JPS5974803U - 真空排気系用冷却トラツプ - Google Patents

真空排気系用冷却トラツプ

Info

Publication number
JPS5974803U
JPS5974803U JP16955582U JP16955582U JPS5974803U JP S5974803 U JPS5974803 U JP S5974803U JP 16955582 U JP16955582 U JP 16955582U JP 16955582 U JP16955582 U JP 16955582U JP S5974803 U JPS5974803 U JP S5974803U
Authority
JP
Japan
Prior art keywords
vacuum exhaust
cooling
exhaust system
trap
cooling trap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16955582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634487Y2 (enExample
Inventor
釼先　友明
草柳　政夫
Original Assignee
双葉酸素株式会社
ソニ−株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 双葉酸素株式会社, ソニ−株式会社 filed Critical 双葉酸素株式会社
Priority to JP16955582U priority Critical patent/JPS5974803U/ja
Publication of JPS5974803U publication Critical patent/JPS5974803U/ja
Application granted granted Critical
Publication of JPS634487Y2 publication Critical patent/JPS634487Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP16955582U 1982-11-09 1982-11-09 真空排気系用冷却トラツプ Granted JPS5974803U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16955582U JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Publications (2)

Publication Number Publication Date
JPS5974803U true JPS5974803U (ja) 1984-05-21
JPS634487Y2 JPS634487Y2 (enExample) 1988-02-05

Family

ID=30370392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16955582U Granted JPS5974803U (ja) 1982-11-09 1982-11-09 真空排気系用冷却トラツプ

Country Status (1)

Country Link
JP (1) JPS5974803U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345672A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Cold trap for collecting gas

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345672A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Cold trap for collecting gas

Also Published As

Publication number Publication date
JPS634487Y2 (enExample) 1988-02-05

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