JPS6011640Y2 - 半導体拡散用ボ−ト - Google Patents

半導体拡散用ボ−ト

Info

Publication number
JPS6011640Y2
JPS6011640Y2 JP12255978U JP12255978U JPS6011640Y2 JP S6011640 Y2 JPS6011640 Y2 JP S6011640Y2 JP 12255978 U JP12255978 U JP 12255978U JP 12255978 U JP12255978 U JP 12255978U JP S6011640 Y2 JPS6011640 Y2 JP S6011640Y2
Authority
JP
Japan
Prior art keywords
boat
diffusion
holding
rod
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12255978U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5540539U (enExample
Inventor
佳三 萩本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP12255978U priority Critical patent/JPS6011640Y2/ja
Publication of JPS5540539U publication Critical patent/JPS5540539U/ja
Application granted granted Critical
Publication of JPS6011640Y2 publication Critical patent/JPS6011640Y2/ja
Expired legal-status Critical Current

Links

JP12255978U 1978-09-05 1978-09-05 半導体拡散用ボ−ト Expired JPS6011640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12255978U JPS6011640Y2 (ja) 1978-09-05 1978-09-05 半導体拡散用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12255978U JPS6011640Y2 (ja) 1978-09-05 1978-09-05 半導体拡散用ボ−ト

Publications (2)

Publication Number Publication Date
JPS5540539U JPS5540539U (enExample) 1980-03-15
JPS6011640Y2 true JPS6011640Y2 (ja) 1985-04-17

Family

ID=29080796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12255978U Expired JPS6011640Y2 (ja) 1978-09-05 1978-09-05 半導体拡散用ボ−ト

Country Status (1)

Country Link
JP (1) JPS6011640Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916943U (ja) * 1982-07-21 1984-02-01 日本軽金属株式会社 バルコニ−の真空管式太陽熱集熱装置
JPS60124036U (ja) * 1984-01-30 1985-08-21 ホ−ヤ株式会社 洗浄用治具

Also Published As

Publication number Publication date
JPS5540539U (enExample) 1980-03-15

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