JPS5970340U - 半導体ウエハ−バスケツト運搬具 - Google Patents

半導体ウエハ−バスケツト運搬具

Info

Publication number
JPS5970340U
JPS5970340U JP16457682U JP16457682U JPS5970340U JP S5970340 U JPS5970340 U JP S5970340U JP 16457682 U JP16457682 U JP 16457682U JP 16457682 U JP16457682 U JP 16457682U JP S5970340 U JPS5970340 U JP S5970340U
Authority
JP
Japan
Prior art keywords
wafer basket
semiconductor wafer
basket carrier
wide
wide portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16457682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214694Y2 (enrdf_load_stackoverflow
Inventor
北城　豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP16457682U priority Critical patent/JPS5970340U/ja
Publication of JPS5970340U publication Critical patent/JPS5970340U/ja
Application granted granted Critical
Publication of JPS6214694Y2 publication Critical patent/JPS6214694Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
JP16457682U 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具 Granted JPS5970340U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16457682U JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16457682U JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Publications (2)

Publication Number Publication Date
JPS5970340U true JPS5970340U (ja) 1984-05-12
JPS6214694Y2 JPS6214694Y2 (enrdf_load_stackoverflow) 1987-04-15

Family

ID=30360777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16457682U Granted JPS5970340U (ja) 1982-11-01 1982-11-01 半導体ウエハ−バスケツト運搬具

Country Status (1)

Country Link
JP (1) JPS5970340U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6214694Y2 (enrdf_load_stackoverflow) 1987-04-15

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