JPS60113103A - Angle measuring device - Google Patents

Abstract

PURPOSE:To measure an angle easily with a high precision by arranging a reference block and an object to be measured on a rotary table close to each other and measuring the angle between two faces making a reference angle and the angle between two faces making the angle to be measured by an auto-collimator. CONSTITUTION:A reference block 2 where a reference angle alpha is made by two faces 2a and 2b and an object 3 to be measured where an angle theta to be measured is made by two faces 3a and 3b are arranged close to each other on a rotatable table 4, and an auto-collimator 1 is arranged on a base 5 on which the table 4 is placed, and the auto-collimator 1 is connected electrically to an operating device 14 and a display means 15, and a shutter 12 is arranged between the table 4 and the collimator 1 attachably and detachably and slidably. First, faces 2a and 3a are detected by the collimator 1 to obtain an angle theta1 between them, and next, the table is rotated at the angle alpha approximately, and an angle theta2 between faces 2b and 3b is obtained to calculate the angle theta in accordance with formula theta=alpha+theta1-theta2, and thus, close adhesion between faces 2b and 3a is unnecessary.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an angle measuring device, and particularly to an angle measuring device that can easily perform highly accurate measurements.

[Background of the invention]

One of the devices for measuring the angle of the object to be measured with high precision is the
There is one that uses an autocollimator as shown in the figure.

That is, a reference block 2 is placed opposite the autocollimator 1, and the object to be measured 3 is placed on this reference block 2.
It is designed to be measured by placing one side of it in close contact with the other side.

For example, if the angle 2C formed by the two surfaces 2a and 2L of the reference block 2 is α, the angle θ of the angle 3C formed by the two surfaces xa and 3b of the object to be measured 3 is Detection result θ of surface 2a of reference block 2 by 1
p and the detection result θW of the surface 5a of the object to be measured 3.

That is, from the detection results θp and θW, the inclination angle θ of the surface 3a of the object to be measured 3 with respect to the surface 2aK of the reference block 2 is determined.
, but .

Therefore, the angle θ of the angle 33 of the object to be measured 3 is θ=α+θ
・・・・・・・・・・・・・・・・・・・・・・・・
・・・・・・・・・・・・・・・・・・・・・(2) can be used.

In such a device, it is necessary that the surface 2b of the reference block 2 and the surface 3b of the object to be measured 3 are brought into close contact. Therefore, no foreign matter should be present between the surface 2b and the surface 3b. Further, the surface roughness of each of the surfaces 2b and 5b is 001 μm.
It is required that the mirror surface be less than fi and max.

Furthermore, even if these requirements are met, there are many practical disadvantages, such as the fact that it takes time for the surfaces 2b and 3b to be in close contact with each other to become stable.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide an angle measuring device that eliminates the above-mentioned drawbacks of the prior art and makes it possible to easily measure angles with high precision.

[Summary of the invention]

In order to achieve the above object, in the present invention, a reference block and an object to be measured are arranged close to each other, and two surfaces forming an angle to be measured of the object to be measured are formed with respect to two surfaces forming an angle serving as a reference of the reference block. A feature of the present invention is that rather than detecting the angle, the angle of the object to be measured is adjusted.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 2 shows the principle of the present invention, and the same parts as in FIG. 1 are designated by the same reference numerals.

4 in the figure is a rotatable table.

In the figure, a reference block 2 whose angle α has been measured in advance and an object to be measured 3 are placed on a table 4. At this time,
It is not necessary that the reference block 2 and the object to be measured 6 are in close contact with each other. First, as shown in FIG. 2(a), one surface 2a of the reference block 20 forming the angle α and one surface 3a of the object to be measured forming the angle θ to be measured are detected by the autocollimator 1. and the angle θ1 of the surface 3a with respect to the surface 2a
I put it on. Next, after rotating the table 4 by approximately the angle α, as shown in FIG. One surface 3b to be formed is detected by the autocollimator 1, and the angle θ of the surface 5b with respect to the surface 2bK is determined.
Get 2. Then, the angles α, θ8. Calculate the angle θ of the object to be measured 3 from θ.

That is, the angle θ is the detection result θp of the surface 2a of the reference block 2 and the measurement result θW of the surface 3a of the object to be measured 3.
, from , .

Similarly, the angle θ2 is the detection result θp of the surface 2b.
2 and the detection result θW2 of the surface 3a.

The angle θ of the object to be measured 6 to be measured is θ=α+0
1-θ2・・・・・・−・・・・・・・・・・・・・・・
・・・・・・・・・(3) can be concluded.

6 and 4 show the first embodiment of the present invention based on the above principle.
This is an example of the following. In this figure, the same parts as in FIG. 3 are designated by the same reference numerals. A stand 6 is arranged on the base 5. A shaft 7 is rotatably supported on the stand 6, and a table 4 is fixed to one end of the shaft 7.

A gear 8 is fixed to the other end of the shaft 7. A gear 9 that meshes with the gear 8 is supported by a rotating shaft of a motor 10 disposed within the stand 6.

A shutter 12 is installed on the rail 11 installed on the table 6.
is detachably and slidably supported.

A viewing optical system 1a is provided on the base 5 via a stand 13 so as to face the reference block 2 and the object to be measured 6 placed on the table 4 across the moving surface of the shutter 12. An autocollimator 1 is arranged. A computing device 14 electrically connected to the autocollimator 1 and a display device 15 electrically connected to the computing device 14 are placed on the base 5.

In the above configuration, with the shutter 12 removed from the rail 11, the reference block 2 and the object to be measured 5 are passed from the autocollimator 1 to the rail 11 as shown in FIG. 4(b), as shown in FIG. 4(b). The reference block 2 and the object to be measured 3 are placed on the table 4 so that they can be inspected at the same time. Next, as shown in FIG. 4(C)K, the rail 11
Attach a shutter 3 to remove the object to be measured 3 from the field of view of the autocollimator 1. Then, autocollimator 1 becomes
As shown in FIG. 4(d), the shutter 12 is
Slide the reference block 2 away from the field of view of the autocollimator 1. Then, as shown in FIG. 4(f), the autocollimator 1 removes the shutter 12 from the rail 11 at the coordinate point corresponding to the inclination of the surface 6a of the object to be measured 3, and then uses the observation optical system 1a to auto-collimator 1. While checking the field of view of the collimator 1, the motor 10 is operated to rotate the table 4. After each surface 2b, 3b (see FIG. 2) of the reference block 2 and the object to be measured 6 is within the field of view of the autocollimator 1, the rotation of the table 4 is stopped.

Then, in the same manner as described above, the arithmetic unit 14 of the coordinate points 2b' and 6b' corresponding to the inclinations of the respective surfaces 2b and 3b calculates the coordinate point 2a' that is applied from the autocollimator 1.
, 2i, l, 5b' coordinates The inclination angle θ1. Calculate θ2. Furthermore, this angle θ1. From θ2 and the angle α of the reference block 20 angle 2c (second visit 1), calculate the angle θ of the angle 3c (see Figure 2) of the object to be measured 5 to be measured based on the formula (b) above. do. Then, this calculation result is applied to the display device 15.

The display device 15 displays the value based on the calculation result obtained from the calculation circuit 14.

In the angle measuring device in the above embodiment, a right angle prism is used as the reference block, and the surface roughness is 0.3 μm R.
max, flatness 0.1μm, side length 5mm
As a result of measuring the squareness of the glass cube, it was possible to measure with a repeatability of 02' (this is the same repeatability as measurement using an optical autocollimator). Furthermore, even if the object to be measured was made of plastic or metal, it was possible to measure with similar accuracy.

FIG. 5 shows another embodiment of the present invention. In the same figure, parts equivalent to those in FIG. 3 are denoted by the same symbols as in FIG.
It is shown with .

A positioning protrusion 16 is formed on the table 4'. A hole 17 is formed on the side surface of this protrusion 16 for adsorbing the reference block 1 2' and the object to be measured 3'. It is connected to a vacuum source 21 via a through hole (not shown), a rotary joint 19 and a pipe 20. The other parts are the same as those in FIG. 3, so they are omitted.

In the above configuration, the reference block 2' and the object to be measured 6'
By suctioning and supporting the protrusion 16, the table 4'
It is possible to prevent a change in the relative position between the reference block 2' and the object to be measured 6' due to rotation or vibration of the reference block 2'.

Still, one face 2 forming the angle α of the reference block 2′
1c and one surface 5J forming an angle θ of the object to be measured 6'.
c can be easily positioned within the field of view of the autocollimator 1.

Note that the measurement method is the same as in the previous example, so the explanation will be omitted.

〔Effect of the invention〕

As described above, according to the present invention, it is not necessary to completely bring the reference block and the object to be measured into close contact with each other, so that the measurement time can be shortened.

Furthermore, since the measurement surface of the object to be measured does not need to be polished, the measurement range can be expanded.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an angle measuring method using a conventional autocollimator, FIG. 2 is a plan view showing an angle measuring method according to the present invention, and FIG. 6 is a plan view showing an example of an angle measuring device according to the present invention. 4 is a process diagram showing the process of measurement by the angle measuring device in FIG. 6 and the image reflected on the autocollimator. FIG. 5 is a diagram showing main parts of another embodiment of the present invention. (a) is a plan view, and (b) is a side view. 1... Autocollimator, 2... Reference block, 6... Measured object, 4... Table, 7... Axis, 8 .9... Gear, 10... Motor, 11... Rail, 12... Shutter, 14... Arithmetic device, 15... ...Display device. Part 1, Part 3, Part 4, Part 5, Part 5.

Claims (1)

[Scope of Claims] A reference block that serves as a reference for angle measurement, a rotatable table that supports the reference block in the center and places an object to be measured near the reference block, and an autocollimator that is arranged to face the reference block and the object to be measured, and detects the angle between two surfaces forming a reference corner of the reference block and two surfaces forming an angle to be measured of the object to be measured; a shutter that is removably disposed between the table and the autocollimator and switches the field of view of the autocollimator; and a shutter that is connected to the autocollimator and calculates the angle of the object to be measured based on the detection result applied from the autocollimator. Calculation means and this calculation. 1. An angle measuring device comprising: a display means connected to the calculation means and displaying a calculation result applied from the calculation means.