JPS5963960U

JPS5963960U - Ion source for mass spectrometer

Info

Publication number: JPS5963960U
Application number: JP16012382U
Authority: JP
Inventors: 達次小林
Original assignee: 日本電子株式会社
Priority date: 1982-10-22
Filing date: 1982-10-22
Publication date: 1984-04-27

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図及び第２図は従来の装置の概略を説明するための
図、第３図は本考案の一実施例の主要部を示す図、第４
図ａ、　　ｂは第３図装置の使用状態を説明する図、第
５図ａ、　ｂは第３図装置の一部変形を示す図である。１：イオン化筐、２：導管、３：開口、４：電極群、５
ａ、　　５ｂ：電子通過孔、６：フィラメント、８ａ。８ｂ：磁石の磁極、９：試料ターゲット、ｌＱ：ＦＡＢ
ガン、１１：中性粒子通過孔、１２ａ、１２ｂ：偏向電
極、１３，１４，１５，１６：電源。1 and 2 are diagrams for explaining the outline of a conventional device, FIG. 3 is a diagram showing the main part of an embodiment of the present invention, and FIG.
Figures a and b are views for explaining the usage state of the apparatus shown in figure 3, and Figures a and b are views showing a partial modification of the apparatus shown in figure 3. 1: Ionization case, 2: Conduit, 3: Opening, 4: Electrode group, 5
a, 5b: electron passing hole, 6: filament, 8a. 8b: magnetic pole of magnet, 9: sample target, lQ: FAB
Gun, 11: Neutral particle passage hole, 12a, 12b: Deflection electrode, 13, 14, 15, 16: Power supply.

Claims

[Scope of Claim for Utility Model Registration] 1. An ionization housing, means for injecting or inserting a sample to be analyzed into the ionization housing, an opening for extracting ions from the ionization housing into a mass spectrometry system, and an opening perpendicular to the ion extraction direction. A pair of electron passing holes provided in the direction, a filament for electron emission placed outside one of the electron passing holes, and a power source for accelerating electrons from the filament toward the other electron passing hole. , at least a pair of magnetic pole portions of a magnet device placed outside the filament and outside the other electron passage hole to generate a magnetic field in the electron traveling direction; a particle passage hole formed in a magnetic pole part, a means placed outside the magnetic pole part having the particle passage hole, and introducing high-speed neutral particles or ions into the ionization housing through the particle passage hole and the electron passage hole; A pair of deflection electrodes for electron tracking are arranged opposite to each other with a passage for electrons and particles interposed between the magnetic pole part having the particle passage hole and the ionization housing, and different voltages are applied to the deflection electrodes. An ion source for a mass spectrometer consisting of a power supply. 2. The ion source for a mass spectrometer according to claim 1, wherein one of the deflection electrodes is held at the same potential as the filament. 3. The ion source for a mass spectrometer according to claim 1 or 2, wherein one side of the deflection electrode is also used as an ionization housing.