JPS5960725A - 磁気抵抗効果ヘツドの製造方法 - Google Patents
磁気抵抗効果ヘツドの製造方法Info
- Publication number
- JPS5960725A JPS5960725A JP17073382A JP17073382A JPS5960725A JP S5960725 A JPS5960725 A JP S5960725A JP 17073382 A JP17073382 A JP 17073382A JP 17073382 A JP17073382 A JP 17073382A JP S5960725 A JPS5960725 A JP S5960725A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- magnetic field
- vapor deposition
- beams
- bias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000000694 effects Effects 0.000 title abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000003302 ferromagnetic material Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 26
- 238000001704 evaporation Methods 0.000 claims description 11
- 230000005294 ferromagnetic effect Effects 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 abstract description 54
- 230000005415 magnetization Effects 0.000 abstract description 36
- 239000000463 material Substances 0.000 abstract description 21
- 238000000151 deposition Methods 0.000 abstract description 12
- 238000007740 vapor deposition Methods 0.000 abstract description 11
- 239000002245 particle Substances 0.000 abstract description 8
- 238000010894 electron beam technology Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000005019 vapor deposition process Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 16
- 230000008021 deposition Effects 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 4
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17073382A JPS5960725A (ja) | 1982-09-29 | 1982-09-29 | 磁気抵抗効果ヘツドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17073382A JPS5960725A (ja) | 1982-09-29 | 1982-09-29 | 磁気抵抗効果ヘツドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5960725A true JPS5960725A (ja) | 1984-04-06 |
| JPH0376534B2 JPH0376534B2 (enrdf_load_stackoverflow) | 1991-12-05 |
Family
ID=15910376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17073382A Granted JPS5960725A (ja) | 1982-09-29 | 1982-09-29 | 磁気抵抗効果ヘツドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5960725A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486579A (en) * | 1987-05-27 | 1989-03-31 | Aichi Tokei Denki Kk | Magnetoresistance element |
| EP2573769A1 (en) * | 2011-09-21 | 2013-03-27 | Seagate Technology LLC | Varying morphology in magnetic sensor sub-layers |
-
1982
- 1982-09-29 JP JP17073382A patent/JPS5960725A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486579A (en) * | 1987-05-27 | 1989-03-31 | Aichi Tokei Denki Kk | Magnetoresistance element |
| EP2573769A1 (en) * | 2011-09-21 | 2013-03-27 | Seagate Technology LLC | Varying morphology in magnetic sensor sub-layers |
| US9036308B2 (en) | 2011-09-21 | 2015-05-19 | Seagate Technology Llc | Varyinig morphology in magnetic sensor sub-layers |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376534B2 (enrdf_load_stackoverflow) | 1991-12-05 |
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