JPS5978313A - 光学系調整方法 - Google Patents

光学系調整方法

Info

Publication number
JPS5978313A
JPS5978313A JP18968982A JP18968982A JPS5978313A JP S5978313 A JPS5978313 A JP S5978313A JP 18968982 A JP18968982 A JP 18968982A JP 18968982 A JP18968982 A JP 18968982A JP S5978313 A JPS5978313 A JP S5978313A
Authority
JP
Japan
Prior art keywords
optical system
image
grating
optical
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18968982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0439050B2 (enExample
Inventor
Takeshi Kuwayama
桑山　武司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18968982A priority Critical patent/JPS5978313A/ja
Publication of JPS5978313A publication Critical patent/JPS5978313A/ja
Publication of JPH0439050B2 publication Critical patent/JPH0439050B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP18968982A 1982-10-27 1982-10-27 光学系調整方法 Granted JPS5978313A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18968982A JPS5978313A (ja) 1982-10-27 1982-10-27 光学系調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18968982A JPS5978313A (ja) 1982-10-27 1982-10-27 光学系調整方法

Publications (2)

Publication Number Publication Date
JPS5978313A true JPS5978313A (ja) 1984-05-07
JPH0439050B2 JPH0439050B2 (enExample) 1992-06-26

Family

ID=16245530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18968982A Granted JPS5978313A (ja) 1982-10-27 1982-10-27 光学系調整方法

Country Status (1)

Country Link
JP (1) JPS5978313A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554251A (en) * 1991-04-03 1996-09-10 Sharp Kabushiki Kaisha Optical device assemble apparatus
JP2018128579A (ja) * 2017-02-08 2018-08-16 株式会社島津製作所 回折格子の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5554251A (en) * 1991-04-03 1996-09-10 Sharp Kabushiki Kaisha Optical device assemble apparatus
JP2018128579A (ja) * 2017-02-08 2018-08-16 株式会社島津製作所 回折格子の製造方法

Also Published As

Publication number Publication date
JPH0439050B2 (enExample) 1992-06-26

Similar Documents

Publication Publication Date Title
US4055376A (en) Calibration reticle for measuring microscopes
JP2000511004A (ja) 離軸整列ユニットを持つリトグラフ投射装置
CN1495540A (zh) 利用至少两个波长的光刻系统的对准系统和方法
GB2157825A (en) Apparatus for measuring overlay error between a mask pattern and a wafer pattern
JPS587122A (ja) 光ビ−ム走査装置
US20030123054A1 (en) Method and apparatus for testing and mapping phase objects
JPH0140493B2 (enExample)
JPS5978313A (ja) 光学系調整方法
JPS604402B2 (ja) 表面形状測定装置
US5075560A (en) Moire distance measurements using a grating printed on or attached to a surface
KR100319800B1 (ko) 모아레 무늬 획득장치 및 방법
JPH0153408B2 (enExample)
US6323945B1 (en) Coma aberration automatic measuring mark and measuring method
GB2183364A (en) Alignment using gratings having varying stripe pitch
JPH02188907A (ja) 面位置検出装置
JP2008170282A (ja) 形状測定装置
KR100388959B1 (ko) 부품 검사 장치 및 방법
KR100702941B1 (ko) 부품 검사 장치
RU2065570C1 (ru) Электронно-проекционный способ измерения формы и перемещений поверхности объекта
CN114688973B (zh) 检测设备及其检测方法
JP3286246B2 (ja) 変形フレネルゾーンプレートを用いた位置検出方法及び位置検出装置
KR100714821B1 (ko) 단일영상을 이용한 거리영상 획득방법
KR100728353B1 (ko) 3차원 오토콜리메이터의 2차반사를 이용한 경사각 측정방법
TW594586B (en) Card genuine judging apparatus and card genuine judging system
JPH04252907A (ja) 立体形状計測装置