JPS6011109A - 電磁超音波測定装置 - Google Patents

電磁超音波測定装置

Info

Publication number
JPS6011109A
JPS6011109A JP58118145A JP11814583A JPS6011109A JP S6011109 A JPS6011109 A JP S6011109A JP 58118145 A JP58118145 A JP 58118145A JP 11814583 A JP11814583 A JP 11814583A JP S6011109 A JPS6011109 A JP S6011109A
Authority
JP
Japan
Prior art keywords
measured
transducers
measuring device
measurement
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58118145A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02645B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Koji Kagaya
加賀谷　幸司
Mitsuo Yoneda
光生 米田
Kunio Takahashi
邦男 高橋
Masao Tsuda
津田　正夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Nippon Steel Corp filed Critical Mitsubishi Electric Corp
Priority to JP58118145A priority Critical patent/JPS6011109A/ja
Publication of JPS6011109A publication Critical patent/JPS6011109A/ja
Publication of JPH02645B2 publication Critical patent/JPH02645B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP58118145A 1983-07-01 1983-07-01 電磁超音波測定装置 Granted JPS6011109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58118145A JPS6011109A (ja) 1983-07-01 1983-07-01 電磁超音波測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58118145A JPS6011109A (ja) 1983-07-01 1983-07-01 電磁超音波測定装置

Publications (2)

Publication Number Publication Date
JPS6011109A true JPS6011109A (ja) 1985-01-21
JPH02645B2 JPH02645B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09

Family

ID=14729187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58118145A Granted JPS6011109A (ja) 1983-07-01 1983-07-01 電磁超音波測定装置

Country Status (1)

Country Link
JP (1) JPS6011109A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62161048A (ja) * 1986-01-10 1987-07-17 Hitachi Ltd 電磁超音波計測装置
US5160398A (en) * 1989-11-17 1992-11-03 Sony Corporation Etching method and apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62161048A (ja) * 1986-01-10 1987-07-17 Hitachi Ltd 電磁超音波計測装置
US5160398A (en) * 1989-11-17 1992-11-03 Sony Corporation Etching method and apparatus
US5314575A (en) * 1989-11-17 1994-05-24 Sony Corporation Etching method and apparatus

Also Published As

Publication number Publication date
JPH02645B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-09

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