JPS6041807U - surface inspection equipment - Google Patents
surface inspection equipmentInfo
- Publication number
- JPS6041807U JPS6041807U JP13347083U JP13347083U JPS6041807U JP S6041807 U JPS6041807 U JP S6041807U JP 13347083 U JP13347083 U JP 13347083U JP 13347083 U JP13347083 U JP 13347083U JP S6041807 U JPS6041807 U JP S6041807U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- inspection device
- reflected light
- position detector
- surface inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第４図はそれぞれ本考案の第１乃至第４の実
施例を示す構成図である。
Ａ・・・第１の入射光、Ｂ・・・第２の入射光、５・・
・第１の検出器、６・・・第２の検出器。FIGS. 1 to 4 are block diagrams showing first to fourth embodiments of the present invention, respectively. A...first incident light, B...second incident light, 5...
- First detector, 6... second detector.
Claims (6)
らの反射光を斜反射光成分として検出する位置に設けら
れる第１の位置検出器と、同じく上記被測定面からの反
射光をこの被測定面の法線方向の垂直反射光成分として
検出する位置に設けられる第２の位置検出器と、上記第
２の位置検出器の信号と上記第１の位置検出器の信号か
ら上記第２の位置検出器の信号に相当する成分を減算し
た信号とにより上記被測定面の平行移動量と傾きを検出
する手段とを備えたことを特徴とする表面検査装置。(1) A light projection means for illuminating the surface to be measured, a first position detector provided at a position to detect the reflected light from the surface to be measured as an oblique reflected light component, and a first position detector that also detects the reflected light from the surface to be measured as an oblique reflected light component; a second position detector provided at a position to detect the light as a vertically reflected light component in the normal direction of the surface to be measured; and a signal from the second position detector and a signal from the first position detector. A surface inspection device comprising means for detecting the amount of parallel movement and inclination of the surface to be measured based on a signal obtained by subtracting a component corresponding to the signal of the second position detector.
方向からの照射になることを特徴とする実用新案登録請
求の範囲第１項記載の表面検査装置。(2) The light projecting means has two directions, one perpendicular and one diagonal to the surface to be measured.
The surface inspection device according to claim 1, which is characterized in that the irradiation is performed from a direction.
らなり被測定面からの反射光が第１および第２の位置検
出器方向に分岐されることを特徴とする実用新案登録請
求の範囲第１項記載の表面検査装置。(3) A request for registration of a utility model characterized in that the light projecting means extends in one direction obliquely to the surface to be measured, and the reflected light from the surface to be measured is branched toward the first and second position detectors. The surface inspection device according to item 1.
にされたことを特徴とする実用新案登録請求の範囲第２
項記載の表面検査装置。(4) Utility model registration claim 2, characterized in that the irradiation perpendicular to the surface to be measured is focused spot irradiation.
The surface inspection device described in Section 1.
れることを特徴とする実用新案登録請求の範囲第４項記
載の表面検査装置。(5) The surface inspection device according to claim 4, wherein the focused spot is maintained at a constant focused diameter on the surface to be measured.
特徴とする実用新案登録請求の範囲第１項乃至第３項の
いずれかに記載の表面検査装置。(6) The surface inspection device according to any one of claims 1 to 3, wherein the light projecting means is a device that projects a laser beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13347083U JPS6041807U (en) | 1983-08-31 | 1983-08-31 | surface inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13347083U JPS6041807U (en) | 1983-08-31 | 1983-08-31 | surface inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6041807U true JPS6041807U (en) | 1985-03-25 |
Family
ID=30301056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13347083U Pending JPS6041807U (en) | 1983-08-31 | 1983-08-31 | surface inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6041807U (en) |
-
1983
- 1983-08-31 JP JP13347083U patent/JPS6041807U/en active Pending
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