JPS5971336A - Surface treatment of formed rubber material - Google Patents
Surface treatment of formed rubber materialInfo
- Publication number
- JPS5971336A JPS5971336A JP18039982A JP18039982A JPS5971336A JP S5971336 A JPS5971336 A JP S5971336A JP 18039982 A JP18039982 A JP 18039982A JP 18039982 A JP18039982 A JP 18039982A JP S5971336 A JPS5971336 A JP S5971336A
- Authority
- JP
- Japan
- Prior art keywords
- rubber material
- reactor
- rubber
- valve
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2021/00—Use of unspecified rubbers as moulding material
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、成形ゴム材料の表面処理方法に関する。更に
詳しくは、加硫された成形ゴム材料の非粘着化を目的と
する表面処理方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for surface treatment of molded rubber materials. More specifically, the present invention relates to a surface treatment method for the purpose of making a vulcanized molded rubber material non-adhesive.
従来から、ゴムの非粘着化を目的として種々の方法が提
案されているが、それを大別すると次のようになる。Conventionally, various methods have been proposed for the purpose of making rubber non-adhesive, and they can be roughly classified as follows.
(a)ゴム材料の改良:
ゴム材料の配合物として、非粘着化に効果のある材料、
例えばタルク、セライト、グラファイトなどを加える。(a) Improvement of rubber materials: As a compound of rubber materials, materials that are effective in making them non-adhesive,
For example, add talc, celite, graphite, etc.
これによって、ある程度の低粘着化は達成されるが、有
機物としてのゴムが本来有する性質から、完全に非粘着
化させることはできない。Although this achieves a certain degree of tack reduction, it is not possible to completely eliminate tackiness due to the inherent properties of rubber as an organic substance.
(b)化学的処理:
硫酸処理、ハロゲン処理などの化学的処理により、成形
ゴム材料の表面を改質する。この方法では、安全衛生面
、公害面などで処理上特有の問題があり、またゴム自体
を劣化させ易い欠点を有している。(b) Chemical treatment: The surface of the molded rubber material is modified by chemical treatment such as sulfuric acid treatment and halogen treatment. This method has its own processing problems in terms of safety and hygiene, pollution, etc., and also has the disadvantage that the rubber itself tends to deteriorate.
(o)物理的処理: ゴム材料の表面に、他の材料をコーティング処理する。(o) Physical processing: The surface of the rubber material is coated with another material.
この方法は、コーティング被膜とゴム七の接着性や強度
に問題があり、また複雑な形状のものに適用する瘉こは
難しいという欠点がある。更に、塗布が均質にできなが
ったり、塗布したものが飛ばされたり、流されたりする
ことが多いなど、塗布方法自体にも問題がみられる。This method has problems with the adhesion and strength of the coating film and the rubber layer, and also has the disadvantage that it is difficult to apply it to objects with complex shapes. Furthermore, there are problems with the coating method itself, such as the coating not being uniform, and the coated material often flying off or being washed away.
また、他の物理的処理として最近行われるようになった
方法は、ゴム材料の表面をスパッタエツチングして接触
面積を減らし、しかも極く表面層の架橋を進めることで
粘着を防止する方法である。Another physical treatment method that has recently become popular is to sputter-etch the surface of the rubber material to reduce the contact area and further crosslink the surface layer to prevent adhesion. .
しかしながら、この方法では、ゴム表面が荒れてし捷う
たぬ表面光沢がなくなり、また押付は圧力が小さいとシ
ール性が劣るという欠点がある。However, this method has the disadvantage that the rubber surface becomes rough and loses its glossy surface, and that the sealing performance is poor if the pressing pressure is low.
本発明は、こうした欠点を有する方法とは異なり、成形
ゴム材料の表面を窒素プラズマで処理することにより、
操作上および効果上ですぐれた非粘着化を達成させる。The present invention differs from methods having such drawbacks by treating the surface of the molded rubber material with nitrogen plasma.
Achieves non-stick properties that are superior in terms of operation and effectiveness.
図面は、本発明を適用する装置および方法の概略図であ
り、具体的に次のようにして成形ゴム材料の処理が行わ
れる。The drawings are schematic diagrams of an apparatus and method to which the present invention is applied, and specifically, the processing of molded rubber material is carried out as follows.
(1)パイレックス製反応器1内に、成形ゴム材料2を
セツティングする。この際、プラズマに接しない面は処
理されないので、それの支持方法に注意する。なお、符
号3は0−リング、4はピラ二真空ゲージである。(1) Setting the molded rubber material 2 in the Pyrex reactor 1. At this time, the surfaces that are not in contact with the plasma will not be processed, so be careful how you support them. In addition, the code|symbol 3 is an O-ring, and 4 is a Pirani vacuum gauge.
(2)まず、油回転ポンプ5を作動させ、反応器内を1
O−3Torrのオーダー迄非排気する。この際、反応
器の内壁に水分や汚れが付着していると、この真空度に
達する迄に時間を要するので、前以って十分な洗浄、乾
燥をする方が効率的である。なお、符号6〜8は、いず
れもバルブである。(2) First, operate the oil rotary pump 5 to pump the inside of the reactor.
Non-exhaust to the order of O-3 Torr. At this time, if moisture or dirt adheres to the inner wall of the reactor, it will take time to reach this degree of vacuum, so it is more efficient to thoroughly wash and dry the reactor in advance. In addition, all the codes|symbols 6-8 are valves.
次に、バルブ7を閉じ、油回転ポンプ5′および油拡散
ポンプ15を作動させ、電離真空計16に連結されたバ
ッフル17内が10”−’ Torr以上にならないよ
うにゆっくりとバルブ18を開け、反応器内を高真空に
排気する。このとき、酸素の影響を避けるために、1O
−5Torrのオーダー迄排気することが望ましい。Next, close the valve 7, operate the oil rotary pump 5' and the oil diffusion pump 15, and slowly open the valve 18 so that the inside of the baffle 17 connected to the ionization vacuum gauge 16 does not exceed 10''-' Torr. , evacuate the inside of the reactor to high vacuum. At this time, to avoid the influence of oxygen, 1O
It is desirable to exhaust to the order of -5 Torr.
(3) 窒素ガスボンベ9、バルブ10〜11からなる
窒素ガス導入系から、窒素ガスを約0.001〜0.5
Torr 、好ましくは約0.01〜0.I Torr
の圧力になる迄反応器内に導入する。これ以下の窒素ガ
ス圧力では放電が持続せず、一方これ以上に窒素ガスの
圧力を高めると、放電が不安定となるため、均質な処理
面が得られない。(3) From the nitrogen gas introduction system consisting of the nitrogen gas cylinder 9 and valves 10 to 11, about 0.001 to 0.5
Torr, preferably about 0.01-0. I Torr
into the reactor until the pressure reaches . If the nitrogen gas pressure is lower than this, the discharge will not continue, and if the nitrogen gas pressure is increased more than this, the discharge will become unstable and a homogeneous treated surface will not be obtained.
用いられる窒素ガスは、純度の高いものを使用する必要
があり、それはこの中に酸素や水分が含まれているとき
は、粘着防止効果が得られなかったり、あるいは得られ
てもその効果は減少するからである。The nitrogen gas used must be of high purity; if it contains oxygen or moisture, the anti-stick effect may not be obtained, or even if it is obtained, the effect will be reduced. Because it does.
(4)高周波発生源(周波数13.56 M Hz )
12 、整合器13、銅コイル14からなる高周波放
電系を用いて窒素を励起し、窒素プラズマを発生させる
。(4) High frequency source (frequency 13.56 MHz)
12, a high frequency discharge system consisting of a matching box 13 and a copper coil 14 is used to excite nitrogen to generate nitrogen plasma.
この際、整合器で、入射波電力と反射波電力の差(有効
放電電力)が最大になるように調整し、損失をできるだ
け抑えるようにする。At this time, a matching box is used to adjust the difference between the incident wave power and the reflected wave power (effective discharge power) to be maximized to suppress loss as much as possible.
有効放電電力は、約10〜30Wであることが望ましく
、それはこれ以下では効率が悪く、またこれ以上では処
理面に荒れを生ずることがあるからである。The effective discharge power is desirably about 10 to 30 W, because if it is less than this, the efficiency is poor, and if it is more than this, the treated surface may become rough.
(5)一定時間、一般には一定の粘着防止効果を得るた
めに15分間以上低温プラズマ処理した後、放電、窒素
ガスの導入および油回転ポンプの運転を順次止め、リー
ク弁(8)を開いて反応器内に大気を導入し、処理物を
取り出す。(5) After performing low-temperature plasma treatment for a certain period of time, generally 15 minutes or more in order to obtain a certain anti-adhesive effect, the discharge, introduction of nitrogen gas, and operation of the oil rotary pump are sequentially stopped, and the leak valve (8) is opened. Air is introduced into the reactor and the treated material is taken out.
このようにして行われる成形ゴム材料の表面処理は、天
然ゴムおよび合成ゴム、例えばスチレン−ブタジェン共
重合ゴム、アクリロニトリル−ブタジェン共重合ゴム、
アクリルゴム、クロロブレンゴム、ヒドリンゴム、エチ
レン−プロピレン(−ジエン)共重合ゴム、シリコンゴ
ム、フッ素ゴム、イソプレンゴム、ブタジェンゴム、ブ
チルゴムなどから加硫成形された各種ゴム材料に広く適
用され、次のような特徴を有する。The surface treatment of molded rubber materials carried out in this way can be applied to natural rubber and synthetic rubber, such as styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber,
It is widely applied to various rubber materials vulcanized from acrylic rubber, chloroprene rubber, hydrin rubber, ethylene-propylene (-diene) copolymer rubber, silicone rubber, fluororubber, isoprene rubber, butadiene rubber, butyl rubber, etc. It has the following characteristics.
(1)比較的低温でプラズマに接する表面部分のみが処
理されるので、処理される成形ゴム材料自身の性質が損
われない。(1) Since only the surface portion in contact with the plasma is treated at a relatively low temperature, the properties of the molded rubber material itself to be treated are not impaired.
(2)成形ゴム材料の不必要な部分にマスクすることに
より、所望の面のみを処理することができる。(2) By masking unnecessary parts of the molded rubber material, only the desired surface can be treated.
(3)成形ゴム材料の形状が、例えば各種バルブのよう
な複雑な形状のものであっても、気相反応であるので効
果的に処理できる。(3) Even if the shape of the molded rubber material is complex, such as various valves, it can be effectively treated because it is a gas phase reaction.
(4)従来の化学的処理などとは異なり、危険な薬品類
を使用しないので安全である。(4) Unlike conventional chemical treatments, it is safe because no dangerous chemicals are used.
(5)排気物がプラズマ処理後の排出ガスであり、それ
は窒素ガスであるので公賓上安全である。(5) Since the exhaust gas is nitrogen gas after plasma treatment, it is safe for public guests.
(6)成形ゴム材料の表面を荒らすことなく粘着防止の
効果が達成されるので、外観上およびシール性機能の点
でも問題がない。(6) Since the anti-adhesion effect is achieved without roughening the surface of the molded rubber material, there are no problems in terms of appearance and sealing performance.
なお、本発明者は先に、成形ゴム材料の表面を酸素プラ
ズマで処理し、灰化させることにより、成形ゴム材料を
非粘着化させる方法を提案しているが(特願昭57−1
2291号参照)、この酸素プラズマ処理法では、成形
ゴム材料の表面を低温で燃焼させ、材料内部に影響を与
えずに、表面層だけを無機物の層に変化させることで非
粘着化を図っているのに対し、本発明方法では、成形ゴ
ム材料の表面層に窒素プラズマを接触させ、この際ガス
圧力および有効放電電力などの処理条件を全く変え、ま
た酸素を含有しない高純度の窒素ガスを用いることによ
り、表面層の架橋度を高めるなどして、未処理面と全く
変らない表面状態で非粘着化を達成させている。Note that the present inventor has previously proposed a method of making a molded rubber material non-adhesive by treating the surface of the molded rubber material with oxygen plasma and ashing it (Japanese Patent Application No. 1987-1).
(Refer to No. 2291), this oxygen plasma treatment method burns the surface of the molded rubber material at low temperature to change only the surface layer into an inorganic layer without affecting the inside of the material, thereby making it non-adhesive. In contrast, in the method of the present invention, the surface layer of the molded rubber material is brought into contact with nitrogen plasma, and at this time, the processing conditions such as gas pressure and effective discharge power are completely changed, and high-purity nitrogen gas that does not contain oxygen is used. By using it, the degree of crosslinking of the surface layer is increased, and non-adhesiveness is achieved with a surface condition that is completely the same as that of an untreated surface.
本発明方法により表面処理された成形ゴム材料は、金属
材料や樹脂材料との接着を含めた粘着に対して、効果的
な防止効果を示している。Molded rubber materials surface-treated by the method of the present invention have shown effective prevention effects against adhesion, including adhesion to metal materials and resin materials.
次に、実施例について本発明の詳細な説明する。Next, the present invention will be described in detail with reference to examples.
実施例1
図示された装置および方法に従って、厚さ21廁の各種
ゴムシートの窒素プラズマ処理を行なった。Example 1 Various rubber sheets having a thickness of 21 μm were subjected to nitrogen plasma treatment according to the illustrated apparatus and method.
処理条件は、吹の如くである。The processing conditions are as follows.
窒素ガス圧力 Q、Q5 Torr有効放電電力
20 W
処理時間 30分間
このようにして処理された各種ゴムシートについて、次
のようにして非粘着性の評価を行なった。Nitrogen gas pressure Q, Q5 Torr effective discharge power
20 W Treatment time: 30 minutes The various rubber sheets treated in this way were evaluated for non-adhesion as follows.
0)熱板上に載置したゴムシートの上に、金属製(s
25a )円筒状容器を逆さまにして置き、その上端縁
部をシートと接触せしめた状態の容器の底部に一定圧力
の荷重(1〜)をかけ、120℃で16時間、次いで室
温に2時間放置して、金属上端面とゴム面との間に粘着
を生ぜしめる。0) Place a metal (s) on the rubber sheet placed on the hot plate.
25a) Place a cylindrical container upside down, apply a constant pressure load (1~) to the bottom of the container with its upper edge in contact with the sheet, and leave at 120°C for 16 hours and then at room temperature for 2 hours. This causes adhesion between the metal upper end surface and the rubber surface.
(2)次に、荷重をとり去り、容器底部に設置した加圧
ノズルから加圧空気を送り込み、容器を浮かせるように
してシートの自重のみが粘着面に働くようにする。(2) Next, the load is removed, and pressurized air is sent in from a pressure nozzle installed at the bottom of the container to float the container so that only the weight of the sheet acts on the adhesive surface.
(3)容器の底部から容器内に一定速度で空気を送り込
み、内部圧力を上昇させる。(3) Air is pumped into the container from the bottom of the container at a constant rate to increase the internal pressure.
(4)ある圧力迄上昇すると、粘着面から空気が洩れ始
めるので、このときの最大圧力を加圧ノズルに取付けた
圧力センサーにより測走し、この値を粘着力に対応する
パラメーターとしている。(4) When the pressure rises to a certain level, air begins to leak from the adhesive surface, so the maximum pressure at this time is measured by a pressure sensor attached to the pressure nozzle, and this value is used as a parameter corresponding to the adhesive force.
比較のために、未処理シートについても、同様の粘着性
の評価を行なった。得られた結果は、次の表に粘着力(
単位面積当りの引き剥し力に換算)として示されるが、
いずれも6試料についての平均値である。For comparison, an untreated sheet was also evaluated for tackiness. The results obtained are summarized in the following table for adhesive strength (
(converted to peeling force per unit area),
All values are average values for 6 samples.
表1
フッ素ゴム 1.20〜 粘着せず注2)ニトリ
ルゴム 0,67 pヒドリンゴム−0
,98
シリコンゴム 0.75 tt注1)
処理面に荒れがなく、未処理面と同じ光沢性2)ゴムの
自重から3り/dに相当
実施例2
エンジンの2次空気供給用リードバルブに使用されるフ
ッ素ゴム製弁座を装置させたバルブシートについて、実
施例1と同様の窒素プラズマ処理を行なった。Table 1 Fluororubber 1.20 ~ Non-adhesive Note 2) Nitrile rubber 0.67 phydrin rubber -0
,98 Silicone rubber 0.75 ttNote 1)
The treated surface has no roughness and has the same gloss as the untreated surface 2) Equivalent to 3/d from the weight of the rubber Example 2 A fluororubber valve seat used in a reed valve for secondary air supply of an engine is installed. The same nitrogen plasma treatment as in Example 1 was performed on the valve seat.
このように処理されたバルブシートにリード弁を固着し
、その上に敷板を介して一定荷重の重錘をのせ、リード
先端部に1.7〜の面圧力がかかるようにして、200
℃で20時間放置し、次いで無荷重下に冷却した。リー
ド弁取付面と反対のバルブシート面側に閉塞空気室を設
け、そこに徐々に圧力を高めた空気を送り込み、リード
弁が全開した時点の空気圧を閉塞空気室に連結した水柱
マノメーター (mH20)で読みとって、バルブシー
トとリード弁間の非粘着性を評価した。A reed valve was fixed to the valve seat treated in this way, a weight with a constant load was placed on it via a bottom plate, and a surface pressure of 1.7~ was applied to the tip of the reed.
C. for 20 hours, and then cooled under no load. A water column manometer (mH20) in which a closed air chamber is provided on the valve seat side opposite to the reed valve mounting surface, air with gradually increased pressure is fed into it, and the air pressure at the time when the reed valve is fully opened is connected to the closed air chamber. The non-adhesiveness between the valve seat and reed valve was evaluated.
得られた結果(6試料についての平均値)は、次の表2
に開弁圧の値として示される。The results obtained (average values for 6 samples) are shown in Table 2 below.
is shown as the value of valve opening pressure.
表2
あり 1.3XiO2
なし 2.5X10s
このように、本発明方法によって窒素プラズマ処理され
たものは、非粘着性の点ですぐれているばかりではなく
、表面に荒れがみられないので、外観上にもまた押付は
圧力が小さいときの液体、気体に対するシール性の点で
も問題がみられない。Table 2 Yes 1.3XiO2 No 2.5X10s As described above, the material treated with nitrogen plasma by the method of the present invention not only has excellent non-adhesive properties, but also has no roughness on the surface, so it has a good appearance. Also, there are no problems with the sealing performance against liquids and gases when the pressure is low.
図面は、本発明を適用する装置および方法の概略図であ
る。この図面において、符号1は反応器、2は成形ゴム
材料、5は油回転ポンプ、9は酸素ガスボンベ、12は
高周波発生源、13は整合器、そして14は銅コイルを
それぞれ指示する。
代理人
弁理士 吉 1)俊 夫The drawings are schematic illustrations of an apparatus and method applying the invention. In this drawing, reference numeral 1 indicates a reactor, 2 indicates a molded rubber material, 5 indicates an oil rotary pump, 9 indicates an oxygen gas cylinder, 12 indicates a high frequency generator, 13 indicates a matching device, and 14 indicates a copper coil. Representative Patent Attorney Yoshi 1) Toshio
Claims (1)
を特徴とする成形ゴム材料の表面処理方法。1. A method for surface treatment of a molded rubber material, which comprises treating the surface of the molded rubber material with nitrogen plasma.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18039982A JPS5971336A (en) | 1982-10-14 | 1982-10-14 | Surface treatment of formed rubber material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18039982A JPS5971336A (en) | 1982-10-14 | 1982-10-14 | Surface treatment of formed rubber material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5971336A true JPS5971336A (en) | 1984-04-23 |
Family
ID=16082553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18039982A Pending JPS5971336A (en) | 1982-10-14 | 1982-10-14 | Surface treatment of formed rubber material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5971336A (en) |
Cited By (4)
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US5882421A (en) * | 1993-09-27 | 1999-03-16 | Alcon Laboratories, Inc. | Method for reducing taciness of soft acrylic polymers |
FR2919589A1 (en) * | 2007-08-01 | 2009-02-06 | Airlessystems Soc Par Actions | SHUTTER VALVE AND METHOD FOR MANUFACTURING SUCH CLAMP. |
JP2011508040A (en) * | 2007-12-27 | 2011-03-10 | ブルースター・シリコーン・フランス・エスアエス | Silicone self-adhesive, method for producing silicone self-adhesive, composite using silicone self-adhesive, and method for using silicone self-adhesive |
WO2013123156A1 (en) | 2012-02-15 | 2013-08-22 | 3M Innovative Properties Company | Fluoropolymer composition comprising a cross - linkable fluorinated elastomer and a ptfe of low melting point |
-
1982
- 1982-10-14 JP JP18039982A patent/JPS5971336A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5882421A (en) * | 1993-09-27 | 1999-03-16 | Alcon Laboratories, Inc. | Method for reducing taciness of soft acrylic polymers |
FR2919589A1 (en) * | 2007-08-01 | 2009-02-06 | Airlessystems Soc Par Actions | SHUTTER VALVE AND METHOD FOR MANUFACTURING SUCH CLAMP. |
WO2009024694A3 (en) * | 2007-08-01 | 2009-04-16 | Airlessystems | Stopper valve and method for making such valve |
US8602265B2 (en) | 2007-08-01 | 2013-12-10 | Aptar France Sas | Stopper valve and method for making such valve |
JP2011508040A (en) * | 2007-12-27 | 2011-03-10 | ブルースター・シリコーン・フランス・エスアエス | Silicone self-adhesive, method for producing silicone self-adhesive, composite using silicone self-adhesive, and method for using silicone self-adhesive |
US9371428B2 (en) | 2007-12-27 | 2016-06-21 | Bluestar Silicones France Sas | Silicone-self-adhesives, method of production, complexes using them and their uses |
WO2013123156A1 (en) | 2012-02-15 | 2013-08-22 | 3M Innovative Properties Company | Fluoropolymer composition comprising a cross - linkable fluorinated elastomer and a ptfe of low melting point |
US9458314B2 (en) | 2012-02-15 | 2016-10-04 | 3M Innovative Properties Company | Fluoropolymer composition |
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