JPS5963463A - 極低温冷凍装置 - Google Patents

極低温冷凍装置

Info

Publication number
JPS5963463A
JPS5963463A JP17320682A JP17320682A JPS5963463A JP S5963463 A JPS5963463 A JP S5963463A JP 17320682 A JP17320682 A JP 17320682A JP 17320682 A JP17320682 A JP 17320682A JP S5963463 A JPS5963463 A JP S5963463A
Authority
JP
Japan
Prior art keywords
refrigerant
cryopanel
cooled
gas
cryogenic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17320682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0147711B2 (enrdf_load_stackoverflow
Inventor
松本　孝三
河村　成人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17320682A priority Critical patent/JPS5963463A/ja
Publication of JPS5963463A publication Critical patent/JPS5963463A/ja
Publication of JPH0147711B2 publication Critical patent/JPH0147711B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP17320682A 1982-10-04 1982-10-04 極低温冷凍装置 Granted JPS5963463A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17320682A JPS5963463A (ja) 1982-10-04 1982-10-04 極低温冷凍装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17320682A JPS5963463A (ja) 1982-10-04 1982-10-04 極低温冷凍装置

Publications (2)

Publication Number Publication Date
JPS5963463A true JPS5963463A (ja) 1984-04-11
JPH0147711B2 JPH0147711B2 (enrdf_load_stackoverflow) 1989-10-16

Family

ID=15956076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17320682A Granted JPS5963463A (ja) 1982-10-04 1982-10-04 極低温冷凍装置

Country Status (1)

Country Link
JP (1) JPS5963463A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0147711B2 (enrdf_load_stackoverflow) 1989-10-16

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