JPS60112462A - Thermal head - Google Patents

Thermal head

Info

Publication number
JPS60112462A
JPS60112462A JP58220556A JP22055683A JPS60112462A JP S60112462 A JPS60112462 A JP S60112462A JP 58220556 A JP58220556 A JP 58220556A JP 22055683 A JP22055683 A JP 22055683A JP S60112462 A JPS60112462 A JP S60112462A
Authority
JP
Japan
Prior art keywords
protective film
thermal head
heat
heating resistor
multilayer circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58220556A
Other languages
Japanese (ja)
Inventor
Takumi Suzuki
工 鈴木
Haruo Tanmachi
東夫 反町
Kiyoshi Sato
清 佐藤
Seiichi Yamada
山田 成一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58220556A priority Critical patent/JPS60112462A/en
Publication of JPS60112462A publication Critical patent/JPS60112462A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Abstract

PURPOSE:To enhance reliability and reduce the size of a device, by a method wherein an insulating protective film for a conductor provided at the uppermost layer of a multilayer circuit part is formed of the same abrasion-resistant material as that for a protective film for a heating resistor part, and a heat-resistant resin is applied to the protective film. CONSTITUTION:The heating resistor part A consisting of a multiplicity of heating resistors 11 for printing and the multilayer circuit part B of a driving circuit for impressing an electric pulse on selected ones of the heating resistors 11 are provided on a glazed alumina substrate 10. The protective film 15 functioning also as an abrasion-resisting film for the heating resistors 11 is provided on the heating resistor part A and the circuit part B, and a heat-resistant resin 16 is applied thereto to obtain a thermal head. In this thermal head, since the resin 16 penetrates also into pinholes present in the protective film 15, the water resistance of the film 15 is enhanced.

Description

【発明の詳細な説明】 発明の技術分野 本発明は電子計算装置等の出力装置として使用されるサ
ーマルプリンタのサーマルヘッドニ関スるものである。
DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a thermal head of a thermal printer used as an output device for an electronic computing device or the like.

技術の背景 サーマルヘッドは絶縁性基板の上に薄膜又は厚膜による
多数の発熱抵抗体を有し、所望の抵抗体に電気的パルス
を印加することによシ該抵抗体を発熱させ、感熱記録紙
に印字を行なうものである。
Background of the Technology A thermal head has a large number of thin-film or thick-film heating resistors on an insulating substrate, and generates heat by applying an electric pulse to a desired resistor, thereby recording heat. It prints on paper.

このサーマルヘッドは機械的可動部分がなく無騒音であ
るという特徴があるためサーマルプリンタに組込まれ事
務用電子機器等に用いられる。而してこれらの事務用電
子機器は近来小型化が進められており、従ってプリンタ
も小型化が要求されている。
This thermal head is characterized by having no mechanically moving parts and being noiseless, so it is incorporated into thermal printers and used in electronic office equipment and the like. In recent years, these office electronic devices have been becoming smaller, and printers are also required to be smaller.

従来技術と問題点 第1図は従来のミニプリンタのサーマルヘッドを説明す
るための図であり、同図において、1はグレーズドアル
ミナ基板、2は抵抗体、3は導体、4は樹脂による層間
絶縁層、5は最上層の導体、6は導体を保護するだめの
保護膜、7は印字を行なう発熱抵抗体部、8はその保護
膜、9はプラテンをそれぞれ示している。このサーマル
ヘッドは、ヘッドを小型にして一基板から多数枚のサー
マルヘッドを取ることを可能として、安価としたもので
あり印字を行なう薄膜型のヘッド部Aと、該ヘッド部を
駆動するための多層回路部Bとが同−基板上に形成され
ている。
Prior Art and Problems Figure 1 is a diagram for explaining the thermal head of a conventional mini printer. In the figure, 1 is a glazed alumina substrate, 2 is a resistor, 3 is a conductor, and 4 is an interlayer insulation made of resin. 5 is the uppermost conductor layer, 6 is a protective film for protecting the conductor, 7 is a heating resistor section for printing, 8 is the protective film, and 9 is a platen. This thermal head is made small and inexpensive by making it possible to take multiple thermal heads from one substrate. It has a thin film type head section A that performs printing, and a A multilayer circuit section B is formed on the same substrate.

このようなサーマルヘッドにおいて、小型化するため基
板1を小さくシ、ヘッド部Aと多層回路部Bとを接近さ
せると、多層回路部Bの最上層の保護膜6にプラテン9
とか印字用紙が接触し易くなり、このため樹脂を用いた
保護膜6が摩耗し導体5が露出して印字用紙から出る水
蒸気によって腐食され、断線、ショートなどの事故が発
生するという欠点があった。
In such a thermal head, if the substrate 1 is made smaller in order to reduce the size and the head part A and the multilayer circuit part B are brought closer together, the platen 9 is attached to the uppermost protective film 6 of the multilayer circuit part B.
The printing paper comes into contact easily, which causes the protective film 6 made of resin to wear out and the conductor 5 to be exposed and corroded by the water vapor emitted from the printing paper, resulting in accidents such as wire breakage and short circuits. .

発明の目的 本発明は上記従来の欠点に鑑み、信頼性の高い構造で小
形化したサーマルヘッドを提供することを目的とするも
のである。
OBJECTS OF THE INVENTION In view of the above-mentioned conventional drawbacks, it is an object of the present invention to provide a compact thermal head with a highly reliable structure.

発明の構成 そしてこの目的は本発明によれば、多数の発熱抵抗体を
有する発熱抵抗体部と、該発熱抵抗体に電気的パルスを
印加するための回路の多層回路部とが同一絶縁性基板上
に設けられたサーマルヘッドにおいて、前記多層回路部
の最上層の導体の絶縁保護膜を発熱抵抗体部の保護膜と
同一の耐磨耗性のある材料で形成し、さらに該保護膜の
上に耐熱性樹脂を塗布したことを特徴とするサーマルヘ
ッドを提供することによって達成される。
According to the present invention, a heating resistor portion having a large number of heating resistors and a multilayer circuit portion of a circuit for applying electrical pulses to the heating resistors are formed on the same insulating substrate. In the thermal head provided above, the insulating protective film of the uppermost conductor of the multilayer circuit section is formed of the same abrasion-resistant material as the protective film of the heating resistor section, and This is achieved by providing a thermal head characterized by coating a heat-resistant resin on the thermal head.

発明の実施例 以下、本発明実施例を図面によって詳述する。Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.

第2図は本発明によるサーマルヘッドを説明するだめの
図であり、10はグV−ズドアルミナ基板、Aは発熱抵
抗体部、Bは多層回路部、11は発熱抵抗体、12は1
層目の導体、13はポリイミド樹脂を用いた層間絶縁層
、14は最上層の導体、15は保護膜、16は耐熱性樹
脂、17はプラテンをそれぞれ示している。
FIG. 2 is a diagram for explaining the thermal head according to the present invention, in which 10 is a grated alumina substrate, A is a heating resistor section, B is a multilayer circuit section, 11 is a heating resistor, and 12 is a 1
13 is an interlayer insulating layer using polyimide resin, 14 is an uppermost conductor, 15 is a protective film, 16 is a heat-resistant resin, and 17 is a platen.

本実施例は第2図に示す如くダレーズドアルミナ基板1
0の上に印字を行なうための多数の発熱抵抗体11よシ
なる発熱抵抗体部Aと、該発熱抵抗体を選択して電気的
パルスを印加するための駆動回路の多層回路部Bが形成
されており、該発熱抵抗体部Aと多層回路部Bの上に発
熱抵抗体11の耐磨耗を兼ねた保護膜15を形成し、(
この場合の保護膜15の密着は最上層導体14がCr−
Cu−Crの構成なので問題はなく、またCuを3〜4
戸と厚く蒸着あるいはスパッタにて形成するため電気抵
抗値も従来のめつき法によるものと差はない。)さらに
その上に耐熱性樹脂16を塗布したものである。なおこ
の耐熱性樹脂16の塗布は第3図の如く、保護膜の形成
まで行なった基板20を低真空のチャンバー21に入れ
たまま耐熱性樹脂16(例えばポリイミド樹脂)の中に
浸漬し、その状態でチャンバを常圧に戻したのち引上げ
るのである。
In this embodiment, as shown in FIG.
A heating resistor part A including a large number of heating resistors 11 for printing on the 0, and a multilayer circuit part B of a drive circuit for selecting the heating resistors and applying electric pulses are formed. A protective film 15 is formed on the heat generating resistor part A and the multilayer circuit part B, which also serves as wear resistance for the heat generating resistor 11.
In this case, the adhesion of the protective film 15 is such that the uppermost layer conductor 14 is made of Cr-
Since it is a Cu-Cr composition, there is no problem, and if Cu is 3 to 4
Since it is formed thickly by vapor deposition or sputtering, there is no difference in electrical resistance from conventional plating methods. ) A heat-resistant resin 16 is further applied thereon. The heat-resistant resin 16 is applied by immersing the substrate 20, on which the protective film has been formed, in the heat-resistant resin 16 (for example, polyimide resin) while keeping it in a low-vacuum chamber 21, as shown in FIG. After returning the chamber to normal pressure, it is lifted out.

このように形成された本実施例は、耐熱性樹脂16が保
護膜15の中にあるピンホールの中にも浸透するため、
保護膜の耐水性が向上する。また耐熱性樹脂16の下の
保護膜15は耐磨耗性がある友め、図の如く発熱抵抗体
部Aと多層回路部Bとを近ずけて多層回路部Bがプラテ
ン17と多少接触しても導体14が露出することはなく
、従って小型化することができる。なお発熱抵抗体部A
上の耐熱性樹脂は使用中にプラテン17によって削り取
られるが本来耐熱性樹脂は8袈としない部分であるので
差支えない。
In this embodiment formed in this way, the heat-resistant resin 16 penetrates into the pinholes in the protective film 15, so
The water resistance of the protective film is improved. In addition, the protective film 15 under the heat-resistant resin 16 is abrasion-resistant, so as shown in the figure, the heating resistor part A and the multilayer circuit part B are brought close together so that the multilayer circuit part B comes into some contact with the platen 17. Even if the conductor 14 is exposed, the conductor 14 is not exposed, so the size can be reduced. Note that the heating resistor part A
The upper heat-resistant resin is scraped off by the platen 17 during use, but this is not a problem since the heat-resistant resin is originally not included in the portion.

第4図は他の実施例を説明するための図であり、第2図
の前実施例と同一部分は同一符号を付して示した。本実
施例が前実施例と異なるところは図の如く先に共通部分
を形成し層間絶縁層13としてガラスを用い強度を高め
て、その上にファインパターン形成したものである。
FIG. 4 is a diagram for explaining another embodiment, and the same parts as in the previous embodiment shown in FIG. 2 are denoted by the same reference numerals. This embodiment differs from the previous embodiment in that, as shown in the figure, a common portion is first formed, glass is used as the interlayer insulating layer 13 to increase the strength, and a fine pattern is formed thereon.

このように形成された本実施例は、前実施例と同様の効
果を有する上、さらにガラス絶縁体上にICやダイオー
ドを搭載できるため、それらの交換が容易となるといっ
た利点がある。
This embodiment formed in this manner not only has the same effects as the previous embodiment, but also has the advantage that ICs and diodes can be mounted on the glass insulator, making it easy to replace them.

発明の効果 以上、詳細に説明したように本発明によるサーマルヘッ
ドは、多層回路部の最上層の絶縁保護膜に発熱抵抗体部
の保護膜と同一の耐磨耗性のある材料を用い、さらにそ
の上に耐熱性塗料を塗布して耐水性を付与することによ
り、プラテンあるいは用紙との接触による磨耗と水蒸気
による導体の腐食を防止可能とし、それにより信頼性の
向上と小型化が実現されるといった効果大なるものであ
る。
Effects of the Invention As explained in detail above, the thermal head according to the present invention uses the same abrasion-resistant material as the protective film of the heating resistor part for the uppermost insulating protective film of the multilayer circuit part, and further By applying heat-resistant paint on top of it to make it water resistant, it is possible to prevent abrasion caused by contact with the platen or paper and corrosion of the conductor due to water vapor, thereby achieving improved reliability and miniaturization. This is a great effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のミニプリンタのサーマルヘッドを説明す
るための図、第2図は本発明によるサーマルヘッドを説
明するための図、第3図は耐熱性樹脂の塗布方法を説明
するための図、第4図は本発明によるサーマルヘッドの
他の実施例を説明するための図である。 図面において、A・・・発熱抵抗体部、B・・・多層回
路部、10・・・グレーズドアルミナ基板、11・・・
発熱抵抗体、12・・・1層目導体、13・・・層間絶
縁層、14・・・最上層の導体、15・・・保護膜、1
6・・・耐熱性樹脂、17・・・プラテンをそれぞれ示
す。 特許出願人 富士通株式会社 特許出願代理人 弁理士 青 木 朗 弁理士 西舘和之 弁理士 内田幸男 弁理士 山 口 昭 之 (力 第1図 A B 第2図 八B
Fig. 1 is a diagram for explaining the thermal head of a conventional mini printer, Fig. 2 is a diagram for explaining the thermal head according to the present invention, and Fig. 3 is a diagram for explaining the method of applying heat-resistant resin. , FIG. 4 is a diagram for explaining another embodiment of the thermal head according to the present invention. In the drawings, A... heating resistor section, B... multilayer circuit section, 10... glazed alumina substrate, 11...
Heat generating resistor, 12... First layer conductor, 13... Interlayer insulating layer, 14... Top layer conductor, 15... Protective film, 1
6... Heat-resistant resin, 17... Platen, respectively. Patent applicant Fujitsu Ltd. Patent agent Akira Aoki Patent attorney Kazuyuki Nishidate Patent attorney Yukio Uchida Patent attorney Akira Yamaguchi (Figure 1A B Figure 2 8B)

Claims (1)

【特許請求の範囲】[Claims] 1、多数の発熱抵抗体を有する発熱抵抗体部と、該発熱
抵抗体に電気的パルスを印加するための多層回路部とが
同一絶縁性基板上に設けられたサーマルヘッドにおいて
、前記多層回路部の最上層の導体の絶縁保護膜を発熱抵
抗体部の保護膜と同一の耐磨耗性のある材料で形成し、
さらに該保護膜の上に耐熱性樹脂を塗布したことft%
徴とするサーマルヘッド0
1. In a thermal head in which a heating resistor section having a large number of heating resistors and a multilayer circuit section for applying electrical pulses to the heating resistors are provided on the same insulating substrate, the multilayer circuit section The insulating protective film of the top layer of the conductor is made of the same abrasion-resistant material as the protective film of the heating resistor part,
Furthermore, a heat-resistant resin is applied on top of the protective film (ft%).
Signal thermal head 0
JP58220556A 1983-11-25 1983-11-25 Thermal head Pending JPS60112462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58220556A JPS60112462A (en) 1983-11-25 1983-11-25 Thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58220556A JPS60112462A (en) 1983-11-25 1983-11-25 Thermal head

Publications (1)

Publication Number Publication Date
JPS60112462A true JPS60112462A (en) 1985-06-18

Family

ID=16752842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58220556A Pending JPS60112462A (en) 1983-11-25 1983-11-25 Thermal head

Country Status (1)

Country Link
JP (1) JPS60112462A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7990405B2 (en) 2008-08-29 2011-08-02 Canon Kabushiki Kaisha Thermal head and thermal printer
JP2012061778A (en) * 2010-09-17 2012-03-29 Toshiba Hokuto Electronics Corp Thermal print head and thermal printer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7990405B2 (en) 2008-08-29 2011-08-02 Canon Kabushiki Kaisha Thermal head and thermal printer
JP2012061778A (en) * 2010-09-17 2012-03-29 Toshiba Hokuto Electronics Corp Thermal print head and thermal printer

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