JPS6011076U - probe device - Google Patents

probe device

Info

Publication number
JPS6011076U
JPS6011076U JP10370883U JP10370883U JPS6011076U JP S6011076 U JPS6011076 U JP S6011076U JP 10370883 U JP10370883 U JP 10370883U JP 10370883 U JP10370883 U JP 10370883U JP S6011076 U JPS6011076 U JP S6011076U
Authority
JP
Japan
Prior art keywords
probe
probe device
transmission line
signal transmission
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10370883U
Other languages
Japanese (ja)
Inventor
古塚　岐
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP10370883U priority Critical patent/JPS6011076U/en
Publication of JPS6011076U publication Critical patent/JPS6011076U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の高周波測定用の探針装置の一部断面斜視
図、第２図は本考案の一実施例を示す探針装置の斜視図
である。 １１・・・・・・誘電体基板、１２１・・・・・・マイ
クロストリップ線路、１２２・・・・・・接地用導体、
１３・・・・・・裏面接地導体、１４・・・・・・針、
２１・・・・・・筐体、３１・・・・・・同軸接栓。FIG. 1 is a partial cross-sectional perspective view of a conventional probe device for high frequency measurement, and FIG. 2 is a perspective view of a probe device showing an embodiment of the present invention. 11...Dielectric substrate, 121...Microstrip line, 122...Grounding conductor,
13... Back ground conductor, 14... Needle,
21... Housing, 31... Coaxial plug.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）信号伝送線路の一端に接続され、被測定物に電気
的に接触させる高周波測定用の探針を備えた探針装置に
おいて、信号伝送線路に対し、探針を含んで少なくとも
測定周波数でインピーダンス整合する回路、若しくは回
路素子を設けたことを特徴とする探針装置。(1) In a probe device equipped with a high-frequency measurement probe that is connected to one end of a signal transmission line and brought into electrical contact with the object to be measured, the signal transmission line, including the probe, is A probe device characterized by being provided with an impedance matching circuit or circuit element. （２）前記信号伝送線路と探針との接続部の近傍に、前
記インピーダンス整合する回路、′若しくは回路素子を
設置したことを特徴とする実用新案登録請求の範囲第１
項記載の探針装置。(2) Utility model registration claim 1, characterized in that the impedance matching circuit, ' or circuit element is installed near the connection between the signal transmission line and the probe.
Probe device as described in section.
JP10370883U 1983-07-04 1983-07-04 probe device Pending JPS6011076U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10370883U JPS6011076U (en) 1983-07-04 1983-07-04 probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10370883U JPS6011076U (en) 1983-07-04 1983-07-04 probe device

Publications (1)

Publication Number Publication Date
JPS6011076U true JPS6011076U (en) 1985-01-25

Family

ID=30243832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10370883U Pending JPS6011076U (en) 1983-07-04 1983-07-04 probe device

Country Status (1)

Country Link
JP (1) JPS6011076U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006308528A (en) * 2005-05-02 2006-11-09 Asahi Kasei Microsystems Kk Probe card

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006308528A (en) * 2005-05-02 2006-11-09 Asahi Kasei Microsystems Kk Probe card

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