JPS5987607U - Alignment device for mutual comparison pattern inspection machine - Google Patents
Alignment device for mutual comparison pattern inspection machineInfo
- Publication number
- JPS5987607U JPS5987607U JP18254782U JP18254782U JPS5987607U JP S5987607 U JPS5987607 U JP S5987607U JP 18254782 U JP18254782 U JP 18254782U JP 18254782 U JP18254782 U JP 18254782U JP S5987607 U JPS5987607 U JP S5987607U
- Authority
- JP
- Japan
- Prior art keywords
- inspection machine
- patterns
- alignment device
- mutual comparison
- pattern inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は被検基板上の被検パターンと撮像部の位置を示
す図、第２図は本考案の原理説明図、第３図は本考案を
実施した検査機の概略図である。
１・・・・・・基板、２，３・・・・・・撮像部、４・
・・・・・γテーブル、５・・・・・−Ｘ−ニーーｆル
、６． ７． ８． ９・・・・・・パルスモータ、１
０・・・・・・ｉ制御装置。FIG. 1 is a diagram showing a test pattern on a test board and the position of an imaging section, FIG. 2 is a diagram explaining the principle of the present invention, and FIG. 3 is a schematic diagram of an inspection machine implementing the present invention. 1... Board, 2, 3... Imaging section, 4...
.....gamma. table, 5.....-X-needle, 6. 7. 8. 9...Pulse motor, 1
0...i control device.
Claims (1)
たパターン群に対して、各側に対応して配置した２組の
撮像部を介して得た両パターンの対応部分の映像をモニ
タ画面で相互に比較してパターン欠陥を検出するように
した検査機において、前記基板の検査機にセットした際
に生ずる、両パターンとそれぞれに対応する撮像部との
相対位置ずれの補正をζ前記パターンの列方向や横並び
の方向にほぼ平行な、互いに直交する、検査機に特定な
２方向上のみでの相対移動によって行うようにしたこと
を特徴とする相互比較方式パターン検査機の位置合せ装
置。For a group of patterns formed regularly in two parallel rows on one large substrate, images of corresponding parts of both patterns obtained through two sets of imaging units placed correspondingly on each side are monitored. In an inspection machine that detects pattern defects by comparing them with each other on the screen, correction of the relative positional deviation between both patterns and their corresponding imaging units that occurs when the board is set in the inspection machine is carried out as described above. An alignment device for a mutual comparison type pattern inspection machine, characterized in that the alignment is performed by relative movement only in two directions specific to the inspection machine, which are substantially parallel to the row direction or horizontal direction of patterns and orthogonal to each other. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18254782U JPS5987607U (en) | 1982-12-03 | 1982-12-03 | Alignment device for mutual comparison pattern inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18254782U JPS5987607U (en) | 1982-12-03 | 1982-12-03 | Alignment device for mutual comparison pattern inspection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5987607U true JPS5987607U (en) | 1984-06-13 |
Family
ID=30395301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18254782U Pending JPS5987607U (en) | 1982-12-03 | 1982-12-03 | Alignment device for mutual comparison pattern inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5987607U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223365A (en) * | 1975-08-13 | 1977-02-22 | Cit Alcatel | Method of and apparatus for automatically inspecting pattern of print circuit board |
| JPS5225575A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Inspection method of the state of object |
-
1982
- 1982-12-03 JP JP18254782U patent/JPS5987607U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223365A (en) * | 1975-08-13 | 1977-02-22 | Cit Alcatel | Method of and apparatus for automatically inspecting pattern of print circuit board |
| JPS5225575A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Inspection method of the state of object |
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