JPS5961001A - Resistor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a resistor whose resistance value can be adjusted with high precision.

[Technical background of the invention and its problems]

Film resistors are broadly classified into thin film resistors and thick film resistors.

Among these, thin film resistors have a narrow range of resistivity <1l.
《In contrast, the specific resistance of thick film resistors ranges from about 1Ω to 10mΩ.

It has a wide range of advantages with a culm size of 100mΩ. however,
Since these resistors, especially thick film resistors, have poor finishing accuracy, it is difficult to keep the resistance value within a tolerance of about ±10% without trimming. A resistor trimmed in this manner is likely to generate noise due to microcracks f7 and the like during trimming, and is not suitable for applications such as high-precision microcurrent amplification circuits.

[Purpose of the invention]

An object of the present invention is to provide a resistor whose resistance value can be adjusted as soon as the resistor film is affected by cracks or other adverse effects.

[Summary of the invention]

The resistor according to the present invention has a plurality of linear adjustment electrodes arranged between opposing main electrodes, and a short-circuit between the main electrode and the adjustment electrode or between the adjustment electrode and the adjustment electrode. K to do
That's why I decided to do it.

〔Effect of the invention〕

According to this invention, when adjusting the resistance value by short-circuiting the electrodes, there is no risk of mechanically adverse effects such as micro-flags on the resistive film as in the case of trimming, so high accuracy and low noise characteristics can be achieved. It becomes possible to obtain a resistor.

[Embodiments of the invention]

FIG. 1 is a plan view of a resistor according to an embodiment of the present invention. Reference numeral 1 denotes a substrate made of a heat-resistant insulating material such as alumina ceramic, and a pair of main electrodes 2a are placed on this substrate 1 and opposed to each other at a certain distance.

2b are formed, and further these main electrodes 21L.

A plurality of linear adjustment electrodes 3 are arranged in parallel between 2b. And these fit pole 2a.

A resistive film 4 is formed in contact with 2b and 3.

As described above, the resistive film 4 is preferably a thick film resistor from the viewpoint of the specific resistance range. Thick film resistors usually have a lath ``1q'' formed on the top surface, and it is difficult to deposit electrodes on this.
3 is formed first, and a resistive film 4I is formed thereon.

On the other hand, if the resistive film 4 is a thick film resistor, a firing process is required, so that the electrodes 2g, 2b, '3 are also required to be thin films that can be fired.

As a sinterable thin conductive thin film, for example, T l /'N
Examples include N-layer films such as an i/Au film or a Cr/Au film. If such a thin film is used, it is easy to form the adjustment electrode 3 into a fine shape with a line width and a pitch of about 30 It.

In order to adjust the resistance value of the resistor constructed in this way, the resistance value between 1v2n and 2b is as follows.
, 11° (, between the poles 2a, 2b and the adjusting electric body 3 which has +41>x, or the adjusting Tlj 4;
) Short-circuit between the partners using a wire bonding jig or a conductor base. If the number of short circuits increases,
↓I (l f114 decreases by that amount, so '
l': l i vote resistance value '? When the short-circuit operation is completed, the short-circuiting operation is stopped, and a resistor of h:i:, 11-', ni:1t4' can be obtained. Acid 11 repair? i, set the width of 3, the pitch of about 30μ, hJf,, this resistance 1
It becomes easy to keep 1^ within a tolerance of 110%.

Moreover, the antibody adjusted in this way) is not completely exposed to the resistive film 4. Since l does not occur, the noise is low, making it ideal for amplification circuits, etc.

FIG. 2 shows another embodiment of the present invention, which differs from the previous embodiment in that each of the adjustment electrodes 3 is divided into two parts as shown in 38.3b. In this way, it becomes possible to adjust the resistance value with a pitch that is half that of the previous embodiment, that is, with twice the accuracy.

[Brief explanation of drawings]

FIG. 1 is a plan view showing an example of a hole in the present invention, and body 12 is a plan view showing another embodiment. 1...Substrate, 2a, 2b=-main't'';:
l, I, 3 + 31 + 3b...% for adjustment @
, 4-Resistive film.

Claims (4)

[Claims] (1) A plurality of linear adjustment electrodes are arranged and formed between a pair of opposing main electrodes, and a resistive film is formed in contact with the main electrode and the adjustment electrode, so that the main electrode and the adjustment electrode or between the adjustment electrodes as appropriate. A resistor characterized by adjusting the resistance value between poles. (2) The resistor according to claim 0, wherein the resistive film is formed of a thick film resistor. (3) The adjustment electrode is T + 7'FJ l/A u
2. The resistor according to claim 1, wherein the resistor is formed of a sinterable thin film such as a film or a Cr/Au film. (4) The resistor according to claim 1 or 3, wherein each of the adjustment electrodes is formed separately.