JPS5997049A - 半導体湿度センサ装置 - Google Patents

半導体湿度センサ装置

Info

Publication number
JPS5997049A
JPS5997049A JP57208103A JP20810382A JPS5997049A JP S5997049 A JPS5997049 A JP S5997049A JP 57208103 A JP57208103 A JP 57208103A JP 20810382 A JP20810382 A JP 20810382A JP S5997049 A JPS5997049 A JP S5997049A
Authority
JP
Japan
Prior art keywords
region
transistor
semiconductor
humidity sensor
sensor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57208103A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0242192B2 (enrdf_load_html_response
Inventor
Masakazu Nakabayashi
正和 中林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57208103A priority Critical patent/JPS5997049A/ja
Publication of JPS5997049A publication Critical patent/JPS5997049A/ja
Publication of JPH0242192B2 publication Critical patent/JPH0242192B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP57208103A 1982-11-25 1982-11-25 半導体湿度センサ装置 Granted JPS5997049A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57208103A JPS5997049A (ja) 1982-11-25 1982-11-25 半導体湿度センサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57208103A JPS5997049A (ja) 1982-11-25 1982-11-25 半導体湿度センサ装置

Publications (2)

Publication Number Publication Date
JPS5997049A true JPS5997049A (ja) 1984-06-04
JPH0242192B2 JPH0242192B2 (enrdf_load_html_response) 1990-09-20

Family

ID=16550681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57208103A Granted JPS5997049A (ja) 1982-11-25 1982-11-25 半導体湿度センサ装置

Country Status (1)

Country Link
JP (1) JPS5997049A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246647A (ja) * 1987-04-01 1988-10-13 Hitachi Ltd 高分子湿度センサ−

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246647A (ja) * 1987-04-01 1988-10-13 Hitachi Ltd 高分子湿度センサ−

Also Published As

Publication number Publication date
JPH0242192B2 (enrdf_load_html_response) 1990-09-20

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