JPS58141848U - Surface defect detection device using laser - Google Patents
Surface defect detection device using laserInfo
- Publication number
- JPS58141848U JPS58141848U JP3796382U JP3796382U JPS58141848U JP S58141848 U JPS58141848 U JP S58141848U JP 3796382 U JP3796382 U JP 3796382U JP 3796382 U JP3796382 U JP 3796382U JP S58141848 U JPS58141848 U JP S58141848U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- detection device
- defect detection
- surface defect
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案によるレーザーを利用した表面欠陥検出
装置の一実施例を示す説明図、第２図は１個の受光端子
が欠陥検出時に生ずる電流変化を示す線図、第３図は第
２図に示すような特性を持つ２個の受光端子で欠陥検出
した場合の検出電流の位相ずれを示す線図である。
１・・・・・・被測定物、２・・・・・・対物レンズ、
３・・・・・・レーザー発信器、４ａ、、４ｂ・・・・
・・レーザー光線、５・・・・・・受光レンズ、６，７
・・・・・・受光端子、訃・・・・・欠陥。Fig. 1 is an explanatory diagram showing one embodiment of a surface defect detection device using a laser according to the present invention, Fig. 2 is a diagram showing a current change that occurs when one light receiving terminal detects a defect, and Fig. 3 is a diagram showing an example of a surface defect detection device using a laser according to the present invention. FIG. 2 is a diagram showing a phase shift of a detected current when a defect is detected using two light receiving terminals having characteristics as shown in FIG. 2; 1...Object to be measured, 2...Objective lens,
3... Laser transmitter, 4a, 4b...
...Laser beam, 5... Light receiving lens, 6,7
......Light receiving terminal, ...defect.
Claims (1)
するレーザー発信器と、受光レンズを介して被測定物で
反射されたレーザー光線を受光する２個の受光端子を設
けたことを特徴とするレーザーを利用した表面欠陥検出
装置。A laser characterized by being provided with a laser transmitter that irradiates a laser beam onto the surface of an object to be measured through an objective lens, and two light-receiving terminals that receive the laser beam reflected by the object to be measured through a light-receiving lens. Surface defect detection device used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3796382U JPS58141848U (en) | 1982-03-19 | 1982-03-19 | Surface defect detection device using laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3796382U JPS58141848U (en) | 1982-03-19 | 1982-03-19 | Surface defect detection device using laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58141848U true JPS58141848U (en) | 1983-09-24 |
Family
ID=30049328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3796382U Pending JPS58141848U (en) | 1982-03-19 | 1982-03-19 | Surface defect detection device using laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58141848U (en) |
-
1982
- 1982-03-19 JP JP3796382U patent/JPS58141848U/en active Pending
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