fig. 1.2 is a schematic sectional view of the embodiment, and Fig. 3.4 is a schematic sectional view of a conventional power induction machine. 11... Vacuum chamber, 13... Followed body, 15... Drive body 21.22... Magnetic detection means.

Claims (1)

[Claims] A guide tube made of a non-magnetic material is provided at a required location in the vacuum chamber and communicates with the vacuum chamber, and a driven body and a driving body made of a magnetic material are fitted inside and outside of this guide tube, and these driven bodies are fitted inside and outside the guide tube. At least one of the body and the driving body is a magnet, and the two are made to face each other and are magnetically coupled, and the driving body fitted on the outside of the guide cylinder is moved to fit inside the guide cylinder. A power introduction machine configured to move a driven body, characterized in that the drive body is provided with magnetic detection means for magnetically detecting a deviation in the opposing positions.