JPS5956510U

JPS5956510U - optical surface inspection equipment

Info

Publication number: JPS5956510U
Application number: JP15172082U
Authority: JP
Inventors: 昭夫麦島
Original assignee: シライ電子工業株式会社
Priority date: 1982-10-05
Filing date: 1982-10-05
Publication date: 1984-04-13

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図はこの考案の実施例である光学的表面検査装置の
構成を示す斜視図であり、第２図はその構成断面図であ
る。第３図は受光素子にフォト・ダイオードを使用する
ときの光電変換器の回路構成を示す図である。１・・・被検査物、２・・・比較的散乱反射部分、３・
・・比較的鏡面反射部、４・・・光源、５・・・光電変
換器（正反射用）、７・・・充電変換器（散乱反射用）
、６．８・・・集光レンズ、１′１・・・差動増幅器、
１３・・・コンパレータ、１４・・・フォト・ダイオー
ド、１５・・・基準信号。４ん７−［１′　　　　−）１？１５　　　　　　第３図計鵡１１３ −９　　　　　±FIG. 1 is a perspective view showing the structure of an optical surface inspection apparatus that is an embodiment of this invention, and FIG. 2 is a sectional view of the structure. FIG. 3 is a diagram showing the circuit configuration of a photoelectric converter when a photodiode is used as a light receiving element. 1...Object to be inspected, 2...Relatively scattered reflection part, 3.
・Relatively specular reflection part, 4... Light source, 5... Photoelectric converter (for specular reflection), 7... Charging converter (for scattered reflection)
, 6.8... Condensing lens, 1'1... Differential amplifier,
13... Comparator, 14... Photo diode, 15... Reference signal. 4-7-[ 1'-) 1?15 3rd diagram 113-9 ±

Claims

[Scope of utility model registration request]

Light is irradiated onto an object to be inspected, which includes a different member having a reflecting surface that causes relatively specular reflection on a part of the surface of the member that has a reflecting surface that causes relatively scattering reflection, and receives specularly reflected light from the surface of the object to be inspected. In an optical surface inspection device that performs photoelectric conversion to inspect the conformity of the shape of a mirror surface portion with a reference shape, the optical surface inspection device receives scattered reflected light from the surface of the object to be inspected by the light irradiation and converts it into electricity. A converter is provided outside the optical path of the specularly reflected light, and means is provided for detecting a difference value between electrical outputs obtained by photoelectrically converting the specularly reflected light and the scattered reflected light, and the signal obtained by the detecting means is compared with a reference signal. An optical surface inspection device characterized in that it is configured to perform processing.