JPS598870Y2 - 荷電粒子ビ−ム加工装置 - Google Patents

荷電粒子ビ−ム加工装置

Info

Publication number
JPS598870Y2
JPS598870Y2 JP9966377U JP9966377U JPS598870Y2 JP S598870 Y2 JPS598870 Y2 JP S598870Y2 JP 9966377 U JP9966377 U JP 9966377U JP 9966377 U JP9966377 U JP 9966377U JP S598870 Y2 JPS598870 Y2 JP S598870Y2
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
workpiece
traveling device
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9966377U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5426198U (enrdf_load_stackoverflow
Inventor
朝紀 竹本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP9966377U priority Critical patent/JPS598870Y2/ja
Publication of JPS5426198U publication Critical patent/JPS5426198U/ja
Application granted granted Critical
Publication of JPS598870Y2 publication Critical patent/JPS598870Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
JP9966377U 1977-07-26 1977-07-26 荷電粒子ビ−ム加工装置 Expired JPS598870Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9966377U JPS598870Y2 (ja) 1977-07-26 1977-07-26 荷電粒子ビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9966377U JPS598870Y2 (ja) 1977-07-26 1977-07-26 荷電粒子ビ−ム加工装置

Publications (2)

Publication Number Publication Date
JPS5426198U JPS5426198U (enrdf_load_stackoverflow) 1979-02-20
JPS598870Y2 true JPS598870Y2 (ja) 1984-03-19

Family

ID=29036596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9966377U Expired JPS598870Y2 (ja) 1977-07-26 1977-07-26 荷電粒子ビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPS598870Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639029U (enrdf_load_stackoverflow) * 1986-07-07 1988-01-21

Also Published As

Publication number Publication date
JPS5426198U (enrdf_load_stackoverflow) 1979-02-20

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