JPS5981516A - マイクロフロ−センサ− - Google Patents

マイクロフロ−センサ−

Info

Publication number
JPS5981516A
JPS5981516A JP57191701A JP19170182A JPS5981516A JP S5981516 A JPS5981516 A JP S5981516A JP 57191701 A JP57191701 A JP 57191701A JP 19170182 A JP19170182 A JP 19170182A JP S5981516 A JPS5981516 A JP S5981516A
Authority
JP
Japan
Prior art keywords
gas
junctions
measured
temperature
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57191701A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0146010B2 (zh
Inventor
Haruo Kotani
小谷　晴夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP57191701A priority Critical patent/JPS5981516A/ja
Publication of JPS5981516A publication Critical patent/JPS5981516A/ja
Publication of JPH0146010B2 publication Critical patent/JPH0146010B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP57191701A 1982-10-30 1982-10-30 マイクロフロ−センサ− Granted JPS5981516A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57191701A JPS5981516A (ja) 1982-10-30 1982-10-30 マイクロフロ−センサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57191701A JPS5981516A (ja) 1982-10-30 1982-10-30 マイクロフロ−センサ−

Publications (2)

Publication Number Publication Date
JPS5981516A true JPS5981516A (ja) 1984-05-11
JPH0146010B2 JPH0146010B2 (zh) 1989-10-05

Family

ID=16279034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57191701A Granted JPS5981516A (ja) 1982-10-30 1982-10-30 マイクロフロ−センサ−

Country Status (1)

Country Link
JP (1) JPS5981516A (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147831A2 (en) * 1983-12-27 1985-07-10 Honeywell Inc. Flow sensor
JPS61138168A (ja) * 1984-12-10 1986-06-25 Tokyo Keiso Kk 熱電式流速計
US4744246A (en) * 1986-05-01 1988-05-17 Busta Heinz H Flow sensor on insulator
JP2003121226A (ja) * 2001-10-19 2003-04-23 Yamatake Corp フローセンサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147831A2 (en) * 1983-12-27 1985-07-10 Honeywell Inc. Flow sensor
EP0147831A3 (en) * 1983-12-27 1985-12-04 Honeywell Inc. Flow sensor
JPS61138168A (ja) * 1984-12-10 1986-06-25 Tokyo Keiso Kk 熱電式流速計
US4744246A (en) * 1986-05-01 1988-05-17 Busta Heinz H Flow sensor on insulator
JP2003121226A (ja) * 2001-10-19 2003-04-23 Yamatake Corp フローセンサ

Also Published As

Publication number Publication date
JPH0146010B2 (zh) 1989-10-05

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