JPS5969201A - Surface cutting device - Google Patents

Abstract

PURPOSE:To secure high flatness free from formation of a degenerated layer by fixing the interval between a guide and a slide and carrying-out intermittent cutting by means of one flat cutting tool, in the cutting work for a plane having an exceedingly high flatness. CONSTITUTION:An article 14 to be worked is subjected to intermittent feed in the direction of arrow 29 in full line and cut-worked in lock state in succession, but cutting for one position is restricted in only one time. Through a cutter driving apparatus is brought into stop when the article to be worked reaches a stop position 14', the above-described stop is performed by positioning a flat cutting tool 3 within a range of angle phi so that the worked article 14 is retreated as shown by the dotted arrow 30. That is, intermittent cutting by one flat cutting tool 3 is advanced successively, maintaining the state between surfaces which are concerned with positioning of the interval between a guide 13 and a slide 12, in a fixed state, so a plain having a particularly high flatness can be prepared without forming a degenerated layer.

Description

[Detailed Description of the Invention] A plane with particularly high flatness can be created by lapping, but lapping creates an altered layer, so in the case of single crystals such as silicon or germanium for semiconductor manufacturing, Application of a wrapping finish is inappropriate due to the maintenance of the crystal lattice structure. Cutting using a cutting tool with a cutting edge made of diamond or the like can be considered as a planar processing that does not substantially involve the generation of a degraded layer, but it is required to create a plane with extremely high flatness of 1μ or less. In this case, the two-dimensional movement of the feeder due to the clearance between the guide and the feeder cannot satisfy this requirement.

The present invention aims to solve the above-mentioned problems that occur when attempting to create a plane with extremely high flatness by cutting. The present invention will be explained as follows with reference to the drawings.

In FIG. 1, (1) is a bed, and (2) is a blade drive device. The blade drive device (2) includes a blade support plate (4) to which a flat cutting tool (3) with a cutting edge made of ultra-hard material such as diamond can be attached, and a shaft of the blade support plate (4).
5), a bearing pedestal (6) that supports the motor by eliminating play in the axial and radial directions, an electric motor (7), and a pulley f8).
I9) and a drive unit 01) including a bell) tlOf. O2 is a feed table guided by a guide (13) on the bed, and the workpiece (14) is attached to a support member (15) on the feed table (n) by a suction type chuck (G6).0η is a feed screw of a feed table (12), which is rotated by a stamp motor.The workpiece (14) has been pre-processed to have a flatness of about 3μ.

As shown in Fig. 2, feed table 0 has a compressed air supply unit (18+ +191) that constantly feeds compressed air to the sliding parts.
A compressed air supply section t21) +22) (23+) which is controlled to alternately supply and discharge compressed air is provided. All of these compressed air supply sections are connected to a compressed air source. When the feed table (121 is in a floating state and the compressed air supply parts (21), (2), and (23) of the compressed air supply parts are communicated with the atmosphere or a negative pressure source, the feed table 02) is in a locked state (fixed state).

Figures 6 and 4 show the relationship between the compressed air source, the negative pressure source, the flow path switching valve (26), and the compressed air supply section (23) by changing the state of the flow path switching valve example. FIG. 6 shows the flow path connection with the feed table (12) in the floating state, and FIG. 4 shows the flow path connection state with the feed table (I2) in the locked state. Generally speaking, the compressed air supply (18
) to (23), the feed base (12 is in a floating state, and one of the compressed air supply parts (18) to (23) facing each other is selected and the atmosphere is If the feed bar (12) is opened or connected to a negative pressure source, the feed bar (12) is locked.

The floating state and the locked state of the feeding table [12+] are alternately created as time t passes, as shown in FIG. In this figure, white circles and black circles indicate the time points when transitioning to the flow path connections in Figures 3 and 4, respectively, and F
D and CT are respectively the time during which the feed is loaded on the feed table (12) in the floating state, and the time during which the feed is carried out on the feed table (12) in the locked state.
The time during which the cutting process is performed on 41, Δ is the operation delay time of the flow path switching valve (26).

The stamp motor that feeds the feed table (121) is driven by the shaft (5) in the blade drive device (2) (see Figure 1).
It is controlled by the signal from the driven phase detector
2) Cutting of the workpiece (141) is performed alternately while maintaining the locked state.

FIG. 6 is a drawing showing an example of the trajectory of the flat cutting tool (3) and the stopping position 06 taken after finishing the flat cutting of the workpiece (14). The workpiece (14) is subjected to intermittent feeding in the direction shown by the solid arrow (29), and as explained earlier, is subjected to sequential cutting in the locked state during the intermittent feeding, but the same part is not cut at once. limited When the workpiece reaches the stop position (I41), the cutter drive device (2) (see Figure 1) is stopped, but this stop is caused by the signal generated by the phase detector This is done by positioning the flat tool (3) within the range of angle φ so as to allow the retreat of the chest girth of the workpiece as shown by the dotted arrow (30). is set appropriately according to the size of .

The device according to the invention described above is a guide (13)
This device sequentially performs intermittent cutting using a single flat cutting tool (3) while maintaining a fixed state between the surfaces involved in positioning between the OQ and the feed table OQ. This makes it possible to create a flat surface with particularly high flatness, which has not been previously achieved, without substantially generating a deteriorated layer.

[Brief Description of the Drawings] Figure 1 is a side view of the device according to the present invention, Figure 2 is an enlarged view of a part of Figure 1, and Figures 3 and 4 are the compressed air supply section shown in Figure 2. Figure 5 is a diagram showing the two states taken by
FIG. 6 is a drawing for explaining the feeding and cutting that the apparatus shown in the figure alternately performs, and FIG. 6 is a drawing showing the orbit of a thousand bytes and the path of the workpiece. (1)... Bed (2)... Blade drive device (3)
...Flat cutting tool (4) ...Cutter support plate (5) ...Shaft (6) ...Bearing stand (7) ...Electric motor +81
+91...Pulley (10)...Bell l-G11・
・・1 drive part (12)・・Feed table 031・・Guide (141・・Workpiece (15)・・・Support material (
16)... Chuck (171... No feed +1
81- (23+...Compressed air supply section (Foundation)...
Compressed air source (25)...atmosphere muff fd negative pressure source
Trouble...Flow path switching valve (capital)...Phase detector 128
)... Trajectory of the flat tool (29)... Direction of feeding the workpiece 130... Direction of retracting the workpiece Fig. 3 Fig. 4 Fig. 5 □t

Claims (1)

[Claims] A feeder that provides intermittent feed, a blade drive device that rotates one flat cutting tool and performs flat cutting on a workpiece attached to the feeder, and a blade on a guide surface that guides the feeder in the feeding direction. The first process of supplying compressed air so that the feed table is in a floating state and the second process of changing the supply state of compressed air onto the guide surface and locking the feed table are alternately performed. In the first process, the feed plate is fed, and in the second process, the work piece on the locked feed plate is cut flat by a flat cutting tool, and then the work piece is cut. A flat cutting device characterized by comprising: a control device for stopping a flat cutting tool at a position that does not impede retreat.